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1. 发明授权

US06829091B2 Optical system and optical instrument with diffractive optical element 失效
$Optical system and optical instrument with diffractive optical element$
标题翻译：具有衍射光学元件的光学系统和光学仪器
公开(公告)号：US06829091B2
公开(公告)日：2004-12-07
申请号：US09362698
申请日：1999-07-29
申请人： Takashi Kato , Kenji Saitoh , Hiroshi Maehara , Makoto Ogusu , Keiko Chiba
发明人： Takashi Kato , Kenji Saitoh , Hiroshi Maehara , Makoto Ogusu , Keiko Chiba
IPC分类号： G02B518
CPC分类号： G02B5/1814 , G02B5/1838 , G02B5/1857 , G02B5/1895 , G02B7/00 , G02B27/4222 , G03F7/70316 , G03F7/70825
摘要： An optical system for forming an image of an object. The optical system includes an optical element, which is deformed by the weight thereof, and at least one optical member for preventing a change in optical performance of the optical system due to deformation of the optical element, when the optical element is provided in the optical system.
摘要翻译：一种用于形成物体的图像的光学系统。该光学系统包括光学元件，该光学元件由于其重量而变形，并且至少一个光学构件用于防止当光学元件设置在光学元件中时由于光学元件的变形而导致的光学系统的光学性能的变化系统。

2. 发明授权

US6083650A Device manufacturing method utilizing concentric fan-shaped pattern mask 失效
标题翻译：使用同心扇形图案掩模的装置制造方法
公开(公告)号：US6083650A
公开(公告)日：2000-07-04
申请号：US105047
申请日：1998-06-26
申请人： Makoto Ogusu , Kenji Saitoh
发明人： Makoto Ogusu , Kenji Saitoh
IPC分类号： G02B5/18 , G03F7/20 , G03F9/00 , H01L21/027
CPC分类号： G03F7/70425 , G03F7/70433 , G03F9/70
摘要： A method of manufacturing an element with a concentric pattern by use of a photolithographic process is disclosed, wherein the method includes preparing masks having segment patterns corresponding to fan-shaped regions, respectively, of the pattern which fan-shaped regions can be defined by dividing the pattern by at least one circle concentric with the pattern to provide plural zones and then by dividing each zone equiangularly, and-exposing regions of a substrate corresponding to the plural zones, respectively, by using the masks corresponding to the zones, respectively, while rotating the substrate by regular angles.
摘要翻译：公开了一种通过使用光刻工艺制造具有同心图案的元件的方法，其中该方法包括分别制备具有对应于图案的扇形区域的扇形图案的掩模，该扇形图案可以通过划分扇形区域来限定扇形区域所述图案与所述图案同心的至少一个圆圈以提供多个区域，然后通过分别使用对应于所述区域的掩模分别对每个区域进行等角度划分和曝光与多个区域对应的基板的区域，同时以规则的角度旋转基板。

3. 发明授权

US06221541B1 Device manufacturing method and apparatus utilizing concentric fan-shaped pattern mask 有权
标题翻译：使用同心扇形图案掩模的装置制造方法和装置
公开(公告)号：US06221541B1
公开(公告)日：2001-04-24
申请号：US09570936
申请日：2000-05-15
申请人： Makoto Ogusu , Kenji Saitoh
发明人： Makoto Ogusu , Kenji Saitoh
IPC分类号： G03F900
CPC分类号： G03F7/70425 , G03F7/70433 , G03F9/70
摘要： A method of manufacturing an element with a concentric pattern by use of a photolithographic process is disclosed, wherein the method includes preparing masks having segment patterns corresponding to fan-shaped regions, respectively, of the pattern which fan-shaped regions can be defined by dividing the pattern by at least one circle concentric with the pattern to provide plural zones and then by dividing each zone equiangularly, and exposing regions of a substrate corresponding to the plural zones, respectively, by using the masks corresponding to the zones, respectively, while rotating the substrate by regular angles.
摘要翻译：公开了一种通过使用光刻工艺制造具有同心图案的元件的方法，其中该方法包括分别制备具有对应于图案的扇形区域的扇形图案的掩模，该扇形图案可以通过划分扇形区域来限定扇形区域所述图案与所述图案同心的至少一个圆圈以提供多个区域，然后通过等角度地划分每个区域，并且分别通过使用对应于所述区域的掩模来分别暴露与所述多个区域相对应的基板的区域，同时旋转基板以规则的角度。

4. 发明授权

US07957636B2 Illumination apparatus and appearance inspection apparatus including the same 有权
标题翻译：照明装置及其外观检查装置
公开(公告)号：US07957636B2
公开(公告)日：2011-06-07
申请号：US12612601
申请日：2009-11-04
申请人： Kenji Saitoh , Hiroshi Yoshikawa
发明人： Kenji Saitoh , Hiroshi Yoshikawa
IPC分类号： G03B15/03
CPC分类号： G01N21/8806 , G01N2021/8812 , G01N2021/8819 , G01N2021/8848 , G02B6/0018 , G02B6/002 , G02B6/0046 , G03B15/03
摘要： An illumination apparatus which illuminates a surface of an object having a three-dimensional shape includes a light source, a guide configured to guide light from the light source to a surface of the object, and a diffuser which has a diffusion-reflection surface that faces a light exit surface of the guide via the object, wherein the diffuser is arranged at such a position that the light which is emitted from the guide and is not directly incident on the object is incident on the diffusion-reflection surface while a part of the light reflected and diffused by the diffusion-reflection surface is incident on a surface of the object.
摘要翻译：照明具有三维形状的物体的表面的照明装置包括光源，被配置为将来自光源的光引导到物体的表面的引导件和扩散器，漫射器具有面向通过所述物体的所述引导件的光出射表面，其中所述扩散器被布置在使得从所述引导件发射并且不直接入射到所述物体上的光入射到所述扩散反射表面上的同时，被扩散反射表面反射和扩散的光入射到物体的表面上。

5. 发明授权

US07901098B2 Illuminating apparatus and image sensing system including illuminating apparatus 有权
标题翻译：照明装置和摄像系统，包括照明装置
公开(公告)号：US07901098B2
公开(公告)日：2011-03-08
申请号：US11761967
申请日：2007-06-12
申请人： Kenji Saitoh , Yoshiharu Tenmyo
发明人： Kenji Saitoh , Yoshiharu Tenmyo
IPC分类号： G03B15/02
CPC分类号： G03B15/05 , G02B19/0028 , G02B19/0047 , G03B2215/0528 , G03B2215/0532
摘要： An illuminating apparatus includes a light source including a cylindrical light-emitting tube, a first optical system, a second optical system, and a third optical system. The first optical system has an incident surface on which light emitted from the light source to the object side are incident and an emergent surface from which the light passing through the incident surface are emitted. The second optical system has a reflecting surface from which light emitted from the light source to a first side are reflected. The third optical system has a reflecting surface from which light emitted from the light source to a second side opposite to the first side are reflected. The first to third optical systems each illuminate the entire illumination area of the object with light emitted from the light source and incident on the optical systems.
摘要翻译：照明装置包括：光源，包括圆柱形发光管，第一光学系统，第二光学系统和第三光学系统。第一光学系统具有从光源发射到物体侧的光入射的入射表面，并且发射穿过入射表面的光的出射表面。第二光学系统具有从光源发射到第一侧的光被反射的反射面。第三光学系统具有从光源发射到与第一侧相对的第二侧的光的反射表面。第一至第三光学系统各自使用从光源发射并入射到光学系统上的光来照亮物体的整个照明区域。

6. 发明申请

US20110037984A1 INFORMATION PROCESSING APPARATUS AND METHOD 有权
标题翻译：信息处理装置和方法
公开(公告)号：US20110037984A1
公开(公告)日：2011-02-17
申请号：US12812008
申请日：2009-01-28
申请人： Hiroshi Yoshikawa , Yusuke Mitarai , Masafumi Takimoto , Kazuyuki Ota , Kenji Saitoh , Masakazu Matsugu
发明人： Hiroshi Yoshikawa , Yusuke Mitarai , Masafumi Takimoto , Kazuyuki Ota , Kenji Saitoh , Masakazu Matsugu
IPC分类号： G01N21/55
CPC分类号： G01N21/57 , G01N21/4738 , G01N2021/4735
摘要： An information processing apparatus includes an obtaining unit configured to obtain first information regarding a distribution of reflected light from a target to be measured and second information regarding geometrical-optics components of the reflected light, a calculating unit configured to calculate third information on the basis of the first information and the second information, the third information indicating an approximation of the distribution of reflected light, and an output unit configured to output information regarding wave-optics components of the reflected light on the basis of the third information.
摘要翻译：一种信息处理设备，包括：获取单元，被配置为获得关于来自待测目标的反射光的分布的第一信息和关于反射光的几何光学分量的第二信息;计算单元，被配置为基于所述第一信息和所述第二信息，所述第三信息指示反射光的分布的近似值;以及输出单元，被配置为基于所述第三信息输出关于所述反射光的波长成分的信息。

7. 发明申请

US20100111515A1 ILLUMINATION APPARATUS AND APPEARANCE INSPECTION APPARATUS INCLUDING THE SAME 有权
标题翻译：照明装置和外观检查装置，包括它们
公开(公告)号：US20100111515A1
公开(公告)日：2010-05-06
申请号：US12612601
申请日：2009-11-04
申请人： Kenji Saitoh , Hiroshi Yoshikawa
发明人： Kenji Saitoh , Hiroshi Yoshikawa
IPC分类号： G03B15/03 , F21V11/00
CPC分类号： G01N21/8806 , G01N2021/8812 , G01N2021/8819 , G01N2021/8848 , G02B6/0018 , G02B6/002 , G02B6/0046 , G03B15/03
摘要： An illumination apparatus which illuminates a surface of an object having a three-dimensional shape includes a light source, a guide configured to guide light from the light source to a surface of the object, and a diffuser which has a diffusion-reflection surface that faces a light exit surface of the guide via the object, wherein the diffuser is arranged at such a position that the light which is emitted from the guide and is not directly incident on the object is incident on the diffusion-reflection surface while a part of the light reflected and diffused by the diffusion-reflection surface is incident on a surface of the object.
摘要翻译：照明具有三维形状的物体的表面的照明装置包括光源，被配置为将来自光源的光引导到物体的表面的引导件和扩散器，漫射器具有面向通过所述物体的所述引导件的光出射表面，其中所述扩散器被布置在使得从所述引导件发射并且不直接入射到所述物体上的光入射到所述扩散反射表面上的同时，被扩散反射表面反射和扩散的光入射到物体的表面上。

8. 发明授权

US07402378B2 Exposure method and apparatus 失效
标题翻译：曝光方法和装置
公开(公告)号：US07402378B2
公开(公告)日：2008-07-22
申请号：US11255559
申请日：2005-10-21
申请人： Kenji Saitoh , Miyoko Kawashima
发明人： Kenji Saitoh , Miyoko Kawashima
IPC分类号： G03C5/00
CPC分类号： G03F1/30 , G03F7/70091 , G03F7/701 , G03F7/70283 , G03F7/70433
摘要： There is provided an exposure method that includes the steps of forming a phase shift mask having a desired pattern and a cyclic dummy pattern overlaid onto the desired pattern, a part of the desired pattern to be resolved by effects of the dummy pattern being thicker than the dummy pattern's line width, illuminating the phase shift mask by using illumination light having a peak near or on an optical axis in an intensity distribution to transfer the desired pattern onto the exposure plane by projecting light having passed through the phase shift mask onto the exposure plane.
摘要翻译：提供了一种曝光方法，其包括以下步骤：形成具有期望图案的相移掩模和覆盖在期望图案上的循环虚拟图案，通过虚拟图案的效果而被分解的期望图案的一部分比通过在强度分布中使用具有在光轴附近或在光轴上的峰值的照明光来照射相移掩模，以通过将穿过相移掩模的光投射到曝光平面上将期望的图案转印到曝光平面上。

9. 发明授权

US07075455B2 Wireless communication apparatus and method 有权
标题翻译：无线通信装置及方法
公开(公告)号：US07075455B2
公开(公告)日：2006-07-11
申请号：US10601748
申请日：2003-06-23
申请人： Naoki Nishimura , Kenji Saitoh , Masaaki Imaizumi , Masaaki Shibata
发明人： Naoki Nishimura , Kenji Saitoh , Masaaki Imaizumi , Masaaki Shibata
IPC分类号： G08C17/00 , G08C19/12 , G08B21/00 , H04B5/00 , H04Q7/20
CPC分类号： H04W88/02 , H04W84/18
摘要： A wireless communication apparatus and method is provided which makes discrete functional elements perform a cooperative work without various limitations caused by a wired configuration. The wireless communication apparatus has a plurality of fine functional elements 3 each having a communication unit for data transmission and reception by using radio waves or light and one or more unit other than the communication unit, and a base station 4 for controlling and collectively managing the fine functional elements through communications with the fine functional elements, wherein one or more units other than the communication unit are activated through communications of one of the fine functional elements 3 received control information from the base station 4 with another of the fine functional elements 3 via the communication units, to thereby make the discrete functional elements 3 perform a cooperative work.
摘要翻译：提供了一种无线通信装置和方法，其使离散功能元件执行协作工作而没有由有线配置引起的各种限制。无线通信装置具有多个精细功能元件3，每个精细功能元件3具有用于通过使用无线电波或光的数据发送和接收的通信单元以及除通信单元之外的一个或多个单元，以及基站4，用于控制和集中管理通过与精细功能元件的通信，通过与精细功能元件的通信来实现精细的功能元件，其中除了通信单元之外的一个或多个单元通过来自基站4的接收的控制信息与另一个精细功能元件3的精细功能元件3之一的通信通过通信单元，从而使离散功能元件3进行协作工作。

10. 发明授权

US06842255B2 Interferometer and interferance measurement method 失效
标题翻译：干涉仪和干涉测量方法
公开(公告)号：US06842255B2
公开(公告)日：2005-01-11
申请号：US10116924
申请日：2002-04-05
申请人： Yumiko Ohsaki , Akiyoshi Suzuki , Kenji Saitoh
发明人： Yumiko Ohsaki , Akiyoshi Suzuki , Kenji Saitoh
IPC分类号： G01B11/24 , G01B9/02
CPC分类号： G01B11/2441 , G01B9/02039
摘要： There is provided an interferometer for measuring a surface shape of an optical element using interference, including a reference wave-front deformation system for deforming a wave front of reference light.
摘要翻译：提供了一种用于使用干涉测量光学元件的表面形状的干涉仪，包括用于使参考光的波前变形的参考波前变形系统。

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