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    • 1. 发明授权
    • Charged particle beam transfer mask
    • 带电粒子束传递掩模
    • US06218058B1
    • 2001-04-17
    • US09363686
    • 1999-07-29
    • Takehisa YahiroKazuaki SuzukiShin-ichi Kojima
    • Takehisa YahiroKazuaki SuzukiShin-ichi Kojima
    • G03F900
    • B82Y10/00B82Y40/00G03F1/20H01J37/3174H01J2237/31788
    • A charged particle beam transfer mask (6) has a plurality of subfields (8) each of which having a different pattern density. The charged particle beam transfer mask (6) divide-irradiates a charged particle beam (5) for each of the subfields (8) and reduce-transfers a pattern onto a sensitive substrate. The charged particle beam transfer mask (6) corrects the differences in the de-focus amounts (3) caused by Coulomb effect due to the different pattern densities when the pattern is transferred for each of the subfields (8) so as to eliminate the differences in the de-focus amounts (3) caused by Coulomb effect by pre-varying the position (height) of each of the subfields (8) in the optical axis direction.
    • 带电粒子束传递掩模(6)具有多个具有不同图案密度的子场(8)。 带电粒子束传递掩模(6)对每个子场(8)分开照射带电粒子束(5),并将图案减少到敏感基片上。 带电粒子束传递掩模(6)校正当为每个子场(8)传送图案时由于不同图案密度而由库仑效应引起的去焦量(3)的差异,以消除差异 在通过预先改变每个子场(8)在光轴方向上的位置(高度)而由库仑效应引起的去焦量(3)中。
    • 8. 发明申请
    • Method and system for storing goods trace information
    • 货物追踪信息存储方法和系统
    • US20060080190A1
    • 2006-04-13
    • US11237861
    • 2005-09-29
    • Isao FurukawaShoichi NakagamiTakashi YanagitaHirohisa ShimonagaJunichi MatsudaKazuaki Suzuki
    • Isao FurukawaShoichi NakagamiTakashi YanagitaHirohisa ShimonagaJunichi MatsudaKazuaki Suzuki
    • G06Q99/00
    • G06Q10/08G06Q10/087
    • The present invention provides a goods trace information storing method comprising the steps of: acquiring identification information from an RFID (Radio Frequency Identifier) tag in each distribution level by an identification information read mechanism, and acquiring physical property information of goods, where the RFID tag is attached, by a physical quantity measurement mechanism; a comparison determination mechanism's comparing the physical property information with predetermined threshold information and outputting determination information comprising information for indicating whether or not the physical property information is out of a range of the threshold information; and a registration mechanism's making the acquired identification information, physical property information, and determination information correspond to information for identifying the information group, including information for specifying an acquisition time and an acquired distribution level, and storing them in a memory mechanism.
    • 本发明提供了一种货物追踪信息存储方法,其特征在于包括以下步骤:通过识别信息读取机构从每个分发级别的RFID(射频标识符)标签获取识别信息,并且获取货物的物理属性信息,其中RFID标签 通过物理量测量机制; 比较确定机构将物理属性信息与预定阈值信息进行比较,并输出包括用于指示物理属性信息是否在阈值信息的范围之外的信息的确定信息; 以及登记机构使获取的识别信息,物理属性信息和确定信息对应于用于识别信息组的信息,包括用于指定获取时间和获取的分配级别的信息,并将其存储在存储机构中。