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    • 2. 发明授权
    • Image sensor with reduced optical path
    • 具有减小光路的图像传感器
    • US09425228B2
    • 2016-08-23
    • US14100598
    • 2013-12-09
    • Taiwan Semiconductor Manufacturing Company Limited
    • Shyh-Fann TingChing-Chun WangWei Chuang WuYu-Jen WangChun-Ming SuJhy-Jyi SzeChen-Jong Wang
    • H01L27/146
    • H01L27/14645H01L27/14621H01L27/14625H01L27/14627H01L27/14629H01L27/1463H01L27/14643H01L27/14685
    • Among other things, one or more image sensors and techniques for forming image sensors are provided. An image sensor comprises a photodiode array configured to detect light. The image sensor comprises an oxide grid comprising a first oxide grid portion and a second oxide grid portion. A metal grid is formed between the first oxide grid portion and the second oxide grid portion. The oxide grid and the metal grid define a filler grid. The filler grid comprises a filler grid portion, such as a color filter, that allows light to propagate through the filler gird portion to an underlying photodiode. The oxide grid and the metal grid confine or channel the light within the filler gird portion. The oxide grid and the metal grid are formed such that the filler grid provides a relatively shorter propagation path for the light, which improves light detection performance of the image sensor.
    • 除此之外,还提供了一种或多种用于形成图像传感器的图像传感器和技术。 图像传感器包括被配置为检测光的光电二极管阵列。 图像传感器包括氧化物栅格,其包括第一氧化物栅格部分和第二氧化物栅格部分。 在第一氧化物栅格部分和第二氧化物栅格部分之间形成金属栅格。 氧化物网格和金属网格定义了填充网格。 填充格栅包括填充栅格部分,例如滤色器,其允许光通过填充物壁部分传播到下面的光电二极管。 氧化物网格和金属栅格限制或引导填料壁部分内的光。 氧化物栅格和金属栅格形成为使得填充栅格为光提供相对较短的传播路径,这改善了图像传感器的光检测性能。
    • 3. 发明申请
    • IMAGE SENSOR WITH REDUCED OPTICAL PATH
    • 具有减少光学路径的图像传感器
    • US20150155322A1
    • 2015-06-04
    • US14100598
    • 2013-12-09
    • Taiwan Semiconductor Manufacturing Company Limited
    • Shyh-Fann TingChing-Chun WangWei Chuang WuYu-Jen WangChun-Ming SuJhy-Jyi SzeChen-Jong Wang
    • H01L27/146
    • H01L27/14645H01L27/14621H01L27/14625H01L27/14627H01L27/14629H01L27/1463H01L27/14643H01L27/14685
    • Among other things, one or more image sensors and techniques for forming image sensors are provided. An image sensor comprises a photodiode array configured to detect light. The image sensor comprises an oxide grid comprising a first oxide grid portion and a second oxide grid portion. A metal grid is formed between the first oxide grid portion and the second oxide grid portion. The oxide grid and the metal grid define a filler grid. The filler grid comprises a filler grid portion, such as a color filter, that allows light to propagate through the filler gird portion to an underlying photodiode. The oxide grid and the metal grid confine or channel the light within the filler gird portion. The oxide grid and the metal grid are formed such that the filler grid provides a relatively shorter propagation path for the light, which improves light detection performance of the image sensor.
    • 除此之外,还提供了一种或多种用于形成图像传感器的图像传感器和技术。 图像传感器包括被配置为检测光的光电二极管阵列。 图像传感器包括氧化物栅格,其包括第一氧化物栅格部分和第二氧化物栅格部分。 在第一氧化物栅格部分和第二氧化物栅格部分之间形成金属栅格。 氧化物网格和金属网格定义了填充网格。 填充格栅包括填充栅格部分,例如滤色器,其允许光通过填充物壁部分传播到下面的光电二极管。 氧化物网格和金属栅格限制或引导填料壁部分内的光。 氧化物栅格和金属栅格形成为使得填充栅格为光提供相对较短的传播路径,这改善了图像传感器的光检测性能。
    • 6. 发明申请
    • IMAGE SENSOR WITH REDUCED OPTICAL PATH
    • 具有减少光学路径的图像传感器
    • US20160358970A1
    • 2016-12-08
    • US15244355
    • 2016-08-23
    • Taiwan Semiconductor Manufacturing Company Limited
    • Shyh-Fann TingChing-Chun WangChen-Jong WangJhy-Jyi SzeChun-Ming SuWei Chuang WuYu-Jen Wang
    • H01L27/146
    • H01L27/14645H01L27/14621H01L27/14625H01L27/14627H01L27/14629H01L27/1463H01L27/14643H01L27/14685
    • Among other things, one or more image sensors and techniques for forming image sensors are provided. An image sensor comprises a photodiode array configured to detect light. The image sensor comprises an oxide grid comprising a first oxide grid portion and a second oxide grid portion. A metal grid is formed between the first oxide grid portion and the second oxide grid portion. The oxide grid and the metal grid define a filler grid. The filler grid comprises a filler grid portion, such as a color filter, that allows light to propagate through the filler grid portion to an underlying photodiode. The oxide grid and the metal grid confine or channel the light within the filler grid portion. The oxide grid and the metal grid are formed such that the filler grid provides a relatively shorter propagation path for the light, which improves light detection performance of the image sensor.
    • 除此之外,还提供了一种或多种用于形成图像传感器的图像传感器和技术。 图像传感器包括被配置为检测光的光电二极管阵列。 图像传感器包括氧化物栅格,其包括第一氧化物栅格部分和第二氧化物栅格部分。 在第一氧化物栅格部分和第二氧化物栅格部分之间形成金属栅格。 氧化物网格和金属网格定义了填充网格。 填充格栅包括填充栅格部分,例如滤色器,其允许光通过填充栅格部分传播到下面的光电二极管。 氧化物栅格和金属栅格限制或引导光在填充栅格部分内。 氧化物栅格和金属栅格形成为使得填充栅格为光提供相对较短的传播路径,这改善了图像传感器的光检测性能。