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    • 3. 发明授权
    • Method of producing an oscillator device
    • 振荡器装置的制造方法
    • US07926163B2
    • 2011-04-19
    • US12481472
    • 2009-06-09
    • Takahisa KatoYukio FurukawaTakahiro Akiyama
    • Takahisa KatoYukio FurukawaTakahiro Akiyama
    • H04R31/00
    • G02B26/085B81B3/0067B81B2201/042B81B2203/0181Y10T29/42Y10T29/49005Y10T29/4908Y10T156/1052
    • An oscillator device having an oscillating member, a resilient support and a supporting member is produced. The oscillating member is supported by the resilient support for oscillation about an oscillation axis. The oscillating member is formed with a movable element having protrusions for adjusting its mass, the protrusions extending from the movable element parallel to the oscillation axis and being formed in pairs disposed at positions symmetrical with respect to the oscillation axis. A sectional area of each protrusion along a plane perpendicular to the oscillation axis is constant in the oscillation axis direction. A laser beam is projected to a cutting position of protrusions, so as to partly remove the protrusion. The protrusions are cut based on adjusting the cutting position. The sum of the lengths removed from the protrusions by the cutting becomes equal to a predetermined length to thereby adjust an inertia moment of the oscillating member.
    • 制造具有摆动部件,弹性支撑体和支撑部件的振荡器装置。 振动构件由弹性支撑件支撑以围绕振荡轴线振荡。 振荡部件形成有具有用于调节其质量的突起的可移动元件,突起从可动元件平行于振荡轴线延伸并成对设置在相对于振荡轴对称的位置。 沿着垂直于振动轴的平面的每个突起的截面积在振荡轴方向上是恒定的。 将激光束投影到突起的切割位置,以便部分地移除突起。 基于调整切割位置切割突起。 通过切割从突起去除的长度的总和等于预定长度,从而调节摆动部件的惯性矩。
    • 5. 发明授权
    • Optical deflector and optical instrument using the same
    • 光学偏转器和光学仪器使用相同
    • US07423795B2
    • 2008-09-09
    • US11753062
    • 2007-05-24
    • Takahisa KatoKazutoshi TorashimaYukio FurukawaYasuhiro Shimada
    • Takahisa KatoKazutoshi TorashimaYukio FurukawaYasuhiro Shimada
    • G02B26/08
    • G02B26/105G02B26/085
    • An optical deflector includes an oscillating system and a driving system for driving the oscillating system, the oscillating system including a first oscillator, a first torsion spring, a second oscillator, a second torsion spring and a supporting member, the first oscillator including a first movable element having a light deflecting element configured to deflect light, the second oscillator including a second movable element having a mass adjusting member configured to adjust a mass, wherein the first movable element is resiliently supported by the second movable element through the first torsion spring, for torsional oscillation about an oscillation axis, wherein the second movable element is resiliently supported by the supporting member through the second torsional spring, for torsional oscillation about the oscillation axis, and wherein the oscillating system has at least two natural oscillation modes having different frequencies, about the oscillation axis.
    • 光偏转器包括振荡系统和用于驱动振荡系统的驱动系统,所述振荡系统包括第一振荡器,第一扭转弹簧,第二振荡器,第二扭转弹簧和支撑部件,所述第一振荡器包括第一可动 具有配置成使光偏转的光偏转元件的第二振荡器包括具有构造成调节质量的质量调节构件的第二可移动元件,其中第一可移动元件由第二可移动元件通过第一扭转弹簧弹性地支撑, 围绕振荡轴的扭转振荡,其中第二可移动元件由支撑构件通过第二扭转弹簧弹性地支撑,用于围绕振荡轴线的扭转振荡,并且其中振荡系统具有至少两个具有不同频率的固有振荡模式,约为 振荡轴。
    • 6. 发明申请
    • OPTICAL DEFLECTOR AND OPTICAL INSTRUMENT USING THE SAME
    • 光学偏光仪和使用该光学仪器的光学仪器
    • US20070279720A1
    • 2007-12-06
    • US11753057
    • 2007-05-24
    • Kazutoshi TorashimaTakahisa KatoYukio FurukawaYasuhiro Shimada
    • Kazutoshi TorashimaTakahisa KatoYukio FurukawaYasuhiro Shimada
    • G02B26/08
    • G02B26/105
    • An optical deflector includes a supporting member, a first movable element having a light deflecting element, at least one second movable element, at least one first torsion spring configured to support the first and second movable elements, for torsional oscillation about an oscillation axis, at least one second torsion spring configured to support the second movable element and the supporting member, for torsional oscillation about the oscillation axis, and a driving system configured to apply a driving force to at least one of the first and second movable elements, wherein a moment of inertia of the second movable element with respect to the oscillation axis is larger than a moment of inertia of the first movable element with respect to the oscillation axis, and wherein a length of the second movable element in a direction perpendicular to the oscillation axis is equal to or less than a length of the first movable element in a direction perpendicular to the oscillation axis.
    • 光学偏转器包括支撑件,具有光偏转元件的第一可移动元件,至少一个第二可移动元件,至少一个构造成支撑第一和第二可移动元件的第一扭转弹簧,用于围绕振荡轴线的扭转振动, 至少一个第二扭转弹簧,其构造成支撑所述第二可移动元件和所述支撑构件,以围绕所述振荡轴线进行扭转振动;以及驱动系统,构造成将驱动力施加到所述第一和第二可移动元件中的至少一个, 所述第二可动元件相对于所述振动轴的惯性大于所述第一可动元件相对于所述振动轴的惯性矩,并且所述第二可动元件在垂直于所述振荡轴的方向上的长度为 等于或小于第一可移动元件在垂直于振荡轴线的方向上的长度。
    • 7. 发明申请
    • Light deflector
    • 导光板
    • US20060198006A1
    • 2006-09-07
    • US11349922
    • 2006-02-09
    • Takahisa KatoYukio Furukawa
    • Takahisa KatoYukio Furukawa
    • G02B26/08
    • G02B26/105G02B26/085G02B26/101
    • A light deflector for scanning with light from a light source comprises a support body, an oscillation system and a drive means for driving the oscillation system. The oscillation system includes a first movable element and a second movable element having a light deflecting body. The first movable element is resiliently supported by the support body by means of a single first torsion spring. The second movable element is resiliently supported by the first movable element by means of a plurality of second torsion springs located vis-à-vis with the second movable element interposed between them.
    • 用于从光源的光扫描的光偏转器包括支撑体,振荡系统和用于驱动振荡系统的驱动装置。 振荡系统包括具有光偏转体的第一可移动元件和第二可移动元件。 第一可移动元件通过单个第一扭转弹簧由支撑体弹性地支撑。 第二可移动元件由第一可移动元件弹性地支撑,该多个第二扭转弹簧相对于位于它们之间的第二可动元件相对设置。
    • 8. 发明授权
    • Optical deflector and optical instrument using the same
    • 光学偏转器和光学仪器使用相同
    • US07518774B2
    • 2009-04-14
    • US12146561
    • 2008-06-26
    • Takahisa KatoKazutoshi TorashimaYukio FurukawaYasuhiro Shimada
    • Takahisa KatoKazutoshi TorashimaYukio FurukawaYasuhiro Shimada
    • G02B26/08
    • G02B26/105G02B26/085
    • An optical deflector includes an oscillating system and a driving system for driving the oscillating system, the oscillating system including a first oscillator, a first torsion spring, a second oscillator, a second torsion spring and a supporting member, the first oscillator including a first movable element having a light deflecting element configured to deflect light, the second oscillator including a second movable element having a mass adjusting member configured to adjust a mass, wherein the first movable element is resiliently supported by the second movable element through the first torsion spring, for torsional oscillation about an oscillation axis, wherein the second movable element is resiliently supported by the supporting member through the second torsional spring, for torsional oscillation about the oscillation axis, and wherein the oscillating system has at least two natural oscillation modes having different frequencies, about the oscillation axis.
    • 光偏转器包括振荡系统和用于驱动振荡系统的驱动系统,所述振荡系统包括第一振荡器,第一扭转弹簧,第二振荡器,第二扭转弹簧和支撑部件,所述第一振荡器包括第一可动 具有配置成使光偏转的光偏转元件的第二振荡器包括具有构造成调节质量的质量调节构件的第二可移动元件,其中第一可移动元件由第二可移动元件通过第一扭转弹簧弹性地支撑, 围绕振荡轴的扭转振荡,其中第二可移动元件由支撑构件通过第二扭转弹簧弹性地支撑,用于围绕振荡轴线的扭转振荡,并且其中振荡系统具有至少两个具有不同频率的固有振荡模式,约为 振荡轴。
    • 9. 发明申请
    • OPTICAL DEFLECTOR AND OPTICAL APPARATUS USING THE SAME
    • 光学偏光器和光学设备使用它
    • US20070273946A1
    • 2007-11-29
    • US11739968
    • 2007-04-25
    • Takahisa KatoYukio FurukawaYasuhiro Shimada
    • Takahisa KatoYukio FurukawaYasuhiro Shimada
    • G02B26/08
    • G02B26/0833
    • An optical deflector comprises a vibration system and a driver. The vibration system includes a first oscillatory moving element having a reflecting surface, a second oscillatory moving element, and a support. The first and second oscillatory moving elements are resiliently supported respectively by first and second torsion springs to be able to torsionally vibrate about an oscillation axis with respect to the second oscillatory moving element and to the support. The vibration system has natural oscillation modes with different frequencies about the oscillation axis. The first and/or second torsion spring has torsion leaf portions torsionally deformed about torsion axes parallel to the oscillation axis. One end of each torsion leaf portion is coupled to an end of another through a connecting portion, and the other end is coupled to one of the first and the second oscillatory moving elements and the support directly or through a connecting portion.
    • 光学偏转器包括振动系统和驱动器。 振动系统包括具有反射表面的第一振荡运动元件,第二振荡运动元件和支撑件。 第一和第二振荡运动元件分别由第一和第二扭转弹簧弹性地支撑,以能够相对于第二振荡运动元件和支撑件围绕振荡轴线扭转振动。 振动系统具有与振荡轴不同频率的自然振荡模式。 第一扭转弹簧和/或第二扭转弹簧具有扭转叶片部分,该扭转叶片部分围绕平行于振动轴线的扭转轴线扭转变形。 每个扭转叶片部分的一端通过连接部分连接到另一端部的另一端,另一端直接或通过连接部分与第一和第二振荡运动元件和支撑件中的一个连接。