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1. 发明申请

US20120306490A1 MAGNETIC SENSOR AND MANUFACTURING METHOD OF THE SAME 有权
标题翻译：磁传感器及其制造方法
公开(公告)号：US20120306490A1
公开(公告)日：2012-12-06
申请号：US13477208
申请日：2012-05-22
申请人： Takamoto FURUICHI , Hisanori YOKURA , Toshifumi YANO
发明人： Takamoto FURUICHI , Hisanori YOKURA , Toshifumi YANO
IPC分类号： G01R33/09 , H01F7/06
CPC分类号： G01R33/093 , G01R33/098 , H01L27/22 , H01L43/08 , H01L43/12 , Y10T29/4902
摘要： A manufacturing method of a magnetic sensor, detecting a physical amount based on a resistance change in each MRE while applying an external magnetic field to MREs, includes: preparing a substrate; forming MREs, including a free magnetic layer having a changeable magnetization direction and a pin magnetic layer having a fixed magnetization direction, above the substrate; forming heaters corresponding to MREs; arranging the substrate in the external magnetic field having a magnetic field direction in a first direction parallel to the substrate; and heating with one portion of the heater portions and magnetizing one portion of the pin magnetic layers in the first direction; and arranging the substrate in another external magnetic field having another magnetic field direction in a second direction different from the first direction; and heating with another portion of the heater portions and magnetizing another portion of the pin magnetic layers in the second direction.
摘要翻译：一种磁传感器的制造方法，其特征在于，在向MRE施加外部磁场的同时，基于每个MRE中的电阻变化来检测物理量，包括：准备基板; 在基板上形成包括具有可变磁化方向的自由磁性层和具有固定的磁化方向的销磁性层的MRE; 形成对应于MRE的加热器; 在与所述基板平行的第一方向上具有磁场方向的外部磁场中配置所述基板; 并加热一部分加热器部分，并在第一方向上磁化一部分销钉磁性层; 以及将所述基板设置在与所述第一方向不同的第二方向上的具有另一磁场方向的另一外部磁场中; 并且与另一部分加热器部分进行加热，并在第二方向上磁化另一部分销钉磁性层。

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