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1. 发明授权

US07553459B2 Apparatus and reactor for generating and feeding high purity moisture 有权
公开(公告)号：US07553459B2
公开(公告)日：2009-06-30
申请号：US11460087
申请日：2006-07-26
申请人： Tadahiro Ohmi , Nobukazu Ikeda , Yukio Minami , Kouji Kawada , Katunori Komehana , Teruo Honiden , Touru Hirai , Akihiro Morimoto , Toshirou Nariai , Keiji Hirao , Masaharu Taguchi , Osamu Nakamura
发明人： Tadahiro Ohmi , Nobukazu Ikeda , Yukio Minami , Kouji Kawada , Katunori Komehana , Teruo Honiden , Touru Hirai , Akihiro Morimoto , Toshirou Nariai , Keiji Hirao , Masaharu Taguchi , Osamu Nakamura
IPC分类号： B01J10/00 , B01J8/00 , C01B5/00
CPC分类号： B01J3/006 , B01J7/00 , B01J12/007 , C01B5/00
摘要： A safe, reduced pressure apparatus for generating water vapor from hydrogen and oxygen and feeding high purity moisture to processes such as semiconductor production. The apparatus eliminates the possibility of the gas igniting by maintaining the internal pressure of the catalytic reactor for generating moisture at a high level while supplying moisture gas from the reactor under reduced pressure. A heat dissipation reactor improvement substantially increases moisture generation without being an enlargement in size by efficient cooling of the reactor alumite-treated fins.

2. 发明授权

US07368092B2 Apparatus and reactor for generating and feeding high purity moisture 有权
标题翻译：用于产生和提供高纯度水分的装置和反应器
公开(公告)号：US07368092B2
公开(公告)日：2008-05-06
申请号：US10724101
申请日：2003-12-01
申请人： Tadahiro Ohmi , Nobukazu Ikeda , Yukio Minami , Kouji Kawada , Katunori Komehana , Teruo Honiden , Touru Hirai , Akihiro Morimoto , Toshirou Nariai , Keiji Hirao , Masaharu Taguchi , Osamu Nakamura
发明人： Tadahiro Ohmi , Nobukazu Ikeda , Yukio Minami , Kouji Kawada , Katunori Komehana , Teruo Honiden , Touru Hirai , Akihiro Morimoto , Toshirou Nariai , Keiji Hirao , Masaharu Taguchi , Osamu Nakamura
IPC分类号： B01J19/24 , B01J8/02 , C01B5/00
CPC分类号： B01J3/006 , B01J7/00 , B01J12/007 , C01B5/00
摘要： A safe, reduced pressure apparatus for generating water vapor from hydrogen and oxygen and feeding high purity moisture to processes such as semiconductor production. The apparatus eliminates the possibility of the gas igniting by maintaining the internal pressure of the catalytic reactor for generating moisture at a high level while supplying moisture gas from the reactor under reduced pressure. A heat dissipation reactor improvement substantially increases moisture generation without being an enlargement in size by efficient cooling of the reactor alumite-treated fins.
摘要翻译：一种用于从氢气和氧气产生水蒸汽并将高纯度水分提供给诸如半导体生产的过程的安全的减压装置。该设备通过保持催化反应器的内部压力以消除气体点燃的可能性，以产生高水平的水分，同时在减压下从反应器中提供湿气。散热反应器的改进通过有效冷却反应器耐氧化铝处理的翅片而大大地增加了水分产生而不会扩大尺寸。

3. 发明申请

US20060292047A1 Apparatus and reactor for generating and feeding high purity moisture 有权
公开(公告)号：US20060292047A1
公开(公告)日：2006-12-28
申请号：US11460087
申请日：2006-07-26
申请人： Tadahiro Ohmi , Nobukazu Ikeda , Yukio Minami , Kouji Kawada , Katunori Komehana , Teruo Honiden , Touru Hirai , Akihiro Morimoto , Toshirou Nariai , Keiji Hirao , Masaharu Taguchi , Osamu Nakamura
发明人： Tadahiro Ohmi , Nobukazu Ikeda , Yukio Minami , Kouji Kawada , Katunori Komehana , Teruo Honiden , Touru Hirai , Akihiro Morimoto , Toshirou Nariai , Keiji Hirao , Masaharu Taguchi , Osamu Nakamura
IPC分类号： B01J8/02 , C01B5/00
CPC分类号： B01J3/006 , B01J7/00 , B01J12/007 , C01B5/00
摘要： A safe, reduced pressure apparatus for generating water vapor from hydrogen and oxygen and feeding high purity moisture to processes such as semiconductor production. The apparatus eliminates the possibility of the gas igniting by maintaining the internal pressure of the catalytic reactor for generating moisture at a high level while supplying moisture gas from the reactor under reduced pressure. A heat dissipation reactor improvement substantially increases moisture generation without being an enlargement in size by efficient cooling of the reactor alumite-treated fins.

4. 发明申请

US20070231225A1 APPARATUS AND REACTOR FOR GENERATING AND FEEDING HIGH PURITY MOISTURE 审中-公开
标题翻译：用于产生和输送高纯度水分的装置和反应器
公开(公告)号：US20070231225A1
公开(公告)日：2007-10-04
申请号：US11760330
申请日：2007-06-08
申请人： Tadahiro Ohmi , Nobukazu Ikeda , Yukio Minami , Kouji Kawada , Katunori Komehana , Teruo Honiden , Touru Hirai , Akihiro Morimoto , Toshirou Nariai , Keiji Hirao , Masaharu Taguchi , Osamu Nakamura
发明人： Tadahiro Ohmi , Nobukazu Ikeda , Yukio Minami , Kouji Kawada , Katunori Komehana , Teruo Honiden , Touru Hirai , Akihiro Morimoto , Toshirou Nariai , Keiji Hirao , Masaharu Taguchi , Osamu Nakamura
IPC分类号： B01J23/40
CPC分类号： B01J3/006 , B01J7/00 , B01J12/007 , C01B5/00
摘要： A safe, reduced pressure apparatus for generating water vapor from hydrogen and oxygen and feeding high purity moisture to processes such as semiconductor production. The apparatus eliminates the possibility of the gas igniting by maintaining the internal pressure of the catalytic reactor for generating moisture at a high level while supplying moisture gas from the reactor under reduced pressure. A heat dissipation reactor improvement substantially increases moisture generation without being an enlargement in size by efficient cooling of the reactor alumite-treated fins.
摘要翻译：一种用于从氢气和氧气产生水蒸汽并将高纯度水分提供给诸如半导体生产的过程的安全的减压装置。该设备通过保持催化反应器的内部压力以消除气体点燃的可能性，以产生高水平的水分，同时在减压下从反应器中提供湿气。散热反应器的改进通过有效冷却反应器耐氧化铝处理的翅片而大大地增加了水分产生而不会扩大尺寸。

5. 发明授权

US07258845B2 Apparatus and reactor for generating and feeding high purity moisture 有权
标题翻译：用于产生和提供高纯度水分的装置和反应器
公开(公告)号：US07258845B2
公开(公告)日：2007-08-21
申请号：US09773605
申请日：2001-02-02
申请人： Tadahiro Ohmi , Nobukazu Ikeda , Yukio Minami , Kouji Kawada , Katunori Komehana , Teruo Honiden , Touru Hirai , Akihiro Morimoto , Toshirou Nariai , Keiji Hirao , Masaharu Taguchi , Osamu Nakamura
发明人： Tadahiro Ohmi , Nobukazu Ikeda , Yukio Minami , Kouji Kawada , Katunori Komehana , Teruo Honiden , Touru Hirai , Akihiro Morimoto , Toshirou Nariai , Keiji Hirao , Masaharu Taguchi , Osamu Nakamura
IPC分类号： B01J8/02 , C01B5/00
CPC分类号： B01J3/006 , B01J7/00 , B01J12/007 , C01B5/00
摘要： A safe, reduced pressure apparatus for generating water vapor from hydrogen and oxygen and feeding high purity moisture to processes such as semiconductor production. The apparatus eliminates the possibility of the gas igniting by maintaining the internal pressure of the catalytic reactor for generating moisture at a high level while supplying moisture gas from the reactor under reduced pressure. A heat dissipation reactor improvement substantially increases moisture generation without being an enlargement in size by efficient cooling of the reactor alumite-treated fins.
摘要翻译：一种用于从氢气和氧气产生水蒸汽并将高纯度水分提供给诸如半导体生产的过程的安全的减压装置。该设备通过保持催化反应器的内部压力以消除气体点燃的可能性，以产生高水平的水分，同时在减压下从反应器中提供湿气。散热反应器的改进通过有效冷却反应器耐氧化铝处理的翅片而大大地增加了水分产生而不会扩大尺寸。

6. 发明授权

US07008598B2 Reactor for generating moisture 有权
标题翻译：反应器产生水分
公开(公告)号：US07008598B2
公开(公告)日：2006-03-07
申请号：US10884917
申请日：2004-07-07
申请人： Tadahiro Ohmi , Kouji Kawada , Nobukazu Ikeda , Akihiro Morimoto , Yukio Minami , Kenji Tubota , Teruo Honiden , Touru Hirai , Katunori Komehana , Keiji Hirao
发明人： Tadahiro Ohmi , Kouji Kawada , Nobukazu Ikeda , Akihiro Morimoto , Yukio Minami , Kenji Tubota , Teruo Honiden , Touru Hirai , Katunori Komehana , Keiji Hirao
IPC分类号： B01J8/02
CPC分类号： B01J12/007 , B01J2219/00058 , B01J2219/00087 , B01J2219/00096 , C01B5/00
摘要： A reactor for generating moisture wherein ignition of hydrogen gas, backfire to the gas supply source side, the peeling off of the platinum coat catalyst layer inside are prevented more completely to further increase the safety of the reactor for generating moisture and wherein the dead space in the interior space is reduced to further reduce the size of the reactor shell. The reactor comprises: a reactor shell A with an interior space formed with a reactor structural component on the inlet side and a reactor structural component on the outlet side opposed to and united with each other by welding, the reactor structural component 1 on the inlet side provided with a gas feed port 1a and the reactor structural component 2 on the outlet side provided with a moisture gas take-out port 2a; a reflector on the inlet side facing the gas feed port in the interior space of the reactor; a reflector on the outlet side facing the moisture gas take-out port in the interior space; and a platinum coat catalyst layer 8 formed on the inside wall of the reactor structural component on the outlet side, wherein hydrogen and oxygen fed into the interior space of the reactor through the gas feed port are brought into contact with the platinum coat 8b to activate the reactivity, thereby reacting hydrogen and oxygen into water in a non-combustion state.
摘要翻译：一种用于产生水分的反应器，其中更加完全地防止了氢气的点燃，气体供应源侧的反应，内部的铂涂层催化剂层的剥离，从而进一步提高了产生水分的反应器的安全性，减少内部空间以进一步减小反应器壳体的尺寸。反应器包括：反应器壳体A，内部空间形成有入口侧的反应器结构部件，出口侧的反应器结构部件通过焊接彼此相对并且彼此结合，反应器结构部件1在入口侧设置有气体供给口1a和在排气侧设置有湿气取出口2a的反应器结构部件2; 入口侧的反射器，其面对反应器内部空间中的气体供给口; 出口侧的反射器面向内部空间中的湿气取出口; 以及形成在出口侧的反应器结构部件的内壁上的铂涂层催化剂层8，其中通过气体供给口供给到反应器的内部空间中的氢和氧与铂涂层8b相接触，激活反应性，从而使氢和氧在非燃烧状态下反应成水。

7. 发明授权

US06919056B2 Reactor for generating moisture 有权
标题翻译：反应器产生水分
公开(公告)号：US06919056B2
公开(公告)日：2005-07-19
申请号：US09905209
申请日：2001-07-12
申请人： Tadahiro Ohmi , Kouji Kawada , Nobukazu Ikeda , Akihiro Morimoto , Yukio Minami , Kenji Tubota , Teruo Honiden , Touru Hirai , Katunori Komehana , Keiji Hirao
发明人： Tadahiro Ohmi , Kouji Kawada , Nobukazu Ikeda , Akihiro Morimoto , Yukio Minami , Kenji Tubota , Teruo Honiden , Touru Hirai , Katunori Komehana , Keiji Hirao
IPC分类号： B01J8/02 , B01J10/00 , B01J12/00 , C01B5/00
CPC分类号： B01J12/007 , B01J2219/00058 , B01J2219/00087 , B01J2219/00096 , C01B5/00
摘要： A reactor for generating moisture wherein ignition of hydrogen gas, backfire to the gas supply source side, and the peeling off of the platinum coat catalyst layer inside are all prevented more completely to further increase the safety of the reactor for generating moisture, and wherein the dead space in the interior space is reduced to further reduce the size of the reactor shell. The reactor has a reactor shell A with an interior space; a reflector on an inlet side facing a gas feed port in the interior space of the reactor; a reflector on an outlet side facing a moisture gas take-out port in the interior space; and a platinum coat catalyst layer 8 formed on an inside wall of a reactor structural component on the outlet side. Hydrogen and oxygen fed into the interior space of the reactor react without combustion.
摘要翻译：用于产生水分的反应器，其中充分点燃氢气，对气体供应源侧的回火以及铂涂层催化剂层内部的剥离都被更完全地防止，从而进一步提高了产生水分的反应器的安全性，并且其中减少内部空间中的死空间以进一步减小反应器壳体的尺寸。反应器具有内部空间的反应器壳体A; 在反应器的内部空间中的面向气体供给口的入口侧上的反射器; 出口侧的反射器，其面向内部空间中的湿气取出口; 以及形成在出口侧的反应器结构部件的内壁上的铂涂层催化剂层8。进入反应器内部空间的氢气和氧气反应而不燃烧。

8. 发明授权

US06387158B2 Method of removing moisture in gas supply system 失效
标题翻译：排气系统除湿方法
公开(公告)号：US06387158B2
公开(公告)日：2002-05-14
申请号：US09848208
申请日：2001-05-04
申请人： Nobukazu Ikeda , Akihiro Morimoto , Yukio Minami , Teruo Honiden , Kouji Kawada , Katunori Komehana , Touru Hirai , Michio Yamaji
发明人： Nobukazu Ikeda , Akihiro Morimoto , Yukio Minami , Teruo Honiden , Kouji Kawada , Katunori Komehana , Touru Hirai , Michio Yamaji
IPC分类号： F17D314
CPC分类号： B01D53/26 , F17D3/14
摘要： A method of removing moisture efficiently in the gas supply system by evacuation at normal temperature without using the baking method. The method involves flowing a gas to remove moisture in the gas supply system with the flow pressure of the gas to remove moisture set at not lower than a minimum pressure at which the gas flow becomes viscous and not higher than a water saturated vapor pressure at a flow temperature of the gas to remove moisture. The gas to remove moisture achieves a viscous flow when a mean free path of gas molecules is smaller than a diameter of piping of the gas supply system. If the gas for removing moisture is evacuated at normal temperature under such conditions, the adsorbed moisture on an inside surface of the piping and in the valves and filters can be removed effectively.
摘要翻译：一种通过在常温抽真空而不使用烘烤方法在气体供给系统中有效除去水分的方法。该方法包括使气体流动以除去气体的流量的气体中的水分，以除去在不低于气体流变粘度的最低压力并且不高于水的饱和蒸气压的水分气体的流动温度去除水分。当气体分子的平均自由程小于气体供应系统的管道直径时，去除水分的气体达到粘性流动。如果用于除去水分的气体在这样的条件下在常温下抽真空，则能够有效地除去管道内表面和阀门和过滤器中的吸附水分。

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