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    • 4. 发明授权
    • Method of manufacturing near field light generating device
    • 制造近场光产生装置的方法
    • US06303402B1
    • 2001-10-16
    • US09604408
    • 2000-06-27
    • Takuji HatanoAkira Sato
    • Takuji HatanoAkira Sato
    • H01L2100
    • G11B7/1387B82Y10/00
    • A method of manufacturing a near field light generating device is provided. A photoresist layer is formed on a transparent layer (123). Then, illumination light (L2) directed from the side of solid immersion lenses (11) passes through first openings (122a) and the transparent layer (123) to reach and expose the photoresist layer. After development of the photoresist layer, exposed parts of the photoresist remain as microscopic resist regions (MR) in positions corresponding to the first openings (122a). After a second opaque layer (124) is formed on the transparent layer (123) and the microscopic resist regions (MR), the microscopic resist regions (MR) are removed by a lift-off method to form second openings (124a) in the second opaque layer (124). The first openings (122a) are thus used as a photomask to form the second openings (124a). Therefore, a large number of microscopic openings (MO) having good product quality are formed accurately and easily as the near field light generating device.
    • 提供一种制造近场光产生装置的方法。 在透明层(123)上形成光致抗蚀剂层。 然后,从固体浸没透镜(11)侧指示的照明光(L2)穿过第一开口(122a)和透明层(123)以到达并暴露光致抗蚀剂层。 在光致抗蚀剂层显影之后,光刻胶的曝光部分在对应于第一开口(122a)的位置上保持为微观抗蚀剂区域(MR)。 在透明层(123)和微观抗蚀剂区域(MR)上形成第二不透明层(124)之后,通过剥离方法去除微观抗蚀剂区域(MR),以形成第二开口(124a) 第二不透明层(124)。 因此,第一开口(122a)用作光掩模以形成第二开口(124a)。 因此,作为近场光产生装置,准确且容易地形成具有良好的产品质量的大量的微小开口(MO)。
    • 10. 发明授权
    • Method of manufacturing a discrete track medium type perpendicular magnetic recording medium
    • 离散轨道介质型垂直磁记录介质的制造方法
    • US08404130B2
    • 2013-03-26
    • US12854096
    • 2010-08-10
    • Akira Sato
    • Akira Sato
    • B44C1/22
    • B32B38/10B32B37/02B32B2309/105B32B2429/02G11B5/855Y10T156/1052
    • A method of manufacturing a discrete track medium type perpendicular magnetic recording layer with reduced magnetic interference between tracks and enhanced magnetic recording density is disclosed in which protruding parts of a pattern of protrusions and recesses provided in a composite magnetic recording layer are formed in high quality having a similar film thickness and equivalent perpendicular magnetic recording performance to a perpendicular magnetic recording layer designed for a continuous film type medium. The method includes a first step of laminating at least a magnetic recording layer, a sacrifice layer, and a carbon protective layer on a nonmagnetic substrate in this order; a second step of selectively removing the resist film and the carbon protective layer at openings for forming recessed parts using a mask of a resist film pattern formed concentric to form protruding parts for constructing recording tracks; a third step of modifying the sacrifice layer and the magnetic recording layer exposing at the recessed parts into a nonmagnetic state; a fourth step of removing the resist film, the carbon protective layer, and the sacrifice layer at the protruding parts between the recessed parts; and a fifth step of depositing a carbon protective layer and a lubricant layer in this order on the recessed parts and the protruding parts.
    • 公开了一种制造具有磁道和磁记录密度之间的磁干扰减小的离散轨道介质型垂直磁记录层的方法,其中设置在复合磁记录层中的突起和凹陷图案的突出部分以高质量形成, 对于连续膜型介质设计的垂直磁记录层具有相似的膜厚度和等效的垂直磁记录性能。 该方法包括:依次层叠至少磁性记录层,牺牲层和碳保护层的第一步骤; 使用同心形成的抗蚀剂膜图案的掩模来形成凹部的开口处选择性地去除抗蚀剂膜和碳保护层的第二步骤,以形成用于构建记录轨道的突出部分; 将牺牲层和在所述凹陷部暴露的磁记录层修改为非磁性状态的第三步骤; 在凹部之间的突出部分除去抗蚀剂膜,碳保护层和牺牲层的第四步骤; 以及在凹部和突出部上依次沉积碳保护层和润滑剂层的第五步骤。