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    • 6. 发明授权
    • Optical waveguide and production method thereof
    • 光波导及其制造方法
    • US07167629B2
    • 2007-01-23
    • US11057496
    • 2005-02-15
    • Kazunori MuneAmane MochizukiYusuke ShimizuNaotaka Kinjou
    • Kazunori MuneAmane MochizukiYusuke ShimizuNaotaka Kinjou
    • G02B6/00G02B6/10B29D11/00
    • G02B1/045G02B1/046
    • An optical waveguide and a production method thereof that can provide increased production efficiency, improved workability, and/or production stability. According to non-limiting example embodiments a photopolymerizable resin composition comprising a fluorene derivative and a photoacid generator is coated over an under clad layer and then is dried, to form a resin layer having substantially no surface tack. The resin layer is exposed to light in the state of being contacted with a photo mask by a contact exposure method and then is developed, to form the resin layer into a pattern. Thereafter, the resin layer is cured to form a core layer and then an over clad layer is formed on the under clad layer in such a manner as to cover the core layer, to thereby produce an optical waveguide.
    • 能够提高生产效率,提高加工性和/或生产稳定性的光波导及其制造方法。 根据非限制性实施例,包含芴衍生物和光致酸发生剂的光聚合树脂组合物涂覆在下包覆层上,然后干燥,以形成基本上没有表面粘性的树脂层。 树脂层通过接触曝光方法与光掩模接触的状态下曝光,然后显影,以将树脂层形成为图案。 此后,树脂层固化形成芯层,然后以覆盖芯层的方式在下包层上形成覆盖层,从而制造光波导。
    • 7. 发明申请
    • Optical waveguide and production method thereof
    • 光波导及其制造方法
    • US20050201714A1
    • 2005-09-15
    • US11057496
    • 2005-02-15
    • Kazunori MuneAmane MochizukiYusuke ShimizuNaotaka Kinjou
    • Kazunori MuneAmane MochizukiYusuke ShimizuNaotaka Kinjou
    • G02B6/12C08G59/24G02B1/04G02B6/13G02B6/00
    • G02B1/045G02B1/046
    • A production method of an optical waveguide that can provide increased production efficiency and can also provide improved workability and production stability and provide an optical waveguide produced by the production method of the optical waveguide. A varnish comprising photopolymerizable resion composition comprising a fluorene derivative and a photoacid generator is coated over an under clad layer 2 and then is dried, to form a resin layer 4 having substantial no surface tack. Sequentially, the resin layer 4 is exposed to light in the state of being contacted with a photo mask 5 by a contact exposure method and then is developed, to form the resin layer 4 into a pattern. Thereafter, the resin layer 4 is cured to form a core layer 3 and then an over clad layer 6 is formed on the under clad layer 2 in such a manner as to cover the core layer 3, to thereby produce an optical waveguide. This method can allow the forming of the resin layer 4 having no surface tack, and as such can allow the use of the contact exposure to expose the resin layer to light. Hence, the number of processes and time-consuming and complicated works involved in the interposition of the spacer can be reduced, thus providing increased production efficiency.
    • 一种光波导的制造方法,其能够提高生产效率,并且还可以提供改进的可加工性和生产稳定性,并提供通过光波导的制造方法制造的光波导。 将包含芴衍生物和光酸产生剂的光聚合性憎水组合物的清漆涂覆在下包覆层2上,然后干燥,形成基本无表面粘性的树脂层4。 接着,通过接触曝光法使树脂层4与光掩模5接触的状态下曝光,然后显影,形成树脂层4。 此后,树脂层4固化形成芯层3,然后以覆盖芯层3的方式在下包覆层2上形成覆盖层6,从而制造光波导。 该方法可以形成没有表面粘性的树脂层4,因此可以允许使用接触曝光使树脂层露出光。 因此,可以减少插入间隔物所涉及的过程数量和耗时和复杂的工作,从而提高生产效率。
    • 8. 发明授权
    • Process for producing optical waveguide
    • 光波导制造工艺
    • US07267931B2
    • 2007-09-11
    • US11194456
    • 2005-08-02
    • Kazunori MuneAmane MochizukiYusuke ShimizuRyuusuke NaitouHideyuki Usui
    • Kazunori MuneAmane MochizukiYusuke ShimizuRyuusuke NaitouHideyuki Usui
    • G02B6/13
    • G02B1/045G02B6/138
    • The present invention provides a process for producing an optical waveguide, comprising the steps of: continuously applying a fluorene derivative layer onto a continuous substrate and curing the layer to thereby form a lower cladding layer; continuously applying a photosensitive fluorene derivative layer onto the lower cladding layer; continuously exposing the applied photosensitive fluorene derivative layer to a light through a photomask having a predetermined pattern; continuously subjecting the exposed photosensitive fluorene derivative layer to post-exposure heating; continuously developing the heated photosensitive fluorene derivative layer to remove the unexposed areas therein, thereby forming into the predetermined pattern; curing the developed photosensitive fluorene derivative layer to thereby form a core layer having the predetermined pattern on the lower cladding layer; and continuously applying a fluorene derivative layer over the lower cladding layer so as to cover the core layer and curing the fluorene derivative layer to thereby form an upper cladding layer.
    • 本发明提供一种光波导的制造方法,包括以下步骤:在连续的基板上连续施加芴衍生物层,使该层固化,形成下包层; 将感光芴衍生物层连续施加到下包层上; 通过具有预定图案的光掩模将所施加的光敏芴衍生物层连续曝光于光; 对暴露的感光芴衍生物层进行后曝光加热; 连续显影加热的感光芴衍生物层以除去其中未曝光的区域,从而形成预定图案; 固化显影的感光芴衍生物层,从而在下包层上形成具有预定图案的芯层; 并且在下包层上连续施加芴衍生物层,以覆盖芯层并固化芴衍生物层从而形成上包层。
    • 10. 发明申请
    • Process for producing optical waveguide
    • 光波导制造工艺
    • US20060029891A1
    • 2006-02-09
    • US11194456
    • 2005-08-02
    • Kazunori MuneAmane MochizukiYusuke ShimizuRyuusuke NaitouHideyuki Usui
    • Kazunori MuneAmane MochizukiYusuke ShimizuRyuusuke NaitouHideyuki Usui
    • G02B6/10G03C1/725G03C1/73
    • G02B1/045G02B6/138
    • The present invention provides a process for producing an optical waveguide, comprising the steps of: continuously applying a fluorene derivative layer onto a continuous substrate and curing the layer to thereby form a lower cladding layer; continuously applying a photosensitive fluorene derivative layer onto the lower cladding layer; continuously exposing the applied photosensitive fluorene derivative layer to a light through a photomask having a predetermined pattern; continuously subjecting the exposed photosensitive fluorene derivative layer to post-exposure heating; continuously developing the heated photosensitive fluorene derivative layer to remove the unexposed areas therein, thereby forming into the predetermined pattern; curing the developed photosensitive fluorene derivative layer to thereby form a core layer having the predetermined pattern on the lower cladding layer; and continuously applying a fluorene derivative layer over the lower cladding layer so as to cover the core layer and curing the fluorene derivative layer to thereby form an upper cladding layer.
    • 本发明提供一种光波导的制造方法,包括以下步骤:在连续的基板上连续施加芴衍生物层,使该层固化,形成下包层; 将感光芴衍生物层连续施加到下包层上; 通过具有预定图案的光掩模将所施加的光敏芴衍生物层连续曝光于光; 对暴露的感光芴衍生物层进行后曝光加热; 连续显影加热的感光芴衍生物层以除去其中未曝光的区域,从而形成预定图案; 固化显影的感光芴衍生物层,从而在下包层上形成具有预定图案的芯层; 并且在下包层上连续施加芴衍生物层,以覆盖芯层并固化芴衍生物层从而形成上包层。