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1. 发明授权

US06897456B2 Differential pumping system and exposure apparatus 失效
标题翻译：差压泵系统和曝光装置
公开(公告)号：US06897456B2
公开(公告)日：2005-05-24
申请号：US10656727
申请日：2003-09-05
申请人： Takayuki Hasegawa , Akira Miyake , Nobuaki Ogushi
发明人： Takayuki Hasegawa , Akira Miyake , Nobuaki Ogushi
IPC分类号： G21K5/00 , F04D19/04 , F04D29/053 , G03F7/20 , G03F7/22 , G21K5/02 , H01L21/027 , A61N5/00
CPC分类号： G03F7/70841 , G03F7/70916
摘要： A differential pumping system includes a first chamber for storing a light source that emits light, a second chamber that receives light from the first chamber, and a vacuum pump, provided between the first and second chambers, which includes a hollow shaft through which the light passes, and exhausts the hollow shaft.
摘要翻译：差动泵送系统包括用于存储发光的光源的第一室，接收来自第一室的光的第二室和设置在第一和第二室之间的真空泵，该真空泵包括空心轴，通过该空心轴，通过并排空空心轴。

2. 发明授权

US6009144A X-ray system and X-ray exposure apparatus 失效
标题翻译： X射线系统和X射线曝光装置
公开(公告)号：US6009144A
公开(公告)日：1999-12-28
申请号：US48126
申请日：1998-03-26
申请人： Nobuaki Ogushi , Takayuki Hasegawa
发明人： Nobuaki Ogushi , Takayuki Hasegawa
IPC分类号： G21K5/02 , G03F7/20 , G21F3/00 , G21K5/04 , H01L21/027 , H05H13/04 , G21K5/00
CPC分类号： G21K5/04
摘要： An X-ray system includes a radiation source for producing a radiation beam containing X-rays, a mirror device for reflecting X-rays, a beam duct for introducing the X-rays reflected by the mirror device, to an irradiation zone where an object to be irradiated can be exposed, and a shutter capable of blocking the radiation beam. A protection wall is disposed downstream of the mirror device with respect to the radiation source, for blocking the radiation beam. When the protection wall has a thickness t, the beam duct passing through the protection wall has an opening size a, and the beam duct has a tilt angle .theta., there is a relation (t-t.sub.0) sin .theta..gtoreq.a, where t.sub.0 is a minimum thickness of the protection wall required to substantially block the radiation beam from a radiation source.
摘要翻译： X射线系统包括用于产生包含X射线的辐射束的辐射源，用于反射X射线的反射镜装置，用于将由反射镜装置反射的X射线引入的光束管道，可以被照射，以及能够阻挡辐射束的快门。保护壁相对于辐射源设置在反射镜装置的下游，用于阻挡辐射束。当保护壁具有厚度t时，通过保护壁的光束管道具有开口尺寸a，并且光束管道具有倾斜角度θ，存在关系（t-t0）sinθ> / = a，其中 t0是基本上阻挡来自辐射源的辐射束所需的保护壁的最小厚度。

3. 发明授权

US06891172B2 Differential pumping system and exposure apparatus 失效
标题翻译：差压泵系统和曝光装置
公开(公告)号：US06891172B2
公开(公告)日：2005-05-10
申请号：US10652690
申请日：2003-08-28
申请人： Nobuaki Ohgushi , Akira Miyake , Takayuki Hasegawa , Jun Ito
发明人： Nobuaki Ohgushi , Akira Miyake , Takayuki Hasegawa , Jun Ito
IPC分类号： G03F7/20 , H01L21/027 , A61N5/00
CPC分类号： B82Y10/00 , G03F7/70033 , G03F7/70041 , G03F7/7055 , G03F7/70841 , G03F7/70916 , G21K1/043
摘要： A differential pumping system includes a first chamber for storing a light source that emits pulsed light, a first exhaust unit for exhausting said first chamber, a second chamber being connectible to the first chamber to receive the pulsed light, a second exhaust unit for exhausting said second chamber, and a connection control mechanism between the first and second chambers for connecting the first chamber to the second chamber when the pulsed light emits, and for disconnecting the first chamber from the second chamber when the pulsed light does not emit.
摘要翻译：差分泵送系统包括用于存储发射脉冲光的光源的第一室，用于排出所述第一室的第一排气单元，可连接到第一室以接收脉冲光的第二室，用于排出所述第一室的第二室，第二室，以及在第一和第二室之间的连接控制机构，用于当脉冲光发射时将第一室连接到第二室，并且用于当脉冲光不发射时将第一室与第二室隔离。

4. 发明申请

US20050128478A1 Optical unit and measuring apparatus having the same 审中-公开
标题翻译：光学单元及其测量装置
公开(公告)号：US20050128478A1
公开(公告)日：2005-06-16
申请号：US11002889
申请日：2004-12-03
申请人： Takayuki Hasegawa , Akira Miyake
发明人： Takayuki Hasegawa , Akira Miyake
IPC分类号： G01N23/22 , G01B11/30 , G01J3/28 , G01M11/00 , G01T1/36 , G01B11/24
CPC分类号： G01B11/30 , G01J3/28
摘要： An optical unit includes a spectrometer that includes a diffraction grating for separating light, and a beam intensity sensor for detecting a light intensity of light emitted from the spectrometer, wherein the beam intensity sensor includes, in order from a light incident side to a light exit side, an aperture having a first opening that restricts a width of incident light, and a light receiving sensor that has a second opening for detecting part of light from the aperture, wherein the second opening in the light receiving sensor is wider than the first opening in the aperture in a spectral direction of the light from the spectrometer, and wherein the second opening in the light receiving sensor is narrower than the first opening in the aperture in a direction orthogonal to the spectral direction of the light from the spectrometer.
摘要翻译：光学单元包括：光谱仪，其包括用于分离光的衍射光栅;以及光束强度传感器，用于检测从光谱仪发射的光的光强度，其中光束强度传感器包括从光入射侧到光出射具有限制入射光的宽度的第一开口的孔，以及具有用于检测来自所述孔的部分光的第二开口的光接收传感器，其中所述光接收传感器中的所述第二开口比所述第一开口宽在来自光谱仪的光的光谱方向上的孔中，并且其中光接收传感器中的第二开口在与光谱仪的光的光谱方向正交的方向上比孔中的第一开口窄。

5. 发明授权

US07280184B2 Assembly and adjusting method of optical system, exposure apparatus having the optical system 失效
标题翻译：光学系统的装配和调整方法，具有光学系统的曝光装置
公开(公告)号：US07280184B2
公开(公告)日：2007-10-09
申请号：US11123975
申请日：2005-05-06
申请人： Takayuki Hasegawa , Akira Miyake
发明人： Takayuki Hasegawa , Akira Miyake
IPC分类号： G03B27/42 , G03B27/32
CPC分类号： G03F7/706 , G03F7/70258
摘要： An adjusting method of an optical system composed plural optical elements each having a multilayer film, said adjusting method that includes a first measuring step that obtains, for each optical element, a difference between a phase distribution of which an EUV light (Extreme Ultraviolet light) is reflected from the optical element and a phase distribution of which a light with a wavelength that is longer than the EUV light is reflected from the optical element, a second measuring step that measures a phase distribution of which the light passes the optical system, a deciding step that decides a phase distribution of which the EUV light passes through the optical system based on the phase distribution difference obtained by the first measuring step and the phase distribution measured by the second measuring step, and an adjusting step that adjusts at least one of a position and a posture of the optical element based on the phase distribution decided by the deciding step.
摘要翻译：一种由多个光学元件组成的光学系统的调整方法，所述多个光学元件具有多层膜，所述调整方法包括对于每个光学元件获得EUV光（极紫外光）的相位分布之间的差异的第一测量步骤，从所述光学元件反射并且从所述光学元件反射具有比所述EUV光更长的波长的光的相位分布，测量所述光通过所述光学系统的相位分布的第二测量步骤，决定步骤，其基于由所述第一测量步骤获得的相位分布差和由所述第二测量步骤测量的相位分布，决定所述EUV光通过所述光学系统的相位分布;以及调整步骤，基于由判定步骤决定的相位分布的光学元件的位置和姿势。

6. 发明申请

US20050264779A1 Assembly and adjusting method of optical system, exposure apparatus having the optical system 失效
标题翻译：光学系统的装配和调整方法，具有光学系统的曝光装置
公开(公告)号：US20050264779A1
公开(公告)日：2005-12-01
申请号：US11123975
申请日：2005-05-06
申请人： Takayuki Hasegawa , Akira Miyake
发明人： Takayuki Hasegawa , Akira Miyake
IPC分类号： G01M11/02 , G02B7/00 , G02B7/198 , G03F7/20 , H01L21/027 , G03B27/42
CPC分类号： G03F7/706 , G03F7/70258
摘要： An adjusting method of an optical system composed plural optical elements each having a multilayer film, said adjusting method that includes a first measuring step that obtains, for each optical element, a difference between a phase distribution of which an EUV light (Extreme Ultraviolet light) is reflected from the optical element and a phase distribution of which a light with a wavelength that is longer than the EUV light is reflected from the optical element, a second measuring step that measures a phase distribution of which the light passes the optical system, a deciding step that decides a phase distribution of which the EUV light passes through the optical system based on the phase distribution difference obtained by the first measuring step and the phase distribution measured by the second measuring step, and an adjusting step that adjusts at least one of a position and a posture of the optical element based on the phase distribution decided by the deciding step.
摘要翻译：一种由多个光学元件组成的光学系统的调整方法，所述多个光学元件具有多层膜，所述调整方法包括对于每个光学元件获得EUV光（极紫外光）的相位分布之间的差异的第一测量步骤，从所述光学元件反射并且从所述光学元件反射具有比所述EUV光更长的波长的光的相位分布，测量所述光通过所述光学系统的相位分布的第二测量步骤，决定步骤，其基于由所述第一测量步骤获得的相位分布差和由所述第二测量步骤测量的相位分布，决定所述EUV光通过所述光学系统的相位分布;以及调整步骤，基于由判定步骤决定的相位分布的光学元件的位置和姿势。

7. 发明授权

US09314892B2 Method and apparatus for multiple cutoff machining of rare earth magnet block, cutting fluid feed nozzle, and magnet block securing jig 有权
公开(公告)号：US09314892B2
公开(公告)日：2016-04-19
申请号：US13554363
申请日：2012-07-20
申请人： Koji Sato , Takehisa Minowa , Takaharu Yamaguchi , Takayuki Hasegawa , Kazuhito Akada
发明人： Koji Sato , Takehisa Minowa , Takaharu Yamaguchi , Takayuki Hasegawa , Kazuhito Akada
IPC分类号： B24D5/10 , B28D7/02 , B24B1/00 , B24B27/06 , B28D5/00 , B28D5/02
CPC分类号： B24B1/00 , B24B27/0658 , B24B27/0675 , B28D5/0076 , B28D5/029
摘要： In a method for multiple cutoff machining a rare earth magnet block, a cutting fluid feed nozzle having a plurality of slits is combined with a plurality of cutoff abrasive blades coaxially mounted on a rotating shaft, each said blade comprising a base disk and a peripheral cutting part. The slits in the feed nozzle into which the outer peripheral portions of cutoff abrasive blades are inserted serve to restrict any axial run-out of the cutoff abrasive blades during rotation. Cutting fluid is fed from the feed nozzle through slits to the rotating cutoff abrasive blades and eventually to points of cutoff machining on the magnet block.

8. 发明授权

US08840356B2 Workpiece transporting apparatus and method for transporting the same 有权
标题翻译：工件输送装置及其运送方法
公开(公告)号：US08840356B2
公开(公告)日：2014-09-23
申请号：US13227537
申请日：2011-09-08
申请人： Masayuki Kaneko , Taro Nakamura , Takayuki Hasegawa
发明人： Masayuki Kaneko , Taro Nakamura , Takayuki Hasegawa
IPC分类号： B25J15/00
CPC分类号： B25J15/10 , B25J15/0052 , Y10S901/02 , Y10S901/30 , Y10S901/31 , Y10S901/41
摘要： A workpiece transporting apparatus includes a hand, a rotating portion for rotatably holding the hand, an arm provided in the hand and having one end provided at the rotating portion, and a holding portion provided in the hand and provided to another end of the arm for holding a workpiece, in which a center portion of the holding portion is disposed with a predetermined interval from an axial line extended from a rotational center of the rotating portion toward another end of the arm.
摘要翻译：工件传送装置包括手，用于可旋转地保持手的旋转部分，设置在手中的臂，其一端设置在旋转部分，以及保持部，其设置在手中并设置在手臂的另一端，用于保持工件，其中保持部分的中心部分从从旋转部分的旋转中心向臂的另一端延伸的轴线以预定间隔设置。

9. 发明申请

US20130028787A1 STERILIZATION AUXILIARY FOR OZONE STERILIZATION AND OZONE STERILIZATION METHOD 审中-公开
标题翻译：消毒辅助用于臭氧消毒和臭氧消毒方法
公开(公告)号：US20130028787A1
公开(公告)日：2013-01-31
申请号：US13640667
申请日：2011-04-07
申请人： Yoshikuni Takeuchi , Sonoko Nishimura , Shinnichi Watanabe , Aiko Hayashi , Takayuki Hasegawa , Takayasu Kubozono
发明人： Yoshikuni Takeuchi , Sonoko Nishimura , Shinnichi Watanabe , Aiko Hayashi , Takayuki Hasegawa , Takayasu Kubozono
IPC分类号： A61L2/18 , A01P1/00 , A01N59/06
CPC分类号： A61L2/183 , A01N59/00 , A01N59/06 , C02F1/50 , C02F1/78 , C02F2209/06 , A01N25/22 , A01N37/02 , A01N37/04 , A01N37/06 , A01N37/36 , A01N59/26 , A01N2300/00
摘要： The present invention provides a sterilization auxiliary for ozone sterilization which is an aqueous solution including a Component (A) of an aluminum compound which produces aluminum ions in an aqueous solution, and a Component (B) of one or more of acids selected from phosphoric acid, citric acid, malic acid, succinic acid, gluconic acid, lactic acid, and L-tartaric acid, wherein the pH of the aqueous solution is greater than or equal to 1.0 and less than 5.0, and an ozone sterilization method for ozone-treating a substance to be treated using the sterilization auxiliary. According to the present invention, a sterilization auxiliary for ozone sterilization in which a high sterilizing effect may be obtained using less ozone without burdening sterilization apparatus and a substance to be treated, and a low-cost ozone sterilization method using the sterilization auxiliary can be provided.
摘要翻译：本发明提供一种臭氧灭菌用杀菌辅助剂，其为包含在水溶液中产生铝离子的铝化合物的成分（A）的水溶液和选自磷酸中的一种或多种酸的成分（B）柠檬酸，苹果酸，琥珀酸，葡萄糖酸，乳酸，L-酒石酸等，其中，所述水溶液的pH为1.0以上且小于5.0，臭氧处理臭氧处理方法使用灭菌辅助剂处理的物质。根据本发明，可以提供一种臭氧灭菌用灭菌辅助剂，其中可以使用较少的臭氧而不需要负担消毒装置和待处理物质获得高消毒效果，并且可以提供使用灭菌辅助剂的低成本臭氧灭菌方法。

10. 发明申请

US20120326371A1 MAGNET HOLDING JIG 有权
公开(公告)号：US20120326371A1
公开(公告)日：2012-12-27
申请号：US13530527
申请日：2012-06-22
申请人： Yuhito Doi , Takayuki Hasegawa , Takaharu Yamaguchi , Takehisa Minowa
发明人： Yuhito Doi , Takayuki Hasegawa , Takaharu Yamaguchi , Takehisa Minowa
IPC分类号： B23Q3/15
CPC分类号： B24B41/06 , B24B19/26 , B24B27/06 , Y10T83/263
摘要： When a rare earth magnet block is cut or ground by a cutting or grinding tool, a jig is used for holding the magnet block in place. The jig comprises a base, a pair of metal support members disposed on opposite sides of the base and provided with grooves, and rubber rods received in the support member grooves such that the rubber rod partially protrudes from the groove and abuts on the groove bottom. The magnet block is rested on the base and clamped between the rubber rods. The volume of the groove is larger than the volume of the rubber rod.
摘要翻译：当通过切割或研磨工具切割或研磨稀土磁体块时，使用夹具将磁块保持在适当位置。夹具包括基座，一对金属支撑构件，设置在基座的相对侧并设置有凹槽，以及橡胶杆，容纳在支撑构件槽中，使得橡胶杆从凹槽部分地突出并抵接在凹槽底部。将磁体块放置在基座上并夹在橡胶棒之间。槽的体积大于橡胶棒的体积。

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