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1. 发明授权

US08383194B2 Film forming apparatus, film forming system, film forming method, and method of manufacturing electronic device or organic electroluminescence element 有权
标题翻译：成膜装置，成膜系统，成膜方法以及电子器件或有机电致发光元件的制造方法
公开(公告)号：US08383194B2
公开(公告)日：2013-02-26
申请号：US11991475
申请日：2006-09-05
申请人： Tadahiro Ohmi , Takaaki Matsuoka , Shozo Nakayama , Hironori Ito
发明人： Tadahiro Ohmi , Takaaki Matsuoka , Shozo Nakayama , Hironori Ito
IPC分类号： B05D5/06 , B05C9/06
CPC分类号： H01L51/001 , C23C14/12 , C23C14/243 , C23C14/568 , H01L51/56
摘要： To provide a film forming apparatus capable of using an expensive organic EL raw material without waste and uniformly forming an organic EL film over a long period of time and a jig therefor.A plurality of ejection vessels are provided for a single raw material container section. A switcher is provided for carrying out switching from a piping system, which evaporates an organic EL raw material in the raw material container section and supplies it along with a carrier gas to one of the ejection vessels, to a piping system for another ejection vessel. In this manner, by supplying the organic EL raw material from the single raw material container section to the plurality of ejection vessels by switching, the use efficiency of the organic EL raw material can be improved.
摘要翻译：本发明提供能够在不浪费的情况下使用昂贵的有机EL原料并且能够长时间均匀地形成有机EL膜的成膜装置及其夹具。为单个原料容器部提供多个喷射容器。提供了一种用于从管道系统进行切换的切换器，其蒸发原料容器部分中的有机EL原料并将其与载气一起供应到其中一个排出容器，用于另一喷射容器的管道系统。以这种方式，通过将单一原料容器部分的有机EL原料通过切换提供给多个喷射容器，可以提高有机EL原料的使用效率。

2. 发明申请

US20090041929A1 Film Forming Apparatus and Film Forming Method 审中-公开
标题翻译：成膜装置及成膜方法
公开(公告)号：US20090041929A1
公开(公告)日：2009-02-12
申请号：US11918006
申请日：2006-03-28
申请人： Tadahiro Ohmi , Takaaki Matsuoka , Shozo Nakayama , Hironori Ito
发明人： Tadahiro Ohmi , Takaaki Matsuoka , Shozo Nakayama , Hironori Ito
IPC分类号： B05D5/06 , C23C16/455
CPC分类号： C23C14/564 , C23C14/12 , C23C14/228 , C23C14/24 , H01L51/0008 , H01L51/0081 , H01L51/56
摘要： In an apparatus for film formation, constituted so that an organic EL molecular gas is ejected into an ejection vessel, a plurality of organic EL material vessels are provided together with a piping system for connecting the plurality of organic EL material vessels to the ejection vessel. The plurality of organic EL material vessels are selectively put into a supply state of organic EL molecules. The piping system is constructed so that the carrier gas is fed into each organic EL material vessel in such a manner that the pressure during film formation and the pressure during non-film formation are equal to each other. During non-film formation, the carrier gas is allowed to flow from one of the organic EL material vessels to other material vessel.
摘要翻译：在用于成膜的装置中，有机EL分子气体被喷射到喷射容器中，多个有机EL材料容器与用于将多个有机EL材料容器连接到喷射容器的管道系统一起提供。多个有机EL材料容器选择性地进入有机EL分子的供给状态。管道系统被构造成使得载气以这样的方式被供给到每个有机EL材料容器中，使得成膜期间的压力和非成膜期间的压力彼此相等。在非成膜期间，允许载气从有机EL材料容器之一流动到其他材料容器。

3. 发明申请

US20110268870A1 FILM FORMING APPARATUS AND FILM FORMING METHOD 审中-公开
标题翻译：薄膜成型装置和薄膜成型方法
公开(公告)号：US20110268870A1
公开(公告)日：2011-11-03
申请号：US13101792
申请日：2011-05-05
申请人： Tadahiro OHMI , Takaaki Matsuoka , Shozo Nakayama , Hironori Ito
发明人： Tadahiro OHMI , Takaaki Matsuoka , Shozo Nakayama , Hironori Ito
IPC分类号： B05D5/12
CPC分类号： C23C14/564 , C23C14/12 , C23C14/228 , C23C14/24 , H01L51/0008 , H01L51/0081 , H01L51/56
摘要： In an apparatus for film formation, constituted so that an organic EL molecular gas is ejected into an ejection vessel, a plurality of organic EL material vessels are provided together with a piping system for connecting the plurality of organic EL material vessels to the ejection vessel. The plurality of organic EL material vessels are selectively put into a supply state of organic EL molecules. The piping system is constructed so that the carrier gas is fed into each organic EL material vessel in such a manner that the pressure during film formation and the pressure during non-film formation are equal to each other. During non-film formation, the carrier gas is allowed to flow from one of the organic EL material vessels to other material vessel.
摘要翻译：在用于成膜的装置中，有机EL分子气体被喷射到喷射容器中，多个有机EL材料容器与用于将多个有机EL材料容器连接到喷射容器的管道系统一起提供。多个有机EL材料容器选择性地进入有机EL分子的供给状态。管道系统被构造成使得载气以这样的方式被供给到每个有机EL材料容器中，使得成膜期间的压力和非成膜期间的压力彼此相等。在非成膜期间，允许载气从有机EL材料容器之一流动到其他材料容器。

4. 发明申请

US20090226604A1 Film Forming Apparatus, Film Forming System, Film Forming Method, and Method of Manufacturing Electronic Device or Organic Electroluminescence Element 有权
标题翻译：成膜装置，成膜系统，成膜方法以及制造电子装置或有机电致发光元件的方法
公开(公告)号：US20090226604A1
公开(公告)日：2009-09-10
申请号：US11991475
申请日：2006-09-05
申请人： Tadahiro Ohmi , Takaaki Matsuoka , Shozo Nakayama , Hironori Ito
发明人： Tadahiro Ohmi , Takaaki Matsuoka , Shozo Nakayama , Hironori Ito
IPC分类号： B05D5/06 , B05C9/06 , B05D1/36
CPC分类号： H01L51/001 , C23C14/12 , C23C14/243 , C23C14/568 , H01L51/56
摘要： To provide a film forming apparatus capable of using an expensive organic EL raw material without waste and uniformly forming an organic EL film over a long period of time and a jig therefor.A plurality of ejection vessels are provided for a single raw material container section. A switcher is provided for carrying out switching from a piping system, which evaporates an organic EL raw material in the raw material container section and supplies it along with a carrier gas to one of the ejection vessels, to a piping system for another ejection vessel. In this manner, by supplying the organic EL raw material from the single raw material container section to the plurality of ejection vessels by switching, the use efficiency of the organic EL raw material can be improved.
摘要翻译：本发明提供能够在不浪费的情况下使用昂贵的有机EL原料并且能够长时间均匀地形成有机EL膜的成膜装置及其夹具。为单个原料容器部提供多个喷射容器。提供了一种用于从管道系统进行切换的切换器，其蒸发原料容器部分中的有机EL原料并将其与载气一起供应到其中一个排出容器，用于另一个喷射容器的管道系统。以这种方式，通过将单一原料容器部分的有机EL原料通过切换提供给多个喷射容器，可以提高有机EL原料的使用效率。

5. 发明申请

US20090087545A1 Film Forming Apparatus, Evaporating Jig, and Measurement Method 审中-公开
标题翻译：成膜装置，蒸发夹具和测量方法
公开(公告)号：US20090087545A1
公开(公告)日：2009-04-02
申请号：US11992229
申请日：2006-09-19
申请人： Tadahiro Ohmi , Takaaki Matsuoka , Shozo Nakayama , Hironori Ito
发明人： Tadahiro Ohmi , Takaaki Matsuoka , Shozo Nakayama , Hironori Ito
IPC分类号： C23C16/00 , B05D5/12 , B05B7/00 , B05B7/16 , G01N33/00 , G06F19/00
CPC分类号： C23C14/12 , C23C14/243 , C23C14/246
摘要： Provided are an evaporating jig by which a thin film, especially an organic EL film, can be uniformly formed over a long time, and a film forming apparatus including the evaporating jig. The evaporating jig is provided with an evaporating pan, having a bottom plane and side planes arranged to stand from the bottom plane, for defining a material containing space opened inside the side planes; and partitioning plates for partitioning the material containing space into a plurality of partial spaces. The partitioning plates are provided with locking pieces having a height which permits the partial spaces to be continuous on a bottom plane side of the evaporating pan.
摘要翻译：提供了一种蒸发夹具，通过该蒸发夹具可以长时间均匀地形成薄膜，特别是有机EL膜，以及包括蒸发夹具的成膜设备。蒸发夹具设置有蒸发盘，其具有布置成从底平面放置的底平面和侧平面，用于限定在侧平面内开口的材料容纳空间; 以及用于将包含空间的材料分隔成多个部分空间的分隔板。分隔板设置有具有允许部分空间在蒸发盘的底平面侧上连续的高度的锁定件。

6. 发明申请

US20130189423A1 Film-forming material and method for predicting film-forming material 失效
标题翻译：成膜材料和预测成膜材料的方法
公开(公告)号：US20130189423A1
公开(公告)日：2013-07-25
申请号：US13556193
申请日：2012-07-23
申请人： Tadahiro OHMI , Shozo Nakayama , Hironori Ito
发明人： Tadahiro OHMI , Shozo Nakayama , Hironori Ito
IPC分类号： C23C16/44
CPC分类号： C23C16/44 , C23C14/12 , C23C14/228 , C23C14/243 , C23C14/56 , C23C14/562 , H01L51/0008 , H01L51/56
摘要： Disclosed is a method for prediction of a film material such as a raw material for organic EL. In the method, a film material having an evaporation rate (V (%)) represented by the formula below can be predicted based on the values of the constant (Ko) and the activation energy (Ea). V=(Ko/P)×e−Ea/kT wherein Ko represents a constant (%·Torr), P represents a pressure (Torr), Ea represents an activation energy (eV), k represents a Boltzmann constant, and T represents an absolute temperature.
摘要翻译：公开了一种用于预测有机EL原料的薄膜材料的方法。在该方法中，可以基于常数（Ko）和活化能（Ea）的值来预测具有由下式表示的蒸发速率（V（％））的膜材料。 V =（Ko / P）×e-Ea / kT其中Ko表示常数（％·Torr），P表示压力（Torr），Ea表示活化能（eV），k表示玻尔兹曼常数，T表示绝对温度。

7. 发明授权

US08679369B2 Film-forming material and method for predicting film-forming material 失效
标题翻译：成膜材料和预测成膜材料的方法
公开(公告)号：US08679369B2
公开(公告)日：2014-03-25
申请号：US13556193
申请日：2012-07-23
申请人： Tadahiro Ohmi , Shozo Nakayama , Hironori Ito
发明人： Tadahiro Ohmi , Shozo Nakayama , Hironori Ito
IPC分类号： H01B1/00
CPC分类号： C23C16/44 , C23C14/12 , C23C14/228 , C23C14/243 , C23C14/56 , C23C14/562 , H01L51/0008 , H01L51/56
摘要： Disclosed is a method for prediction of a film material such as a raw material for organic EL. In the method, a film material having an evaporation rate (V(%)) represented by the formula below can be predicted based on the values of the constant (Ko) and the activation energy (Ea). V=(Ko/P)×e−Ea/kT wherein Ko represents a constant (%·Torr), P represents a pressure (Torr), Ea represents an activation energy (eV), k represents a Boltzmann constant, and T represents an absolute temperature.
摘要翻译：公开了一种用于预测有机EL原料的薄膜材料的方法。在该方法中，可以基于常数（Ko）和活化能（Ea）的值来预测具有由下式表示的蒸发速率（V（％））的膜材料。 V =（Ko / P）×e-Ea / kT其中Ko表示常数（％·Torr），P表示压力（Torr），Ea表示活化能（eV），k表示玻尔兹曼常数，T表示绝对温度。

8. 发明申请

US20090110823A1 Film-forming material and method for predicting film-forming material 审中-公开
标题翻译：成膜材料和预测成膜材料的方法
公开(公告)号：US20090110823A1
公开(公告)日：2009-04-30
申请号：US11991474
申请日：2006-08-29
申请人： Tadahiro Ohmi , Shozo Nakayama , Hironori Ito
发明人： Tadahiro Ohmi , Shozo Nakayama , Hironori Ito
IPC分类号： C23C16/00 , G01N31/00
CPC分类号： C23C16/44 , C23C14/12 , C23C14/228 , C23C14/243 , C23C14/56 , C23C14/562 , H01L51/0008 , H01L51/56
摘要： Disclosed is a method for prediction of a film material such as a raw material for organic EL. In the method, a film material having an evaporation rate (V(%)) represented by the formula below can be predicted based on the values of the constant (Ko) and the activation energy (Ea). V=(Ko/P)×e−Ea/kT wherein Ko represents a constant (%·Torr), P represents a pressure (Torr), Ea represents an activation energy (eV), k represents a Boltzmann constant, and T represents an absolute temperature.
摘要翻译：公开了一种用于预测有机EL原料的薄膜材料的方法。在该方法中，可以基于常数（Ko）和活化能（Ea）的值来预测具有由下式表示的蒸发速率（V（％））的膜材料。 V =（Ko / P）xe-Ea / kT其中Ko表示常数（％.Torr），P表示压力（Torr），Ea表示活化能（eV），k表示玻尔兹曼常数，T表示绝对温度。

9. 发明申请

US20080213723A1 Medical/dental handpiece 审中-公开
标题翻译：医疗/牙科手机
公开(公告)号：US20080213723A1
公开(公告)日：2008-09-04
申请号：US12069985
申请日：2008-02-14
申请人： Hitoshi Tanaka , Tetsuya Takashi , Shozo Nakayama
发明人： Hitoshi Tanaka , Tetsuya Takashi , Shozo Nakayama
IPC分类号： A61C1/05
CPC分类号： A61C1/185 , A61C1/05
摘要： An inventive medical/dental handpiece is characterized by including: a head part 2 that rotatably holds a rotor 24 for detachably holding a tool 91; and a gripped part 3 that supports, at its front end, the head part 2, and that is gripped by an operator, wherein the gripped part 3 includes a shank portion 31 extending from the head part 2, and a body portion 32 extending from a rear end of the shank portion 31 in the direction of an obtuse angle, wherein the axial flow turbine 5 is contained in the body portion 32, and wherein the handpiece further includes a rotation transmission mechanism for transmitting a rotation of the axial flow turbine 5 to rotate the rotor 24 of the head part 2.
摘要翻译：本发明的医用/牙科手机的特征在于包括：头部2，其可旋转地保持用于可拆卸地保持工具91的转子24; 以及在其前端支撑头部2并由操作者抓握的夹持部3，其中，夹持部3包括从头部2延伸的柄部31和从头部2延伸的主体部32 柄部31的后端沿钝角方向，其中轴流涡轮机5容纳在主体部分32中，并且其中手持件还包括用于传递轴流涡轮机5的旋转的旋转传递机构以旋转头部2的转子24。

10. 发明授权

US07329123B2 Air-driven cutting device for medical treatment 有权
标题翻译：用于医疗的气动切割装置
公开(公告)号：US07329123B2
公开(公告)日：2008-02-12
申请号：US10434909
申请日：2003-05-09
申请人： Noriyuki Tanaka , Shozo Nakayama , Hirofumi Jikuhara , Naruo Wada
发明人： Noriyuki Tanaka , Shozo Nakayama , Hirofumi Jikuhara , Naruo Wada
IPC分类号： A61C1/05
CPC分类号： A61C1/05 , A61C1/057 , F16C33/7823 , F16C41/001 , Y10S415/904
摘要： A dental cutting device has a head portion (10) which accommodates a rotary cylinder (20) for holding a cutting tool (22), and a turbine blade (21) mounted around and secured on the rotary cylinder (20). Air fed from an air-supply port (24) is blown onto the turbine blade to rotate the same, and the air blown onto the turbine blade is exhausted from the exhaust port (25). The head portion has a first chamber (26) which is located at a portion confronting the outer peripheral end portion of the turbine blade and which extends in a direction orthogonal to the central axis of the rotary cylinder, and second chambers (27, 28) which are located adjacent to one or both ends of the turbine blade along the direction of the central axial and which communicate with the first chamber.
摘要翻译：牙科切割装置具有容纳用于保持切割工具（22）的旋转圆筒（20）的头部（10）和安装在旋转圆筒（20）周围并固定在其上的涡轮叶片（21）。从供气口（24）供给的空气被吹送到涡轮叶片上以使其旋转，并且吹送到涡轮叶片上的空气从排气口（25）排出。所述头部具有第一室（26），所述第一室（26）位于与所述涡轮叶片的外周端部相对的部分上，并且在与所述旋转圆筒的中心轴线正交的方向上延伸的第二室，以及第二室（27,28）其沿着中心轴线的方向位于涡轮机叶片的一端或两端附近并且与第一腔室连通。

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