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    • 1. 发明授权
    • Assist device
    • 辅助装置
    • US08585775B2
    • 2013-11-19
    • US12068451
    • 2008-02-06
    • Takashi HirotaMayumi YamaguchiKonami Izumi
    • Takashi HirotaMayumi YamaguchiKonami Izumi
    • A61F2/72A61F2/54
    • A61F2/68A61F2/54A61F2/72A61F2002/704A61F2002/705A61F2002/707A61F2002/7625A61F2002/7635A61F2002/764A61F2002/7665A61F2002/768B25J13/02H01L27/1214H01L27/1255H01L27/1266H01L27/13
    • The present invention provides a higher-performance assist device which is safer by using a wireless charging technique. The assist device includes a detecting portion and an assist device driving portion. The detecting portion includes a sensor, a first transmitting/receiving circuit, a first data processing circuit, a first charging circuit, and a first battery. The assist device driving portion includes a driving portion, a second data processing circuit, a second transmitting/receiving circuit, a second charging circuit, and a second battery. Electromagnetic waves are transmitted from the second transmitting/receiving circuit provided in the assist device driving portion, and the first transmitting/receiving circuit provided in the detecting portion receives the electromagnetic waves. Induced electromotive force generated at this time is input to the first charging circuit through the first data processing circuit provided in the detecting portion, and the first battery provided in the detecting portion is charged.
    • 本发明提供一种通过使用无线充电技术更安全的更高性能的辅助装置。 辅助装置包括检测部和辅助装置驱动部。 检测部分包括传感器,第一发送/接收电路,第一数据处理电路,第一充电电路和第一电池。 辅助装置驱动部分包括驱动部分,第二数据处理电路,第二发送/接收电路,第二充电电路和第二电池。 电磁波从设置在辅助装置驱动部的第二发送/接收电路发送,并且设置在检测部分中的第一发送/接收电路接收电磁波。 此时产生的感应电动势通过设置在检测部分中的第一数据处理电路输入到第一充电电路,并且设置在检测部分中的第一电池被充电。
    • 2. 发明申请
    • Assist device
    • 辅助装置
    • US20080211302A1
    • 2008-09-04
    • US12068451
    • 2008-02-06
    • Takashi HirotaMayumi YamaguchiKonami Izumi
    • Takashi HirotaMayumi YamaguchiKonami Izumi
    • H02J17/00G06F15/00H02J4/00H02J7/00
    • A61F2/68A61F2/54A61F2/72A61F2002/704A61F2002/705A61F2002/707A61F2002/7625A61F2002/7635A61F2002/764A61F2002/7665A61F2002/768B25J13/02H01L27/1214H01L27/1255H01L27/1266H01L27/13
    • The present invention provides a higher-performance assist device which is safer by using a wireless charging technique. The assist device includes a detecting portion and an assist device driving portion. The detecting portion includes a sensor, a first transmitting/receiving circuit, a first data processing circuit, a first charging circuit, and a first battery. The assist device driving portion includes a driving portion, a second data processing circuit, a second transmitting/receiving circuit, a second charging circuit, and a second battery. Electromagnetic waves are transmitted from the second transmitting/receiving circuit provided in the assist device driving portion, and the first transmitting/receiving circuit provided in the detecting portion receives the electromagnetic waves. Induced electromotive force generated at this time is input to the first charging circuit through the first data processing circuit provided in the detecting portion, and the first battery provided in the detecting portion is charged.
    • 本发明提供一种通过使用无线充电技术更安全的更高性能的辅助装置。 辅助装置包括检测部和辅助装置驱动部。 检测部分包括传感器,第一发送/接收电路,第一数据处理电路,第一充电电路和第一电池。 辅助装置驱动部分包括驱动部分,第二数据处理电路,第二发送/接收电路,第二充电电路和第二电池。 电磁波从设置在辅助装置驱动部的第二发送/接收电路发送,并且设置在检测部分中的第一发送/接收电路接收电磁波。 此时产生的感应电动势通过设置在检测部分中的第一数据处理电路输入到第一充电电路,并且设置在检测部分中的第一电池被充电。
    • 6. 发明授权
    • Semiconductor device
    • 半导体器件
    • US07560789B2
    • 2009-07-14
    • US11420150
    • 2006-05-24
    • Konami IzumiMayumi Yamaguchi
    • Konami IzumiMayumi Yamaguchi
    • H01L29/82
    • B81C1/00246B81C2203/0735H01L21/0237H01L21/02532H01L21/02672H01L21/02675H01L21/02691H01L27/1266H01L27/1277
    • A microstructure and a semiconductor element which are included in a micromachine have been generally formed in different steps. It is an object to provide a method for manufacturing a micromachine in which a microstructure and a semiconductor element are formed over one insulating substrate. A feature of the invention is a micromachine including a movable layer containing polycrystalline silicon which is thermally crystallized or crystallized by a laser using metal and a space below or above the layer. Such polycrystalline silicon has high strength and is formed on an insulating surface, so that it is used as a microstructure and used for forming a semiconductor element. Accordingly, a semiconductor device in which a microstructure and a semiconductor element are formed over one insulating substrate can be formed.
    • 包括在微加工机中的微结构和半导体元件通常以不同的步骤形成。 本发明的目的是提供一种在一个绝缘基板上形成微结构和半导体元件的微机械的制造方法。 本发明的特征是包括含有多晶硅的可移动层的微机械,其通过使用金属的激光和层的下方或上方的空间热结晶或结晶。 这种多晶硅具有高强度并形成在绝缘表面上,因此用作微结构并用于形成半导体元件。 因此,可以形成其中在一个绝缘基板上形成微结构和半导体元件的半导体器件。
    • 7. 发明授权
    • Manufacturing method of microstructure and microelectromechanical system
    • 微结构和微机电系统的制造方法
    • US07537953B2
    • 2009-05-26
    • US11557353
    • 2006-11-07
    • Fuminori TateishiKonami IzumiMayumi Yamaguchi
    • Fuminori TateishiKonami IzumiMayumi Yamaguchi
    • G01R31/26
    • B81C1/00476
    • To reduce the number of photomasks which are used to form sacrificial layers for producing spaces of a microstructure, thereby reducing the manufacturing cost. Sacrificial layers are formed by using resist masks which are patterned with the same photomask. Specifically, after forming a first sacrificial layer by etching using a resist mask, a second sacrificial layer is formed by etching using a resist mask which is pattered with same photomask as the resist mask of the first sacrificial layer. By deforming one of the resist masks before etching its corresponding sacrificial layer, for example by increasing or reducing the external dimension of the resist mask, sacrificial layers having different sizes from each other can be formed.
    • 为了减少用于形成用于形成微结构的空间的牺牲层的光掩模的数量,从而降低制造成本。 牺牲层通过使用用相同光掩模图案化的抗蚀剂掩模形成。 具体而言,在使用抗蚀剂掩模蚀刻形成第一牺牲层之后,通过使用与第一牺牲层的抗蚀剂掩模相同的光掩模图案化的抗蚀剂掩模进行蚀刻来形成第二牺牲层。 在蚀刻其相应的牺牲层之前,通过使抗蚀剂掩模之一变形,例如通过增加或减小抗蚀剂掩模的外部尺寸,可以形成具有彼此不同尺寸的牺牲层。
    • 10. 发明申请
    • SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
    • 半导体器件及其制造方法
    • US20120032304A1
    • 2012-02-09
    • US13275383
    • 2011-10-18
    • Mayumi YamaguchiKonami Izumi
    • Mayumi YamaguchiKonami Izumi
    • H01L29/93
    • H01L27/1203B81C1/00547B81C2201/0135H01L21/84H01L27/016H01L27/12H01L27/13
    • It is an object of the present invention to manufacture a micromachine having a plurality of structural bodies with different functions and to shorten the time required for sacrifice layer etching in a process of manufacturing the micromachine. Another object of the present invention is to prevent a structural layer from being attached to a substrate after the sacrifice layer etching. In other words, an object of the present invention is to provide an inexpensive and high-value-added micromachine by improving throughput and yield. The sacrifice layer etching is conducted in multiple steps. In the multiple steps of the sacrifice layer etching, a part of the sacrifice layer that does not overlap with the structural layer is removed by the earlier sacrifice layer etching and a part of the sacrifice layer that is under the structural layer is removed by the later sacrifice layer etching.
    • 本发明的目的是制造具有多个具有不同功能的结构体的微型机械,并且缩短在制造微机械过程中牺牲层蚀刻所需的时间。 本发明的另一个目的是在牺牲层蚀刻之后防止结构层附着到基底上。 换句话说,本发明的目的是通过提高生产量和产量来提供廉价和高附加值的微机械。 牺牲层蚀刻以多个步骤进行。 在牺牲层蚀刻的多个步骤中,通过较早的牺牲层蚀刻去除与结构层不重叠的牺牲层的一部分,并且在结构层之下的部分牺牲层被后面的部分去除 牺牲层蚀刻。