会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 5. 发明授权
    • Method and device for simulation, method and device for polishing, method and device for preparing control parameters or control program, polishing system, recording medium, and method of manufacturing semiconductor device
    • 用于抛光的方法和装置,用于抛光的方法和装置,用于制备控制参数或控制程序的方法和装置,抛光系统,记录介质以及制造半导体装置的方法
    • US07108580B2
    • 2006-09-19
    • US10774623
    • 2004-02-10
    • Yoshijiro UshioKiyoshi Iizuka
    • Yoshijiro UshioKiyoshi Iizuka
    • B24B51/00
    • B24B51/00B24B57/02
    • The preparation apparatus 4 determines the target distribution of the amount of polishing on the basis of the film thickness of the wafer 2 measured by the measuring apparatus 3. The preparation apparatus 4 assumes a control program for the purpose of controlling the polishing apparatus 1, and predicts the distribution of the amount of polishing that is obtained after the wafer 2 is polished by the polishing apparatus 1 in accordance with the assumed control program. In this case, the amount of polishing in individual partial regions of the polished surface of the wafer 2 is predicted using an indicator that indicates the height distribution of the polishing surface of the polishing pad 14 (when no pressure is applied to this polishing pad) as one parameter. The preparation apparatus 4 judges the acceptability of the assumed control program by comparing the predicted distribution of the amount of polishing and the target distribution of the amount of polishing. The polishing apparatus 1 polishes the wafer 2 in accordance with a control program that has been judged to be acceptable. As a result, the desired film thickness distribution on the side of the polished surface of the object of polishing can be simulated with good precision.
    • 制备装置4基于由测量装置3测量的晶片2的膜厚确定抛光量的目标分布。 制备装置4采用用于控制抛光装置1的控制程序,并且根据假设的控制程序预测抛光装置1抛光晶片2后获得的抛光量的分布。 在这种情况下,使用表示研磨垫14的研磨面的高度分布的指示器(当对该研磨垫没有施加压力时)来预测晶片2的研磨面的各个部分区域的研磨量, 作为一个参数。 准备装置4通过比较抛光量的预测分布和抛光量的目标分布来判断假设控制程序的可接受性。 抛光装置1根据已被判定为可接受的控制程序对晶片2进行抛光。 结果,可以以高精度模拟抛光对象抛光表面一侧所需的膜厚分布。
    • 7. 发明授权
    • Blur detecting device
    • 模糊检测装置
    • US4586029A
    • 1986-04-29
    • US546082
    • 1983-10-27
    • Shuichi TamuraKiyoshi Iizuka
    • Shuichi TamuraKiyoshi Iizuka
    • G03B17/18G01B11/00G02B7/00G03B5/00G03B7/08G08B21/00
    • G03B7/0807G03B2217/005
    • A blur detecting device comprises a plurality of photo-electric converter elements which are arranged in different positions to receive light from an object and to convert quantities of light received into quantities of electricity. Electric charge storing elements are included which store the quantities of electricity obtained from the photo-electric converter elements. A computing circuit in the blur detecting device obtains the ratio of the quantities of electricity stored at the electric charge storing elements. An indicating circuit compares signals produced from the computing circuit at different lengths of light receiving time and indicates a blurred state of the light received from the object.
    • 模糊检测装置包括多个光电转换器元件,其被布置在不同位置以接收来自物体的光并将接收的光量转换成数量的电量。 包括存储从光电转换器元件获得的电量的电荷存储元件。 模糊检测装置中的计算电路获得存储在电荷存储元件上的电量的比率。 指示电路将来自计算电路的信号以不同长度的光接收时间进行比较,并且指示从对象接收的光的模糊状态。
    • 8. 发明授权
    • Display device
    • 显示设备
    • US4711547A
    • 1987-12-08
    • US802751
    • 1985-11-27
    • Kiyoshi Iizuka
    • Kiyoshi Iizuka
    • G02F1/157G03B17/18G03B17/20
    • G02F1/157G03B17/18G03B17/20
    • A display device includes a non-luminescent type display element (an electro-chromic display element) which changes concentration with a voltage applied thereto, and a self-luminescent type display element (an electro-luminescent display element) which emits light according as a voltage is applied thereto. The two display elements are laminated together and formed, one as a color forming layer and the other as a luminescent layer, into a desired shape for visual observation. The laminated display elements are arranged in a visually observable display part of the display device.
    • 一种显示装置,其特征在于,包括以施加电压的方式使浓度变化的非发光型显示元件(电致发光型显示元件),以及发光的自发光型显示元件(电致发光显示元件) 施加电压。 两个显示元件层叠在一起,形成为一个作为发色层的成色层,另一个作为发光层,形成用于目视观察的所需形状。 层叠显示元件布置在显示装置的视觉上可观察的显示部分中。