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1. 发明申请

US20090058441A1 ELECTRICAL TEST PROBE 有权
标题翻译：电测试探头
公开(公告)号：US20090058441A1
公开(公告)日：2009-03-05
申请号：US11995279
申请日：2005-08-09
申请人： Hideki Hirakawa , Akira Soma , Takayuki Hayashizaki , Shinji Kuniyoshi , Masahisa Tazawa
发明人： Hideki Hirakawa , Akira Soma , Takayuki Hayashizaki , Shinji Kuniyoshi , Masahisa Tazawa
IPC分类号： G01R31/02
CPC分类号： G01R1/06727 , G01R1/06733 , G01R1/06755
摘要： A probe for electrical test comprises a plate-shaped main portion having a base end to be attached to a support board and a tip end opposite the base end, and a probe tip portion arranged at the tip end of the main portion and having a probe tip to contact an electrode of a device under test, the main portion being made of a tenacity material. The main portion includes a conductive material extending from the base end to the tip end and at least part of which is buried within the tenacity material, and the tenacity material has higher resiliency than that of the conductive material while the conductive material has higher conductivity than that of the tenacity material. As a result, disorder of a signal provided via the probe is decreased without losing elastic deformation.
摘要翻译：用于电测试的探针包括板形主要部分，其具有要附接到支撑板的基端和与基端相对的尖端，以及设置在主要部分的尖端处并具有探针的探针尖端部分尖端接触被测器件的电极，主要部分由韧性材料制成。主要部分包括从基端延伸到末端的导电材料，其至少一部分被埋在韧性材料内，并且韧性材料具有比导电材料更高的弹性，而导电材料具有比坚韧的材料。结果，通过探针提供的信号的紊乱减小而不损失弹性变形。

2. 发明授权

US07679389B2 Probe for electrical test and electrical connecting apparatus using it 有权
标题翻译：探头用于电气测试和使用它的电气连接设备
公开(公告)号：US07679389B2
公开(公告)日：2010-03-16
申请号：US11817493
申请日：2005-03-07
申请人： Shinji Kuniyoshi , Hideki Hirakawa , Akira Soma , Takayuki Hayashizaki
发明人： Shinji Kuniyoshi , Hideki Hirakawa , Akira Soma , Takayuki Hayashizaki
IPC分类号： G01R31/02
CPC分类号： G01R1/06727 , G01R1/06738
摘要： A probe includes an arm region extending in the back and forth direction, and a tip region extending downward from the front end portion of the arm region. The tip region has a pedestal portion integrally continuous to a lower edge portion at the front end side of the arm region and having an underside inclined to an imaginary axis extending in the vertical direction; and a contact portion projected from the underside of the pedestal portion and having a tip orthogonal to an imaginary axis. Thus, the position of the tip can be accurately determined.
摘要翻译：探头包括在前后方向上延伸的臂区域和从臂区域的前端部向下延伸的尖端区域。尖端区域具有与臂区域的前端侧的下边缘部分整体连续的基座部分，并且具有沿垂直方向延伸的假想轴线倾斜的下侧; 以及从基座部分的下侧突出并具有与假想轴正交的尖端的接触部分。因此，可以精确地确定尖端的位置。

3. 发明授权

US07629807B2 Electrical test probe 有权
标题翻译：电测探头
公开(公告)号：US07629807B2
公开(公告)日：2009-12-08
申请号：US11995279
申请日：2005-08-09
申请人： Hideki Hirakawa , Akira Soma , Takayuki Hayashizaki , Shinji Kuniyoshi , Masahisa Tazawa
发明人： Hideki Hirakawa , Akira Soma , Takayuki Hayashizaki , Shinji Kuniyoshi , Masahisa Tazawa
IPC分类号： G01R31/02
CPC分类号： G01R1/06727 , G01R1/06733 , G01R1/06755
摘要： A probe for electrical test comprises a plate-shaped main portion having a base end to be attached to a support board and a tip end opposite the base end, and a probe tip portion arranged at the tip end of the main portion and having a probe tip to contact an electrode of a device under test, the main portion being made of a tenacity material. The main portion includes a conductive material extending from the base end to the tip end and at least part of which is buried within the tenacity material, and the tenacity material has higher resiliency than that of the conductive material while the conductive material has higher conductivity than that of the tenacity material. As a result, disorder of a signal provided via the probe is decreased without losing elastic deformation.
摘要翻译：用于电测试的探针包括板形主要部分，其具有要附接到支撑板的基端和与基端相对的尖端，以及设置在主要部分的尖端处并具有探针的探针尖端部分尖端接触被测器件的电极，主要部分由韧性材料制成。主要部分包括从基端延伸到末端的导电材料，其至少一部分被埋在韧性材料内，并且韧性材料具有比导电材料更高的弹性，而导电材料具有比坚韧的材料。结果，通过探针提供的信号的紊乱减小而不损失弹性变形。

4. 发明授权

US07523539B2 Method of manufacturing a probe 有权
标题翻译：制造探头的方法
公开(公告)号：US07523539B2
公开(公告)日：2009-04-28
申请号：US11935378
申请日：2007-11-05
申请人： Takayuki Hayashizaki , Hideki Hirakawa , Akira Soma , Shinji Kuniyoshi
发明人： Takayuki Hayashizaki , Hideki Hirakawa , Akira Soma , Shinji Kuniyoshi
IPC分类号： G01R3/00
CPC分类号： G01R3/00 , G01R1/07342 , Y10T29/49002 , Y10T29/49007 , Y10T29/49139 , Y10T29/49153 , Y10T29/49224
摘要： In a probe manufacturing method, after a metal material for a probe is deposited on a base table, the probe can be detached from the base table relatively easily without damaging the probe. A recess corresponding to a flat surface shape of a probe is formed by a resist mask on a sacrificial layer on a base table, and a probe is formed by depositing a probe material in the recess. Thereafter, the resist mask is removed, and further the sacrificial layer is removed by an etching process with a part of the sacrificial layer remaining. For the purpose of forming an opening for control of the remaining part of the sacrificial layer in the etching process in the probe so as to let the opening pass through the probe in its plate thickness direction, a hole-forming portion for the opening is formed in the resist mask. Etching of the sacrificial layer in the etching process is promoted from an edge of the opening formed in the probe by this hole-forming portion.
摘要翻译：在探针制造方法中，在用于探针的金属材料沉积在基台上之后，可以相对容易地将探针从基座上分离而不会损坏探针。通过在基台上的牺牲层上的抗蚀剂掩模形成与探针的平坦表面形状对应的凹部，并且通过在凹部中沉积探针材料形成探针。此后，去除抗蚀剂掩模，并且通过蚀刻工艺去除牺牲层，同时牺牲层的一部分残留。为了在探针中的蚀刻工艺中形成用于控制牺牲层的剩余部分的开口以使开口在其厚度方向上穿过探针，形成用于开口的孔形成部分在抗蚀剂掩模。通过该孔形成部分，从形成在探针中的开口的边缘促进蚀刻工艺中的牺牲层的蚀刻。

5. 发明授权

US07586321B2 Electrical test probe and electrical test probe assembly 有权
标题翻译：电气测试探头和电气测试探头组件
公开(公告)号：US07586321B2
公开(公告)日：2009-09-08
申请号：US11847082
申请日：2007-08-29
申请人： Hideki Hirakawa , Akira Soma , Takayuki Hayashizaki , Shinji Kuniyoshi
发明人： Hideki Hirakawa , Akira Soma , Takayuki Hayashizaki , Shinji Kuniyoshi
IPC分类号： G01R31/02
CPC分类号： G01R1/06755 , G01R1/06727 , G01R1/06733
摘要： An electrical test probe comprises a probe tip portion and a probe main body portion having a pedestal portion on which the probe tip portion is formed to be protruded. The probe main body portion is made of a conductive material that is greater in toughness than the probe tip portion, and the probe tip portion is made of a conductive material that is higher in hardness than the material of the probe main body portion. On the pedestal portion is provided a probe tip reinforcement portion that contacts at least one side surface of the probe tip portion, extends toward a tip of the probe tip portion, and permits the tip of the probe tip portion to be protruded from its extending end in the extending direction. Also, the probe tip portion may be in a multi-layer structure having a first metal material layer that is higher in hardness than the tough metal material forming the probe main body portion and a second metal material layer that is greater in toughness than the first metal material layer.
摘要翻译：电测试探头包括探针尖端部分和探针主体部分，其具有其上形成有探针尖端部分突出的基座部分。探针主体部分由导电材料制成，其韧性比探针尖端部分大，并且探针尖端部分由比探针主体部分的材料硬度高的导电材料制成。在基座部上设置有与探针前端部的至少一个侧面接触的探针末端加强部，朝向探针前端部的前端延伸，并且能够使探头前端部的前端从其延伸端突出在延伸方向。此外，探针尖端部分可以是多层结构，其具有比形成探针主体部分的韧性金属材料硬度高的第一金属材料层和韧性大于第一金属材料层的第二金属材料层金属材料层。

6. 发明授权

US07736690B2 Method for manufacturing an electrical test probe 有权
标题翻译：电测试探头的制造方法
公开(公告)号：US07736690B2
公开(公告)日：2010-06-15
申请号：US12017300
申请日：2008-01-21
申请人： Hideki Hirakawa , Yuko Yamada , Yosuke Yoshizawa , Takayuki Hayashizaki , Akira Soma , Shinji Kuniyoshi
发明人： Hideki Hirakawa , Yuko Yamada , Yosuke Yoshizawa , Takayuki Hayashizaki , Akira Soma , Shinji Kuniyoshi
IPC分类号： B05D5/12
CPC分类号： G01R1/06755 , G01R1/06733 , Y10T29/49117 , Y10T29/49204
摘要： A probe tip section of an electrical test probe has a laminated structure consisting of a first deposition portion and a second deposition portion covering the first deposition portion, and by the laminated structure, a maximum cross-sectional area portion at which the cross-sectional area of the probe tip section is increased to a base portion is provided between a tip end of the probe tip section and the base portion in the probe tip section. At the maximum cross-sectional area portion, a dimension in the X direction as seen on a flat surface perpendicular to a protruding direction of the probe tip section is increased in a one-dimensional way, and in addition, a dimension in the Y direction perpendicular to the X direction is increased from the tip end toward the base portion, as a result of which the cross-sectional area of the probe tip section can be increased in a two-dimensional way. Thus, the cross-sectional area at the maximum cross-sectional area portion reaching the base portion of the probe tip section can be made to be larger than in the conventional case, and along with the increase of the cross-sectional area, the stress acting on the base portion can be lowered.
摘要翻译：电测试探针的探针尖端部分具有由第一沉积部分和覆盖第一沉积部分的第二沉积部分组成的层压结构，并且通过层压结构，包括最大横截面积部分，其截面积在探针末端部的前端部与探针头部的基部之间，设置有探针头部的部分增加到基部。在最大横截面积部分，在垂直于探针尖端部分的突出方向的平坦表面上看到的X方向上的尺寸以一维方式增加，另外，Y方向上的尺寸与X方向垂直的方向从前端朝向基部增加，结果能够以二维方式增大探针末端部的截面积。因此，能够使到达到探头前端部的基部的最大截面积部分的截面积大于常规情况，并且随着横截面积的增加，应力可以降低作用于基部的部分。

7. 发明申请

US20090051382A1 PROBE FOR ELECTRICAL TEST AND ELECTRICAL CONNECTING APPARATUS USING IT 有权
标题翻译：电气测试和电气连接设备的探索
公开(公告)号：US20090051382A1
公开(公告)日：2009-02-26
申请号：US11817493
申请日：2005-03-07
申请人： Shinji Kuniyoshi , Hideki Hirakawa , Akira Soma , Takayuki Hayashizaki
发明人： Shinji Kuniyoshi , Hideki Hirakawa , Akira Soma , Takayuki Hayashizaki
IPC分类号： G01R1/067
CPC分类号： G01R1/06727 , G01R1/06738
摘要： A probe includes an arm region extending in the back and forth direction, and a tip region extending downward from the front end portion of the arm region. The tip region has a pedestal portion integrally continuous to a lower edge portion at the front end side of the arm region and having an underside inclined to an imaginary axis extending in the vertical direction; and a contact portion projected from the underside of the pedestal portion and having a tip orthogonal to an imaginary axis. Thus, the position of the tip can be accurately determined.
摘要翻译：探头包括在前后方向上延伸的臂区域和从臂区域的前端部向下延伸的尖端区域。尖端区域具有与臂区域的前端侧的下边缘部分整体连续的基座部分，并且具有沿垂直方向延伸的假想轴线倾斜的下侧; 以及从基座部分的下侧突出并具有与假想轴正交的尖端的接触部分。因此，可以精确地确定尖端的位置。

8. 发明授权

US08975908B2 Electrical test probe and probe assembly with improved probe tip 有权
标题翻译：具有改进的探头尖端的电气测试探头和探针组件
公开(公告)号：US08975908B2
公开(公告)日：2015-03-10
申请号：US13235155
申请日：2011-09-16
申请人： Takayuki Hayashizaki , Akira Soma , Hideki Hirakawa
发明人： Takayuki Hayashizaki , Akira Soma , Hideki Hirakawa
IPC分类号： G01R1/067 , G01R1/073
CPC分类号： G01R1/06738 , G01R1/06716 , G01R1/07307
摘要： An embodiment disperses a force acting on a border portion between an extending portion and a pedestal portion or a reinforcing member to prevent breakage of a probe tip portion of a probe. An electrical test probe includes a probe main body, a recess provided at an end of the main body and having an inner surface, and a probe tip having a part received in the recess. The inner surface has a central area and two lateral areas on both sides of the central area, and the part of the probe tip is located at the central area and at least at either one of the lateral areas.
摘要翻译：实施例分散作用在延伸部分和基座部分或加强部件之间的边界部分上的力，以防止探针的探针末端部分断裂。电测试探头包括探针主体，设置在主体的端部处并具有内表面的凹部和具有容纳在凹部中的部分的探针尖端。内表面在中心区域的两侧具有中心区域和两个侧面区域，并且探针尖端的一部分位于中心区域处，并且至少在两个侧面区域中的任一个处。

9. 发明授权

US07721429B2 Method for manufacturing a probe 有权
标题翻译：探针制造方法
公开(公告)号：US07721429B2
公开(公告)日：2010-05-25
申请号：US12017299
申请日：2008-01-21
申请人： Akira Soma , Takayuki Hayashizaki , Yosuke Yoshizawa , Hideki Hirakawa
发明人： Akira Soma , Takayuki Hayashizaki , Yosuke Yoshizawa , Hideki Hirakawa
IPC分类号： H01R43/16
CPC分类号： H01R13/2407 , H01R43/16 , H01R2201/20 , Y10T29/49126 , Y10T29/49128 , Y10T29/4913 , Y10T29/49153 , Y10T29/49204 , Y10T29/49222
摘要： A probe formed on a base table is detached from the base table without giving damage on the probe. The present invention provides a probe manufacturing method comprising the steps of forming on a sacrificial layer on a base table a recess exposing the sacrificial layer with a resist, depositing a probe material in the recess to form a probe and then removing the resist, leaving part of the sacrificial layer and removing the rest by an etching process, and detaching from the base table the probe held on the base table by the remaining part of the sacrificial layer. In the recess of the resist are formed a main body part corresponding to a flat surface shape of the probe and an auxiliary part continuing into the main body part. The probe is formed by deposition of the material at the main body part, and a holding portion is formed by deposition of the material at the auxiliary part. The auxiliary part is formed in a flat surface shape sufficient for a sacrificial layer part under the holding portion to remain when a sacrificial layer part under the probe is removed by the etching process. The probe is separated from the holding portion after the sacrificial layer part under the probe is removed and while the sacrificial layer part under the holding portion remains.
摘要翻译：形成在基台上的探头与基座分离而不会损坏探头。本发明提供了一种探针制造方法，包括以下步骤：在基台上的牺牲层上形成用抗蚀剂暴露牺牲层的凹部，将探针材料沉积在凹部中以形成探针，然后除去抗蚀剂，留下部分的牺牲层，并通过蚀刻工艺去除其余部分，并且通过牺牲层的剩余部分从基台分离保持在基台上的探针。在抗蚀剂的凹部中形成有对应于探针的平坦表面形状的主体部分和连续进入主体部分的辅助部件。探针通过在主体部分沉积材料形成，并且通过在辅助部分沉积材料形成保持部分。当通过蚀刻工艺去除探针下方的牺牲层部分时，辅助部件形成为足够用于保持部分下方的牺牲层部分的平坦表面形状。在探针下方的牺牲层部分被去除之后，并且在保持部分下面的牺牲层部分保留下来，探针与保持部分分离。

10. 发明授权

US07862733B2 Method for manufacturing a probe 有权
标题翻译：探针制造方法
公开(公告)号：US07862733B2
公开(公告)日：2011-01-04
申请号：US11960502
申请日：2007-12-19
申请人： Takayuki Hayashizaki , Hideki Hirakawa , Akira Soma , Kazuhito Hamada
发明人： Takayuki Hayashizaki , Hideki Hirakawa , Akira Soma , Kazuhito Hamada
IPC分类号： B44C1/22
CPC分类号： C23F1/02 , C23F1/10 , G01R3/00
摘要： The present invention provides a probe manufacturing method in which, after a metal material for a probe is deposited on a base table, the probe can be detached from the base table relatively easily. A sacrificial layer is formed on a base table. The sacrificial layer is partially removed so as to form a recess in the sacrificial layer. A mask that exposes an area formed in a desired probe flat surface shape containing the recess is formed on the sacrificial layer. A probe material exhibiting different etching resistance characteristics from those of the sacrificial layer is deposited in the area exposed from the mask. By the deposition of the material, a coupling portion corresponding to the recess and a probe that is integral with the coupling portion are formed. After the mask is removed, the sacrificial layer is removed with use of etchant. Thereafter, the probe held on the base table at the coupling portion is detached from the base table together with the coupling portion.
摘要翻译：本发明提供一种探针制造方法，其中，在用于探针的金属材料沉积在基台上之后，可以相对容易地将探针从基台拆下。牺牲层形成在基台上。牺牲层被部分去除，以便在牺牲层中形成凹陷。在牺牲层上形成露出形成有包含凹部的所需探针平坦表面形状的区域的掩模。表现出与牺牲层不同的耐腐蚀性特性的探针材料沉积在从掩模暴露的区域中。通过沉积材料，形成与凹部相对应的联接部分和与联接部分成一体的探针。在去除掩模之后，使用蚀刻剂去除牺牲层。此后，在联接部分处保持在基台上的探针与联接部分一起从基台拆下。

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