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1. 发明授权

US09879979B2 Heterodyne grating interferometer displacement measurement system 有权
公开(公告)号：US09879979B2
公开(公告)日：2018-01-30
申请号：US14441821
申请日：2013-10-28
申请人： TSINGHUA UNIVERSITY
发明人： Ming Zhang , Yu Zhu , Leijie Wang , Jinchun Hu , Longmin Chen , Kaiming Yang , Dengfeng Xu , Wensheng Yin , Haihua Mu
IPC分类号： G01B9/02 , G01B11/14 , G01D5/26 , G01D5/38
CPC分类号： G01B11/14 , G01B9/02002 , G01B9/02007 , G01B9/02011 , G01B2290/70 , G01D5/266 , G01D5/38
摘要： A displacement measurement system of heterodyne grating interferometer, comprises a reading head, a measurement grating and an electronic signal processing component. Laser light emitted from the laser tube is collimated, passes through the first polarization spectroscope, and then emits two light beams with an orthogonal polarization direction and an orthogonal propagation direction; the two light beams pass through two acousto-optic modulators and respectively generate two first-order diffraction light beams with different frequencies, which are later divided into reference light and measurement light; two parallel reference light beams form a beat frequency electric signal with positive and negative first-order diffraction measurement light respectively after passing through a measurement signal photo-electric conversion unit; the beat frequency signals are transmitted to the electronic signal processing component for signal processing, thus the output of linear displacement in two directions is realized.

2. 发明申请

US20150362723A1 OPTICAL GRATING PHASE MODULATOR FOR LASER INTERFERENCE PHOTOETCHING SYSTEM 有权
标题翻译：用于激光干涉光刻系统的光学相位调制器
公开(公告)号：US20150362723A1
公开(公告)日：2015-12-17
申请号：US14761605
申请日：2014-01-13
申请人： TSINGHUA UNIVERSITY
发明人： Yu Zhu , Ming Zhang , Leijie Wang , Rong Cheng , Kaiming Yang , Zhao Liu , Jinchun Hu , Wensheng Yin , Haihua MU , Chuxiong Hu , Dengfeng Xu
IPC分类号： G02B26/06 , G03F7/20
CPC分类号： G02B26/06 , G03F7/20 , G03F7/70316 , G03F7/70408
摘要： An optical grating phase modulator for a laser interference photoetching system is composed of a substrate, an optical grating, an electric motor and an optical grating positioner. The optical grating, the electric motor and the optical grating positioner are all mounted on the substrate. The optical grating is circular or rectangular, and adopt transmission or reflection type optical grating. A light beam is incident on the optical grating and generates diffraction, and when the electric motor drives the optical grating to continuously move relative to the incident light beam, diffracted light will generate a frequency shift, thereby realizing the phase modulation of the light beam. The optical grating phase modulator has the advantages of high phase modulation speed, high regulation precision and wide regulation range, thereby improving the whole performance of an interference photoetching system.
摘要翻译：用于激光干涉光刻系统的光栅相位调制器由基板，光栅，电动马达和光栅定位器组成。光栅，电动机和光栅定位器都安装在基板上。光栅为圆形或矩形，采用透射或反射型光栅。光束入射到光栅上并产生衍射，并且当电动机驱动光栅相对于入射光束连续移动时，衍射光将产生频移，从而实现光束的相位调制。光栅相位调制器具有相位调制速度快，调节精度高，调节范围宽等特点，提高了干涉光刻系统的整体性能。

3. 发明申请

US20150268031A1 DUAL-FREQUENCY GRATING INTERFEROMETER DISPLACEMENT MEASUREMENT SYSTEM 有权
标题翻译：双频光栅干涉仪位移测量系统
公开(公告)号：US20150268031A1
公开(公告)日：2015-09-24
申请号：US14441828
申请日：2013-10-28
申请人： TSINGHUA UNIVERSITY
发明人： Yu Zhu , Ming Zhang , Leijie Wang , Jinchun Hu , Longmin Chen , Kaiming Yang , Dengfeng Xu , Wensheng Yin , Haihua Mu
IPC分类号： G01B9/02 , G01B11/14
CPC分类号： G01B9/02007 , G01B9/02049 , G01B11/14 , G01D5/266 , G01D5/38
摘要： A dual-frequency grating interferometer displacement measurement system, comprises a dual-frequency laser, an interferometer, a measurement grating and an electronic signal processing component. The measurement system realizes displacement measurement based on grating diffraction, optical Doppler effect and optical beat frequency theory. Dual-frequency laser light is emitted from the dual-frequency laser and split into reference light and measurement light via a polarization spectroscope. The measurement light is incident to the measurement grating to generate positive and negative first-order diffraction. The diffraction light and the reference light form a beat frequency signal containing displacement information about two directions at a photo-detection unit, and linear displacement output is realized after signal processing. The measurement system can realize sub-nanometer and even higher resolution and accuracy, and is able to measure long horizontal displacement and vertical displacement at the same time.
摘要翻译：双频光栅干涉仪位移测量系统，包括双频激光器，干涉仪，测量光栅和电子信号处理部件。测量系统基于光栅衍射，光学多普勒效应和光拍频理论实现位移测量。双频激光从双频激光器发射并通过偏振光谱仪分为参考光和测量光。测量光入射到测量光栅以产生正负一阶衍射。衍射光和参考光在光检测单元处形成包含关于两个方向的位移信息的拍频信号，并且在信号处理之后实现线性位移输出。测量系统可以实现亚纳米级，甚至更高的分辨率和精度，同时可以测量长的水平位移和垂直位移。

4. 发明申请

US20150077032A1 SINGLE DEGREE OF FREEDOM VIBRATION ISOLATING DEVICE OF LINEAR MOTOR AND MOTION CONTROL METHOD THEREOF 有权
标题翻译：线性电机自动振动隔离装置的单程度及其运动控制方法
公开(公告)号：US20150077032A1
公开(公告)日：2015-03-19
申请号：US14395471
申请日：2013-04-15
申请人： TSINGHUA UNIVERSITY
发明人： Kaiming Yang , Yu Zhu , Dongdong Yu , Rong Cheng , Ming Zhang , Xin Li , Haihua Mu , Jinchun Hu , Dengfeng Xu , Wensheng Yin , Guofeng Ji
IPC分类号： G05B19/18
CPC分类号： G05B19/18 , G05B2219/41117 , H02P25/06
摘要： A single degree of freedom vibration isolating device of a linear motor and a motion control method thereof. The vibration isolating device comprises a balance block, an anti-drifting driving unit, and a control unit. An upper surface of the balance block is connected to a stator of the linear motor, and a lower surface of the balance block is connected to a base. The anti-drifting driving unit is connected to the balance block for controlling the position of the balance block. Provided two motion control methods; inputting a second grating ruler signal to the control unit as feedback to perform variable stiffness and nonlinear control on the balance block; inputting a first and a second grating ruler signal to the control unit as feedback to obtain resultant centroid displacement signals of the rotor and the balance block to perform nonlinear anti-drifting control on the balance block.
摘要翻译：线性电动机的单自由度隔振装置及其运动控制方法。防振装置包括平衡块，防漂移驱动单元和控制单元。平衡块的上表面连接到线性电动机的定子，并且平衡块的下表面连接到基座。防漂移驱动单元连接到用于控制平衡块的位置的平衡块。提供两种运动控制方法; 向控制单元输入第二光栅尺信号作为反馈以对平衡块执行可变刚度和非线性控制; 将第一和第二光栅标尺信号输入到控制单元作为反馈，以获得转子和平衡块的合成重心位移信号，以对平衡块执行非线性防漂移控制。

5. 发明授权

US09885556B2 Dual-frequency grating interferometer displacement measurement system 有权
公开(公告)号：US09885556B2
公开(公告)日：2018-02-06
申请号：US14441828
申请日：2013-10-28
申请人： TSINGHUA UNIVERSITY
发明人： Yu Zhu , Ming Zhang , Leijie Wang , Jinchun Hu , Longmin Chen , Kaiming Yang , Dengfeng Xu , Wensheng Yin , Haihua Mu
IPC分类号： G01B9/02 , G01D5/26 , G01D5/38 , G01B11/14
CPC分类号： G01B9/02007 , G01B9/02049 , G01B11/14 , G01D5/266 , G01D5/38
摘要： A dual-frequency grating interferometer displacement measurement system, comprises a dual-frequency laser, an interferometer, a measurement grating and an electronic signal processing component. The measurement system realizes displacement measurement based on grating diffraction, optical Doppler effect and optical beat frequency theory. Dual-frequency laser light is emitted from the dual-frequency laser and split into reference light and measurement light via a polarization spectroscope. The measurement light is incident to the measurement grating to generate positive and negative first-order diffraction. The diffraction light and the reference light form a beat frequency signal containing displacement information about two directions at a photo-detection unit, and linear displacement output is realized after signal processing. The measurement system can realize sub-nanometer and even higher resolution and accuracy, and is able to measure long horizontal displacement and vertical displacement at the same time.

6. 发明申请

US20150097508A1 METHOD FOR MEASURING DISPLACEMENT OF PLANAR MOTOR ROTOR 有权
标题翻译：测量平面电机转子位移的方法
公开(公告)号：US20150097508A1
公开(公告)日：2015-04-09
申请号：US14382221
申请日：2013-02-21
申请人： SHANGHAI MICRO ELECTRONICS EQUIPMENT CO., LTD. , TSINGHUA UNIVERSITY
发明人： Yu Zhu , Jinchun Hu , Dengfeng Xu , Yuting Sun , Wensheng Yin , Ming Zhang , Kaiming Yang , Haihua Mu
IPC分类号： G05B6/02 , G01B7/14
CPC分类号： G05B6/02 , G01B7/023 , G01B7/14
摘要： A method for measuring the displacement of a planar motor rotor. The measuring method comprises: four magnetic induction intensity sensors are distributed on the planar motor rotor; sampled signals of the four distributed sensors are processed to obtain signals Bsx, Bcx, Bsy and Bcy and magnetic field reference values Bksx, Bkcx, Bksy and Bkcy; and X-direction displacement and Y-direction displacement can be measured respectively according to inequalities (I) and (II) by judgments, wherein Δx and Δy are X-direction displacement resolution and Y-direction displacement resolution respectively, and BM is the magnetic induction intensity amplitude of the magnetic field of said planar motor. The method provided by the invention is simple in calculation, can avoid calculation of a transcendental function and solve the quadrant judgment problem, is favorable to real-time high-speed operation and has a high engineering value.  B ksx  B cx - B kcx  B sx B M 2  ≥ Δ x ( I )  B ksy  B cy - B kcy  B sy B M 2  ≥ Δ y ( II )
摘要翻译：一种用于测量平面电动机转子的位移的方法。测量方法包括：四个磁感应强度传感器分布在平面电机转子上; 处理四个分布式传感器的采样信号以获得信号Bsx，Bcx，Bsy和Bcy以及磁场参考值Bksx，Bkcx，Bksy和Bkcy; 并且可以通过判断根据不等式（I）和（II）分别测量X方向位移和Y方向位移，其中＆Dgr; x和＆Dgr; y分别是X方向位移分辨率和Y方向位移分辨率， BM是所述平面电动机的磁场的磁感应强度振幅。本发明提供的方法计算简单，可以避免超验函数的计算，解决象限判断问题，有利于实时高速运行，具有很高的工程价值。 B ksxB cx - B kcx B B sx B M 2≥＆Dgr; x（I）B yBsy sy y（II）

7. 发明授权

US09904183B2 Coarse motion and fine motion integrated reticle stage driven by planar motor 有权
公开(公告)号：US09904183B2
公开(公告)日：2018-02-27
申请号：US15307752
申请日：2015-04-17
申请人： TSINGHUA UNIVERSITY , BEIJING U-PRECISION TECH CO., LTD.
发明人： Yu Zhu , Ming Zhang , Fan Zhi , Zhao Liu , Rong Cheng , Kaiming Yang , Li Zhang , Huichao Qin , Yanpo Zhao , Li Tian , Weinan Ye , Jin Zhang , Wensheng Yin , Haihua Mu , Jinchun Hu
IPC分类号： G03F7/20
CPC分类号： G03F7/70716 , G03F7/70725 , G03F7/70733 , G03F7/70758 , G03F7/70766 , G03F7/70775
摘要： A coarse motion and fine motion integrated reticle stage driven by a planar motor comprises a movable platform (100) of the reticle stage, a balance mass (200), a drive motor, a mask plate (101, 102), a base (001), a vibration isolation system (500), and a measuring system, wherein, the vibration isolation system is located between the balance mass and the base, and the mask plate is mounted on the movable platform. The drive motor of the movable platform is a moving-iron type planar motor (300). The reticle stage can lower the design complexity of the drive motor of the movable platform. Compared with a linear motor, the planar motor can provide push forces in more directions, the number of motors is reduced, the structure of the movable platform is more compact, the inherent frequency and the control bandwidth of the movable platform are improved, and thus control precision is improved.

8. 发明授权

US09903704B2 Three-DOF heterodyne grating interferometer displacement measurement system 有权
公开(公告)号：US09903704B2
公开(公告)日：2018-02-27
申请号：US14900111
申请日：2014-06-05
申请人： TSINGHUA UNIVERSITY
发明人： Yu Zhu , Leijie Wang , Ming Zhang , Zhao Liu , Rong Cheng , Kaiming Yang , Dengfeng Xu , Weinan Ye , Li Zhang , Yanpo Zhao , Huichao Qin , Li Tian , Jin Zhang , Wensheng Yin , Haihua Mu , Jinchun Hu
IPC分类号： G01B9/02 , G01B11/14
CPC分类号： G01B9/02007 , G01B9/02003 , G01B9/02021 , G01B9/02022 , G01B9/02027 , G01B11/14 , G01B2290/70
摘要： A three-DOF (Degree of Freedom) heterodyne grating interferometer displacement measurement system comprises a dual-frequency laser, a grating interferometer, a measurement grating, receivers and an electronic signal processing component; the grating interferometer comprises a polarizing beam splitter, a reference grating and dioptric elements; the measurement system realizes displacement measurement on the basis of grating diffraction, the optical Doppler Effect and the optical beat frequency principle. Three linear displacements can be output by the system when the grating interferometer and the measurement grating perform a three-DOF linear relative motion. The measurement system can reach sub-nanometer and higher resolution and precision, and can simultaneously measure three linear displacements. The measurement system has the advantages of being environmentally insensitive, high in measurement precision, small in size, light in weight, and is capable of improving the overall performances of an ultra-precision stage of a lithography machine as a position measurement system for this stage.

9. 发明授权

US09310797B2 Single degree of freedom vibration isolating device of linear motor and motion control method thereof 有权
标题翻译：线性电动机的单自由度隔振装置及其运动控制方法
公开(公告)号：US09310797B2
公开(公告)日：2016-04-12
申请号：US14395471
申请日：2013-04-15
申请人： TSINGHUA UNIVERSITY
发明人： Kaiming Yang , Yu Zhu , Dongdong Yu , Rong Cheng , Ming Zhang , Xin Li , Haihua Mu , Jinchun Hu , Dengfeng Xu , Wensheng Yin , Guofeng Ji
IPC分类号： G05B5/01 , G05B11/00 , G05B19/18 , H02P25/06
CPC分类号： G05B19/18 , G05B2219/41117 , H02P25/06
摘要： A single degree of freedom vibration isolating device of a linear motor and a motion control method thereof. The vibration isolating device comprises a balance block, an anti-drifting driving unit, and a control unit. An upper surface of the balance block is connected to a stator of the linear motor, and a lower surface of the balance block is connected to a base. The anti-drifting driving unit is connected to the balance block for controlling the position of the balance block. Provided two motion control methods: inputting a second grating ruler signal to the control unit as feedback to perform variable stiffness and nonlinear control on the balance block; inputting a first and a second grating ruler signal to the control unit as feedback to obtain resultant centroid displacement signals of the rotor and the balance block to perform nonlinear anti-drifting control on the balance block.
摘要翻译：线性电动机的单自由度隔振装置及其运动控制方法。防振装置包括平衡块，防漂移驱动单元和控制单元。平衡块的上表面连接到线性电动机的定子，并且平衡块的下表面连接到基座。防漂移驱动单元连接到用于控制平衡块的位置的平衡块。提供两种运动控制方法：将第二光栅尺信号输入到控制单元作为反馈，以对平衡块执行可变刚度和非线性控制; 将第一和第二光栅标尺信号输入到控制单元作为反馈，以获得转子和平衡块的合成重心位移信号，以对平衡块执行非线性防漂移控制。

10. 发明授权

US09310782B2 Method for measuring displacement of planar motor rotor 有权
标题翻译：平面电机转子位移测量方法
公开(公告)号：US09310782B2
公开(公告)日：2016-04-12
申请号：US14382221
申请日：2013-02-21
申请人： SHANGHAI MICRO ELECTRONICS EQUIPMENT CO., LTD. , TSINGHUA UNIVERSITY
发明人： Yu Zhu , Jinchun Hu , Dengfeng Xu , Yuting Sun , Wensheng Yin , Ming Zhang , Kaiming Yang , Haihua Mu
IPC分类号： G05B1/06 , G05B11/01 , G05B6/02 , G01B7/02 , G01B7/14
CPC分类号： G05B6/02 , G01B7/023 , G01B7/14
摘要： A method for measuring the displacement of a planar motor rotor. The measuring method comprises: four magnetic induction intensity sensors are distributed on the planar motor rotor; sampled signals of the four distributed sensors are processed to obtain signals Bsx, Bcx, Bsy and Bcy and magnetic field reference values Bksx, Bkcx, Bksy and Bkcy; and X-direction displacement and Y-direction displacement can be measured respectively according to inequalities (I) and (II) by judgments, wherein Δx and Δy are X-direction displacement resolution and Y-direction displacement resolution respectively, and BM is the magnetic induction intensity amplitude of the magnetic field of said planar motor. The method provided by the invention is simple in calculation, can avoid calculation of a transcendental function and solve the quadrant judgment problem, is favorable to real-time high-speed operation and has a high engineering value.  B ksx ⁢ B cx - B kcx ⁢ B sx B M 2  ≥ Δ x ( I )  B ksy ⁢ B cy - B kcy ⁢ B sy B M 2  ≥ Δ y ( II )
摘要翻译：一种用于测量平面电动机转子的位移的方法。测量方法包括：四个磁感应强度传感器分布在平面电机转子上; 处理四个分布式传感器的采样信号以获得信号Bsx，Bcx，Bsy和Bcy以及磁场参考值Bksx，Bkcx，Bksy和Bkcy; 并且可以通过判断根据不等式（I）和（II）分别测量X方向位移和Y方向位移，其中＆Dgr; x和＆Dgr; y分别是X方向位移分辨率和Y方向位移分辨率， BM是所述平面电动机的磁场的磁感应强度振幅。本发明提供的方法计算简单，可以避免超验函数的计算，解决象限判断问题，有利于实时高速运行，具有很高的工程价值。 B ksx B cx - B kcx B sx B M 2ß≥＆Dgr; x（I）B ksy B cy-B kcy B sy B M 2ß≥＆Dgr; y（II）

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