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    • 4. 发明授权
    • Sapphire substrate, nitride semiconductor luminescent element using the sapphire substrate, and method for manufacturing the nitride semiconductor luminescent element
    • 蓝宝石衬底,使用蓝宝石衬底的氮化物半导体发光元件,以及氮化物半导体发光元件的制造方法
    • US08390023B2
    • 2013-03-05
    • US12446081
    • 2007-10-19
    • Robert David ArmitageYukihiro KondoHideki Hirayama
    • Robert David ArmitageYukihiro KondoHideki Hirayama
    • H01L33/00
    • H01L21/02661C30B25/02C30B25/18C30B29/403C30B29/406H01L21/0242H01L21/0243H01L21/02433H01L21/02458H01L21/0254H01L21/02609H01L33/007H01L33/16
    • The present invention provides an inexpensive substrate which can realize m-plane growth of a crystal by vapor phase growth. In a sapphire substrate, an off-angle plane slanted from an m-plane by a predetermined very small angle is prepared as a growth surface, which is a template of the crystal, at the time of growing a crystal of GaN or the like, by a polishing process to prepare a stepwise substrate comprising steps and terraces. According to the above-described configuration, even if an inexpensive sapphire substrate, which normally does not form an m-plane (nonpolar plane) GaN film, is used as a substrate for crystal growth, the following advantages can be attained. Specifically, c-axis growth can be carried out from the plane of each step as an a-plane on the terrace by vapor phase growth, which is advantageous in the fabrication of a device, in order to grow an excellent GaN single crystal which has been epitaxially grown so that the m-plane is opposite to the surplane of the terrace, and, in the mean time, the steps become integrated (fused), whereby a device can be fabricated from a substrate of a GaN single crystal having no significant threading dislocation. Further, the use of the m-plane can advantageously eliminate the influence of piezo electric fields.
    • 本发明提供一种廉价的基板,其可以通过气相生长实现晶体的m面生长。 在蓝宝石衬底中,在生长GaN等的晶体时,准备从m面倾斜预定非常小的角度的偏角平面作为晶体模板的生长表面, 通过抛光工艺制备包括步骤和梯田的逐步底物。 根据上述结构,即使使用通常不形成m面(非极性面)GaN膜的廉价蓝宝石基板作为晶体生长用基板,也可以获得以下的效果。 具体地说,c轴生长可以通过气相生长在平台上作为a平面从每个步骤的平面进行,这在器件的制造中是有利的,以便生长优异的GaN单晶,其具有 被外延生长,使得m平面与平台的平面相对,并且同时,步骤被整合(熔化),由此可以从不具有显着性的GaN单晶的衬底制造器件 穿线错位 此外,使用m面可以有利地消除压电场的影响。
    • 5. 发明授权
    • Getter and electrical switching system using such getter
    • 吸气剂和电气开关系统使用这种吸气剂
    • US4430537A
    • 1984-02-07
    • US363584
    • 1982-03-30
    • Hans SauerTakashi TakadaYukihiro Kondo
    • Hans SauerTakashi TakadaYukihiro Kondo
    • H01H1/64H01H9/04
    • H01H1/645
    • A getter for use in a sealed contact chamber consists of a porous getter material which acts to adsorb substances which could create resistive films on electrical contacts. By disposing such a getter within the contact chamber of a switching device, such as an electromagnetic relay, molecules of, for instance, organic compounds, may be selectively and over long terms adsorbed to the getter and thus kept away from the contacts. The selective adsorption of such molecules is achieved by a porous getter material in which the majority of the pores have diameters greater than 3 nm and smaller than 100 nm, with the mean value of pore diameter ranging from about 7 nm to about 20 nm. The getter material may be substantially Al.sub.2 O.sub.3.
    • 在密封接触室中使用的吸气剂由多孔吸气剂材料组成,其用于吸附可在电触点上产生电阻膜的物质。 通过在诸如电磁继电器的开关装置的接触室内设置这种吸气剂,例如有机化合物的分子可以被选择性地且超过长期吸附到吸气剂上并因此远离接触点。 这种分子的选择性吸附通过多孔吸气剂材料实现,其中大部分孔具有大于3nm且小于100nm的直径,孔径的平均值为约7nm至约20nm。 吸气材料可以基本上是Al 2 O 3。
    • 6. 发明申请
    • SAPPHIRE SUBSTRATE, NITRIDE SEMICONDUCTOR LUMINESCENT ELEMENT USING THE SAPPHIRE SUBSTRATE, AND METHOD FOR MANUFACTURING THE NITRIDE SEMICONDUCTOR LUMINESCENT ELEMENT
    • SAPPHIRE底物,使用锑基底材的氮化物半导体发光元件及其制造氮化物半导体发光元件的方法
    • US20100207136A1
    • 2010-08-19
    • US12446081
    • 2007-10-19
    • Robert David ArmitageYukihiro KondoHideki Hirayama
    • Robert David ArmitageYukihiro KondoHideki Hirayama
    • H01L33/32H01L29/02H01L21/20
    • H01L21/02661C30B25/02C30B25/18C30B29/403C30B29/406H01L21/0242H01L21/0243H01L21/02433H01L21/02458H01L21/0254H01L21/02609H01L33/007H01L33/16
    • The present invention provides an inexpensive substrate which can realize m-plane growth of a crystal by vapor phase growth. In a sapphire substrate, an off-angle plane slanted from an m-plane by a predetermined very small angle is prepared as a growth surface, which is a template of the crystal, at the time of growing a crystal of GaN or the like, by a polishing process to prepare a stepwise substrate comprising steps and terraces. According to the above-described configuration, even if an inexpensive sapphire substrate, which normally does not form an m-plane (nonpolar plane) GaN film, is used as a substrate for crystal growth, the following advantages can be attained. Specifically, c-axis growth can be carried out from the plane of each step as an a-plane on the terrace by vapor phase growth, which is advantageous in the fabrication of a device, in order to grow an excellent GaN single crystal which has been epitaxially grown so that the m-plane is opposite to the surplane of the terrace, and, in the mean time, the steps become integrated (fused), whereby a device can be fabricated from a substrate of a GaN single crystal having no significant threading dislocation. Further, the use of the m-plane can advantageously eliminate the influence of piezo electric fields.
    • 本发明提供一种廉价的基板,其可以通过气相生长实现晶体的m面生长。 在蓝宝石衬底中,在生长GaN等的晶体时,准备从m面倾斜预定非常小的角度的偏角平面作为晶体模板的生长表面, 通过抛光工艺制备包括步骤和梯田的逐步底物。 根据上述结构,即使使用通常不形成m面(非极性面)GaN膜的廉价蓝宝石基板作为晶体生长用基板,也可以获得以下的效果。 具体地说,c轴生长可以通过气相生长在平台上作为a平面从每个步骤的平面进行,这在器件的制造中是有利的,以便生长优异的GaN单晶,其具有 被外延生长,使得m平面与平台的平面相对,并且同时,步骤被整合(熔化),由此可以从不具有显着性的GaN单晶的衬底制造器件 穿线错位 此外,使用m面可以有利地消除压电场的影响。
    • 7. 发明授权
    • Semiconductor light emitting device and illuminating device using it
    • 半导体发光装置及其使用的照明装置
    • US07723739B2
    • 2010-05-25
    • US11991418
    • 2006-09-04
    • Takayoshi TakanoYukihiro KondoJunji IkedaHideki Hirayama
    • Takayoshi TakanoYukihiro KondoJunji IkedaHideki Hirayama
    • H01L33/00
    • H01L33/12H01L33/06H01L33/22H01L33/32
    • A semiconductor light emitting device includes an n-type nitride semiconductor layer 3 formed on one surface side of a single-crystal substrate 1 for epitaxial growth through a first buffer layer 2, an emission layer 5 formed on a surface side of the n-type nitride semiconductor layer 3, and a p-type nitride semiconductor layer 6 formed on a surface side of the emission layer 5. The emission layer 5 has an AlGaInN quantum well structure, and a second buffer layer 4 having the same composition as a barrier layer 5a of the emission layer 5 is provided between the n-type nitride semiconductor layer 3 and the emission layer 5. In the semiconductor light emitting device, it is possible to increase emission intensity of the ultraviolet radiation as compared with a conventional configuration while using AlGaInN as a material of the emission layer.
    • 半导体发光器件包括在单晶衬底1的一个表面侧上形成的用于通过第一缓冲层2外延生长的n型氮化物半导体层3,形成在n型表面侧的发射层5 氮化物半导体层3和形成在发光层5的表面侧的p型氮化物半导体层6.发光层5具有AlGaInN量子阱结构和具有与阻挡层相同的组成的第二缓冲层4 发光层5的5a设置在n型氮化物半导体层3和发光层5之间。在半导体发光器件中,与常规配置相比,可以增加紫外线辐射的发射强度,同时使用AlGaInN 作为发射层的材料。
    • 9. 发明授权
    • Field emission-type electron source and manufacturing method thereof
    • 场致发射型电子源及其制造方法
    • US06498426B1
    • 2002-12-24
    • US09557916
    • 2000-04-21
    • Yoshifumi WatabeYukihiro KondoKoichi AizawaTakuya KomodaYoshiaki HondaTakashi HataiTsutomu IchiharaNobuyoshi Koshida
    • Yoshifumi WatabeYukihiro KondoKoichi AizawaTakuya KomodaYoshiaki HondaTakashi HataiTsutomu IchiharaNobuyoshi Koshida
    • H01J100
    • B82Y10/00H01J1/304H01J1/312H01J9/025
    • A field emission-type electron source (10) is provided with a conductive substrate (1), a semiconductor layer formed on a surface of the conductive substrate (1), at least a part of the semiconductor layer being made porous, and a conductive thin film (7) formed on the semiconductor layer. Electrons injected into the conductive substrate (1) are emitted from the conductive thin film (7) through the semiconductor layer by applying a voltage between the conductive thin film (7) and the conductive substrate (1) in such a manner that the conductive thin film (7) acts as a positive electrode against the conductive substrate (1). The semiconductor layer includes a porous semiconductor layer (6) in which columnar structures (21) and porous structures (25) composed of fine semiconductor crystals of nanometer scale coexist, a surface of each of the structures being covered with an insulating film (22,24). Further, an average dimension of each of the porous structures (25) in a thickness direction of the semiconductor layer is smaller than or equal to 2 &mgr;m.
    • 场发射型电子源(10)设置有导电基板(1),形成在导电基板(1)的表面上的半导体层,半导体层的至少一部分被制成多孔的导电基板 形成在半导体层上的薄膜(7)。 通过在导电薄膜(7)和导电性基板(1)之间施加电压,使导电性薄膜(7)的导电性薄膜(7)通过半导体层从导电性薄膜(7)射出, 膜(7)用作抵靠导电基板(1)的正电极。 半导体层包括多孔半导体层(6),其中由纳米级微细半导体晶体构成的柱状结构(21)和多孔结构(25)共存,每个结构的表面被绝缘膜(22, 24)。 此外,半导体层的厚度方向上的多孔结构体(25)的平均尺寸小于或等于2μm。