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    • 4. 发明授权
    • Charged particle beam device
    • 带电粒子束装置
    • US08933422B2
    • 2015-01-13
    • US13812842
    • 2011-06-08
    • Ryoichi IshiiTakashi DoiOsamu SatoYasushi Ebizuka
    • Ryoichi IshiiTakashi DoiOsamu SatoYasushi Ebizuka
    • H01J37/18H01J37/16
    • H01J37/18H01J37/16H01J37/185H01J2237/2001H01J2237/2802
    • The objective of the present invention is to provide a charged particle beam device such that a tip part can be effectually maintained in a clean state, while the frequency of valve body replacements is also reduced. To achieve the objective, a charged particle beam device is offered, comprising: a partition that is positioned between a charged particle source-side vacuum space and a specimen stage-side vacuum space, said partition further comprising an opening for a charged particle beam to pass through; a driver mechanism that moves a shutter member between a first location within the optical axis of the charged particle beam and a second location outside the optical axis of the charged particle beam; and a control device that controls the driver mechanism. The first location is a location wherein the shutter member is distanced from the partition, and the control device carries out a control that opens a valve between the specimen chamber and the exchange chamber when the shutter member is in a state of being located in the first location.
    • 本发明的目的是提供一种带电粒子束装置,使得尖端部分可以有效地保持在清洁状态,同时阀体更换的频率也降低。 为了实现该目的,提供一种带电粒子束装置,包括:分隔件,位于带电粒子源侧真空空间和样品台侧真空空间之间,所述隔板还包括用于带电粒子束的开口 通过; 驱动器机构,其将快门部件移动到带电粒子束的光轴内的第一位置与带电粒子束的光轴外的第二位置; 以及控制驱动器机构的控制装置。 第一位置是其中挡板构件与分隔件隔开的位置,并且当挡板构件处于位于第一位置的状态时,控制装置执行在样本室和更换室之间打开阀的控制 位置。
    • 10. 发明申请
    • STEERING CONTROL DEVICE
    • 转向控制装置
    • US20100108432A1
    • 2010-05-06
    • US12532417
    • 2008-12-10
    • Chikara OkazakiTakashi Doi
    • Chikara OkazakiTakashi Doi
    • B62D5/04
    • B62D5/0463B62D6/001
    • The steering control device performs a control of applying an assist torque based on a steering by a driver. Concretely, the steering control device sets a transfer function from an inputted steering angle to a wheel turning angle to a predetermined frequency response. Then, the steering control device determines the assist torque corresponding to a steering amount based on the frequency response, a transfer function of the steering angle in a relational formula between the steering angle, the wheel turning angle and the assist torque, and a transfer function of the assist torque in the relational formula. By executing the steering assist based on the determined assist torque, it becomes possible to control the response of the wheel turning angle to the steering angle with high accuracy.
    • 转向控制装置执行基于驾驶员的转向的辅助转矩的控制。 具体地说,转向控制装置将传递函数从输入的转向角到轮转角度设定为规定的频率响应。 然后,转向控制装置基于频率响应确定与转向量对应的辅助转矩,在转向角,车轮转角与辅助转矩之间的关系式中的转向角的传递函数,以及传递函数 的关系式中的辅助扭矩。 通过基于确定的辅助转矩执行转向辅助,可以高精度地控制车轮转向角对转向角的响应。