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    • 6. 发明授权
    • Method and apparatus for further purifying ultrapure water
    • 进一步净化超纯水的方法和装置
    • US09156001B2
    • 2015-10-13
    • US12312138
    • 2007-10-29
    • Hideki KobayashiKunihiro HayakawaMasanobu Osawa
    • Hideki KobayashiKunihiro HayakawaMasanobu Osawa
    • B01D25/00B01D61/16B01D63/14C02F9/00B01D61/02B01D61/14C02F1/00C02F1/32C02F1/42C02F1/44C02F103/04
    • B01D61/16B01D61/025B01D61/027B01D61/145B01D61/147B01D63/14B01D2311/04B01D2311/16C02F1/32C02F1/42C02F1/444C02F9/005C02F2103/04B01D2311/2623
    • Disclosed are a method for further purifying ultrapure water, according to which any impurities in ultrapure water can be stably removed to a high degree within a small space over a prolonged period; and an apparatus therefor. Ultrapure water introduced into an ultrapure-water purifying apparatus 10 passes through an ion exchange resin layer 5 in a lower chamber 1a. During this process, metal ions, for example, in the ultrapure water are removed by the ion exchange resin. The ultrapure water then passes through a perforated plate 4, flows into an upper chamber 1b, and permeates an ion exchange filter 6. During this process, metal ions and other impurities remaining unremoved by the ion exchange resin layer 5 are removed. Specifically, metal ions are removed to a certain extent by the ion exchange resin, so that it is enough for the ion exchange filter provided downstream thereof to remove an extremely small amount of metal ions. Consequently, reaching of the ion exchange filter to breakthrough within a short period can be prevented, thereby attaining further purification of ultrapure water over a prolonged period of time.
    • 公开了一种进一步净化超纯水的方法,根据该方法,超纯水中的任何杂质可以在较短的时间内在高空间内被稳定地去除; 及其装置。 引入超纯水净化装置10的超纯水通过下室1a中的离子交换树脂层5。 在该过程中,例如在超纯水中的金属离子被离子交换树脂除去。 然后,超纯水通过多孔板4,流入上室1b,并且渗透离子交换过滤器6.在此过程中,除去离子交换树脂层5未被除去的金属离子和其它杂质。 具体地说,通过离子交换树脂去除一定程度的金属离子,使得其下游提供的离子交换过滤器足以除去极少量的金属离子。 因此,可以防止在短时间内到达离子交换过滤器以进行穿透,由此可以在更长的时间内进一步纯化超纯水。
    • 7. 发明申请
    • METHOD AND APPARATUS FOR FURTHER PURIFYING ULTRAPURE WATER
    • 进一步净化超声波水的方法和装置
    • US20100044311A1
    • 2010-02-25
    • US12312138
    • 2007-10-29
    • Hideki KobayashiKunihiro HayakawaMasanobu Osawa
    • Hideki KobayashiKunihiro HayakawaMasanobu Osawa
    • C02F1/42C02F103/04
    • B01D61/16B01D61/025B01D61/027B01D61/145B01D61/147B01D63/14B01D2311/04B01D2311/16C02F1/32C02F1/42C02F1/444C02F9/005C02F2103/04B01D2311/2623
    • Disclosed are a method for further purifying ultrapure water, according to which any impurities in ultrapure water can be stably removed to a high degree within a small space over a prolonged period; and an apparatus therefor. Ultrapure water introduced into an ultrapure-water purifying apparatus 10 passes through an ion exchange resin layer 5 in a lower chamber 1a. During this process, metal ions, for example, in the ultrapure water are removed by the ion exchange resin. The ultrapure water then passes through a perforated plate 4, flows into an upper chamber 1b, and permeates an ion exchange filter 6. During this process, metal ions and other impurities remaining unremoved by the ion exchange resin layer 5 are removed. Specifically, metal ions are removed to a certain extent by the ion exchange resin, so that it is enough for the ion exchange filter provided downstream thereof to remove an extremely small amount of metal ions. Consequently, reaching of the ion exchange filter to breakthrough within a short period can be prevented, thereby attaining further purification of ultrapure water over a prolonged period of time.
    • 公开了一种进一步净化超纯水的方法,根据该方法,超纯水中的任何杂质可以在较短的时间内在高空间内被稳定地去除; 及其装置。 引入超纯水净化装置10的超纯水通过下室1a中的离子交换树脂层5。 在该过程中,例如在超纯水中的金属离子被离子交换树脂除去。 然后,超纯水通过多孔板4,流入上室1b,并且渗透离子交换过滤器6.在此过程中,除去离子交换树脂层5未被除去的金属离子和其它杂质。 具体地说,通过离子交换树脂去除一定程度的金属离子,使得其下游设置的离子交换过滤器足以除去极少量的金属离子。 因此,可以防止在短时间内到达离子交换过滤器以进行穿透,由此可以在更长的时间内进一步纯化超纯水。