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    • 10. 发明授权
    • Semiconductor device and test method thereof
    • 半导体器件及其测试方法
    • US08958258B2
    • 2015-02-17
    • US13182140
    • 2011-07-13
    • Sadayuki Okuma
    • Sadayuki Okuma
    • G11C29/00G11C7/12G11C8/08G11C11/4099G11C8/14G11C11/408G11C29/02G11C29/24G11C29/12
    • G11C11/4099G11C8/14G11C11/4085G11C29/02G11C29/025G11C29/24G11C2029/1202
    • A semiconductor device includes a plurality of memory mats, each of which includes a plurality of word lines, a plurality of bit lines, a plurality of memory cells that are arranged at intersections of the word lines and the bit lines, and a plurality of dummy word lines, each of which is sandwiched between two corresponding ones of the word lines; a main dummy word line to which the dummy word lines included in the memory mats are commonly electrically connected; and a dummy-word-line control circuit that detects an electric potential of the main dummy word line when a test signal is activated, and outputs an error signal when the electric potential exceeds a predetermined threshold value. According to the present invention, because an electric potential of each of the dummy word lines is directly detected, an address of the word line, which has a short circuit with the dummy word line, can be reliably detected in a short time.
    • 半导体器件包括多个存储器衬垫,每个存储器衬垫包括多个字线,多个位线,布置在字线和位线的交点处的多个存储器单元,以及多个虚拟 字线,其中每一行都夹在两条对应的字线之间; 包含在存储器垫中的虚拟字线通常电连接到的主虚拟字线; 以及伪字线控制电路,其在测试信号被激活时检测主虚拟字线的电位,并且当电位超过预定阈值时输出误差信号。 根据本发明,由于直接检测出每个虚拟字线的电位,所以能够在短时间内可靠地检测出与虚拟字线短路的字线的地址。