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    • 2. 发明申请
    • HIGH VOLTAGE DEVICE AND MANUFACTURING METHOD THEREOF
    • 高压器件及其制造方法
    • US20120223384A1
    • 2012-09-06
    • US13037678
    • 2011-03-01
    • TSUNG-YI HUANGKuo-Hsuan Lo
    • TSUNG-YI HUANGKuo-Hsuan Lo
    • H01L29/78H01L21/336
    • H01L29/66681H01L29/0619H01L29/0634H01L29/0653H01L29/0847H01L29/1045H01L29/42368H01L29/7835
    • The present invention discloses a high voltage device and a manufacturing method thereof. The high voltage device includes: a first conductive type substrate in which isolation regions are formed for defining a device region; a gate formed on the first conductive type substrate; a source and a drain formed in the device region and located at both sides of the gate respectively, and doped with second conductive type impurities; a second conductive type well, which is formed in the first conductive type substrate, and surrounds the drain from top view; and a first deep trench isolation structure, which is formed in the first conductive type substrate, and is located in the second conductive type well between the source and the drain from top view, wherein the depth of the first deep trench isolation structure is deeper than the second conductive type well from the cross-sectional view.
    • 本发明公开了一种高压器件及其制造方法。 高压器件包括:第一导电型衬底,其中形成隔离区以限定器件区域; 形成在所述第一导电型基板上的栅极; 在器件区域中分别形成并位于栅极两侧的源极和漏极,并掺杂有第二导电类型杂质; 第二导电型阱,其形成在第一导电类型基板中,并且从俯视图围绕漏极; 以及第一深沟槽隔离结构,其形成在第一导电类型基板中,并且从顶视图位于源极和漏极之间的第二导电类型阱中,其中第一深沟槽隔离结构的深度比 第二导电类型井从横截面图。