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    • 2. 发明授权
    • Thin film magnetic head slider and electrostatic actuator for driving a head element thereof
    • 薄膜磁头滑块和用于驱动其头元件的静电致动器
    • US06181531B2
    • 2001-01-30
    • US09189301
    • 1998-11-10
    • Takao KoshikawaHiroshi MaedaTakahiro Imamura
    • Takao KoshikawaHiroshi MaedaTakahiro Imamura
    • G11B2120
    • G11B5/6005G11B5/488G11B5/54H02N1/008Y10T29/49041Y10T29/49812
    • A thin film magnetic head slider has a media opposing surface which is adapted to be opposed to a recording medium, and includes a sacrificial layer, on a substratum that has a surface for forming the media opposing surface having at least one rail. A tracking mechanism or loading/unloading mechanism can be provided on the slider. An electrostatic actuator suitable for driving such a mechanism includes a stationary section having a plurality of teeth parallel to each other, a movable section having a plurality of teeth parallel to the teeth of the stationary section, a support spring for supporting the movable section so that the movable section can be moved with respect to the stationary section in the tooth width direction. A drive force generator moves the movable section to a position at which an electrostatic attraction force in the tooth width direction generated when a voltage is impresses between the teeth of the stationary section and those of the movable section, is balanced with the elastic force of the head suspension.
    • 薄膜磁头滑块具有适于与记录介质相对的介质相对表面,并且在具有用于形成具有至少一个轨道的介质相对表面的表面的基底上包括牺牲层。 可以在滑块上提供跟踪机构或加载/卸载机构。 适于驱动这种机构的静电致动器包括具有彼此平行的多个齿的固定部分,具有平行于固定部分的齿的多个齿的可动部分,用于支撑可动部分的支撑弹簧,使得 可移动部分能够相对于固定部分在齿宽度方向上移动。 驱动力发生器将可动部移动到在静止部的齿和可动部的齿之间施加电压时产生的齿宽方向的静电引力的位置,与静止部的齿的弹力 头部悬挂。
    • 3. 发明授权
    • Method of making a thin film magnetic slider
    • 制造薄膜磁性滑块的方法
    • US5920978A
    • 1999-07-13
    • US603257
    • 1996-02-20
    • Takao KoshikawaHiroshi MaedaTakahiro Imamura
    • Takao KoshikawaHiroshi MaedaTakahiro Imamura
    • G11B5/48G11B5/54G11B5/60H02N1/00G11B5/42
    • G11B5/6005G11B5/488G11B5/54H02N1/008Y10T29/49041Y10T29/49812
    • A method for manufacturing a thin film magnetic head slider having a media opposing surface which is adapted to be opposed to a recording medium, includes the steps of forming on a sacrificial layer, on a substrate, in such a manner that the sacrificial layer has a surface including steps for forming the media opposing surface having at least one rail, providing a slider material on the surface of the sacrificial layer, and removing the sacrificial layer and the substrate from the slider. A tracking mechanism or loading/unloading mechanism can be provided on the slider. An electrostatic actuator suitable for driving such a mechanism includes a stationary section having a plurality of teeth parallel to each other, a movable section having a plurality of teeth parallel to the teeth of the stationary section, a support spring for supporting the movable section so that the movable section can be moved with respect to the stationary section in the tooth width direction. A drive force generator moves the movable section to a position at which an electrostatic attraction force in the tooth width direction generated when a voltage is impressed between the teeth of the stationary section and those of the movable section, is balanced with the elastic force of the head suspension.
    • 一种用于制造具有适于与记录介质相对的介质相对表面的薄膜磁头滑块的方法,包括以下步骤:在牺牲层上在基板上形成牺牲层,使得牺牲层具有 表面包括用于形成具有至少一个导轨的介质相对表面的步骤,在牺牲层的表面上提供滑块材料,以及从滑块移除牺牲层和基板。 可以在滑块上提供跟踪机构或加载/卸载机构。 适于驱动这种机构的静电致动器包括具有彼此平行的多个齿的固定部分,具有平行于固定部分的齿的多个齿的可动部分,用于支撑可动部分的支撑弹簧,使得 可移动部分能够相对于固定部分在齿宽度方向上移动。 驱动力发生器将可动部移动到在固定部的齿与可动部的齿之间施加电压时产生的齿宽方向的静电吸引力的位置与所述静止部的齿的弹力相平衡的位置 头部悬挂。
    • 4. 发明授权
    • Thin film magnetic head slider and electrostatic actuator for driving a head element thereof
    • 薄膜磁头滑块和用于驱动其头元件的静电致动器
    • US06594119B1
    • 2003-07-15
    • US09670748
    • 2000-09-27
    • Takao KoshikawaHiroshi MaedaTakahiro Imamura
    • Takao KoshikawaHiroshi MaedaTakahiro Imamura
    • G11B2124
    • G11B5/6005G11B5/488G11B5/54H02N1/008Y10T29/49041Y10T29/49812
    • A thin film magnetic head has a media opposing surface which is adapted to be opposed to a recording medium, and includes a sacrificial layer, on a substratum that has a surface for forming the media opposing surface having at least one rail. A tracking mechanism or loading/unloading mechanism can be provided on the slider. An electrostatic actuator suitable for driving such a mechanism includes a stationary section having a plurality of teeth parallel to each other, a movable section having a plurality of teeth parallel to the teeth of the stationary section, a support spring for supporting the movable section so that the movable section can be moved with respect to the stationary section in the tooth width direction. A drive force generator moves the movable section to a position at which an electrostatic attraction force in the tooth width direction generated when a voltage is impresses between the teeth of the stationary section and those of the movable section, is balanced with the elastic force of the head suspension.
    • 薄膜磁头具有适于与记录介质相对的介质相对表面,并且在具有用于形成具有至少一个轨道的介质相对表面的表面的基底上包括牺牲层。 可以在滑块上提供跟踪机构或加载/卸载机构。 适于驱动这种机构的静电致动器包括具有彼此平行的多个齿的固定部分,具有平行于固定部分的齿的多个齿的可动部分,用于支撑可动部分的支撑弹簧,使得 可移动部分能够相对于固定部分在齿宽度方向上移动。 驱动力发生器将可动部移动到在静止部的齿和可动部的齿之间施加电压时产生的齿宽方向的静电引力的位置,与静止部的齿的弹力 头部悬挂。
    • 9. 发明授权
    • Method for the production of a magnetic head
    • 制造磁头的方法
    • US06199267B1
    • 2001-03-13
    • US09282543
    • 1999-03-31
    • Takao KoshikawaAtsuhiko Nagai
    • Takao KoshikawaAtsuhiko Nagai
    • G11B5187
    • G11B5/3967G11B5/1871G11B5/3106G11B5/3109G11B5/3116G11B5/3163G11B5/40Y10T29/49041Y10T29/49044Y10T29/49046Y10T29/49048Y10T29/49052
    • A method for the production of a magnetic head, where first a lower magnetic pole is formed on a wafer. Next, a nonmagnetic write gap layer is formed on the lower magnetic pole. A coil is then formed to be sandwiched between nonmagnetic insulating layers on the nonmagnetic write gap layer. Finally, an upper magnetic pole, provided with a pole tip, is formed to contact the write gap layer on the nonmagnetic write gap layer. After formation, a focused ion beam is irradiated in the direction from a thickness of the pole tip to the lateral parts of the pole tip, the nonmagnetic write gap layer lying directly thereunder. The lower magnetic pole thereby trims the lateral parts of the pole tip while consequently decreasing the width of the pole tip. At the same time, depressed parts are formed in the lower magnetic pole in the areas extending outward from directly below the lateral parts of the pole tip. The width of the pole tip is then equalized and a width of the lower magnetic pole is sandwiched by the depressed parts. Lastly, a protective layer is formed, which is made of a nonmagnetic insulating material, fills in the depressed parts, and, at the same time, covers the upper magnetic pole and the lower magnetic pole.
    • 一种用于制造磁头的方法,其中首先在晶片上形成下磁极。 接下来,在下磁极上形成非磁性写间隙层。 然后形成线圈以夹在非磁性写间隙层上的非磁性绝缘层之间。 最后,设置有极尖的上磁极与非磁性写间隙层上的写间隙层接触。 形成后,在从极尖的厚度到极尖的侧面的方向照射聚焦离子束,非磁性写入间隙层位于其下方。 因此,下磁极修剪极尖的侧部,从而减小极尖的宽度。 同时,在从极尖的侧面的正下方向外延伸的区域中的下磁极中形成凹陷部。 然后使极尖的宽度相等,并且下磁极的宽度被凹陷部分夹持。 最后,形成由非磁性绝缘材料制成的保护层,填充凹陷部分,同时覆盖上磁极和下磁极。