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    • 3. 发明申请
    • PIEZOELECTRIC ACTUATOR INKJET HEAD AND METHOD OF FORMING THE SAME
    • 压电致动器喷嘴头及其形成方法
    • US20100146756A1
    • 2010-06-17
    • US12712442
    • 2010-02-25
    • Tae-kyung LEEJae-woo ChungKyo-yeol LeeHwa-sun LeeSeung-mo LimJae-chang Lee
    • Tae-kyung LEEJae-woo ChungKyo-yeol LeeHwa-sun LeeSeung-mo LimJae-chang Lee
    • H01L41/22
    • B41J2/14233B41J2002/14491Y10T29/42Y10T29/49002Y10T29/49005Y10T29/4908
    • A piezoelectric actuator of an inkjet head and a method of forming the piezoelectric actuator. The piezoelectric actuator is formed on a vibration plate to provide a driving force to each of a plurality of pressure chambers. The piezoelectric actuator includes a lower electrode formed on the vibration plate, a piezoelectric layer formed on the lower electrode at a position corresponding to each of the pressure chambers, a supporting pad formed on the lower electrode, the supporting pad contacting one end of the piezoelectric layer and extending away from the one end of the piezoelectric layer, and an upper electrode extending from a top surface of the piezoelectric layer to a top surface of the supporting pad. The upper electrode is bonded to a driving circuit above the supporting pad to receive a voltage from the driving circuit. The piezoelectric layer may have substantially the same length as the pressure chamber. The supporting pad may be formed of a photosensitive polymer and may have substantially the same height as the piezoelectric layer. The upper electrode may include a first portion formed on the piezoelectric layer and a second portion formed on the supporting pad, and the second portion may be wider than the first portion.
    • 喷墨头的压电致动器和形成压电致动器的方法。 压电致动器形成在振动板上以向多个压力室中的每一个提供驱动力。 压电致动器包括形成在振动板上的下电极,形成在下电极上的与每个压力室对应的位置处的压电层,形成在下电极上的支撑焊盘,支撑焊盘接触压电体的一端 并且离开压电层的一端延伸,以及从压电层的顶表面延伸到支撑衬垫的顶表面的上电极。 上电极接合到支撑焊盘上方的驱动电路,以接收来自驱动电路的电压。 压电层可以具有与压力室大致相同的长度。 支撑垫可以由光敏聚合物形成,并且可以具有与压电层基本相同的高度。 上部电极可以包括形成在压电层上的第一部分和形成在支撑垫上的第二部分,并且第二部分可以比第一部分更宽。
    • 4. 发明申请
    • METHOD OF POLING PIEZOELECTRIC ACTUATOR
    • 压电致动器的方法
    • US20090015102A1
    • 2009-01-15
    • US11936838
    • 2007-11-08
    • Seung-mo LIMTae-kyung LEEHwa-sun LEE
    • Seung-mo LIMTae-kyung LEEHwa-sun LEE
    • H01L41/09H01L41/22
    • B41J2/161B41J2/1621H01L41/257
    • A method of poling a piezoelectric actuator, which can improve the uniformity of a plurality of piezoelectric actuators. In the method, a plurality of piezoelectric actuators are prepared for poling. Then, at least two preliminary poling processes are performed on the prepared piezoelectric actuators under different preliminary voltages and displacements of the piezoelectric actuators subjected to each of the at least two poling processes are measured. A relationship between a voltage and a displacement for each of the piezoelectric actuators is established. Poling voltages are calculated so that the piezoelectric actuators can have the same target displacement. Formal poling is performed on the piezoelectric actuators under the calculated poling voltages. The displacements of the piezoelectric actuators, which have completed the formal poling, are measured.
    • 一种极化压电致动器的方法,其可以改善多个压电致动器的均匀性。 在该方法中,准备多个压电致动器用于极化。 然后,在不同的初始电压下对制备好的压电致动器进行至少两个初步极化处理,并且测量经受至少两个极化过程中的每一个的压电致动器的位移。 建立了每个压电致动器的电压和位移之间的关系。 计算极化电压,使得压电致动器可以具有相同的目标位移。 在计算出的极化电压下,对压电致动器进行正电极化。 测量完成正式极化的压电致动器的位移。