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    • 5. 发明申请
    • IMMERSION PLATING TREATMENT FOR METAL-METAL INTERCONNECTS
    • 金属互连的浸渍处理
    • US20070218672A1
    • 2007-09-20
    • US11613482
    • 2006-12-20
    • Simon J. Jacobs
    • Simon J. Jacobs
    • H01L21/44
    • H01L21/7685G02B26/0833H01L21/7682
    • The present disclosure provides a method for manufacturing an interconnect in a semiconductor device, a method for manufacturing a digital micromirror device, a digital micromirror device and a method for manufacturing a projection display system. The method for manufacturing the digital micromirror device, without limitation, may include forming a first metal layer over a substrate and subjecting the first metal layer to an immersion deposition process, the immersion deposition process forming a passivating layer over the first metal layer. This method may also include forming a spacer layer over the first metal layer, the spacer layer having one or more openings therein, and forming a second metal layer over the spacer layer and in the one or more openings, the second metal layer contacting the passivating layer.
    • 本公开提供了一种用于制造半导体器件中的互连的方法,数字微镜器件的制造方法,数字微镜器件以及投影显示系统的制造方法。 数字微镜器件的制造方法,但不限于,可以包括在衬底上形成第一金属层,并对第一金属层进行浸没沉积工艺,浸渍沉积工艺在第一金属层上形成钝化层。 该方法还可以包括在第一金属层上形成间隔层,间隔层在其中具有一个或多个开口,并且在间隔层上形成第二金属层,并且在一个或多个开口中,第二金属层接触钝化 层。
    • 7. 发明授权
    • Drying getters
    • 干燥吸气剂
    • US07090787B2
    • 2006-08-15
    • US10651465
    • 2003-08-30
    • Joshua J. MaloneSimon J. Jacobs
    • Joshua J. MaloneSimon J. Jacobs
    • C08K3/00
    • C08K3/34
    • A zeolite and an organic binder are mixed with a solvent to form a paste (302). The paste is then cast or molded (304) into the desired shape. A portion of the solvent is allowed to evaporate from the paste, hardening the getter (306). Getters are often formed in sheets and cut (308) into individual pieces, called dibs, after the sheets have hardened. Even after the getter is hardened, significant amounts of solvent are retained by the getter. The getter is exposed to water vapor which displaces (310) the solvent from the getter. After the solvent is removed, the getter is dried (312) to remove additional water vapor. Because the water vapor does not bind as tightly to the zeolite getter, the water vapor is removed much easier than the solvent. The water may be removed by allowing the getter to dry naturally, or by a vacuum bake process.
    • 将沸石和有机粘合剂与溶剂混合以形成糊状物(302)。 然后将糊浇铸或模制(304)成所需的形状。 允许一部分溶剂从糊中蒸发,使吸气剂硬化(306)。 通常在片材硬化之后,将片材形成为片状并将其切割(308)成为单独的片段,称为二重体。 即使在吸气剂硬化之后,吸气剂也保留了大量的溶剂。 吸气剂暴露于水蒸气,从吸气剂中取代(310)溶剂。 除去溶剂后,将吸气剂干燥(312)以除去额外的水蒸汽。 由于水蒸气不能与沸石吸气剂紧密结合,因此去除水蒸汽比溶剂容易得多。 可以通过使吸气剂自然干燥或通过真空烘烤过程来除去水分。