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    • 4. 发明申请
    • MEMS DEVICE
    • MEMS器件
    • US20150277106A1
    • 2015-10-01
    • US14636470
    • 2015-03-03
    • TOYOTA JIDOSHA KABUSHIKI KAISHA
    • Takashi OZAKINorikazu OOTANorio FUJITSUKAKazuya ASAOKA
    • G02B26/08B81B7/00
    • G02B26/0841B81B7/008B81B2201/042B81B2203/04B81B2203/058
    • The MEMS device includes MEMS units and a circuit board. Each MEMS unit includes a substrate, a movable part with a movable electrode, a driving electrode, a diagnosis electrode, a plurality of through electrodes, and a plurality of MEMS side electrical contacts. The circuit board includes a plurality of circuit side electrical contacts, a drive circuit that is connected electrically with the driving electrode and the movable electrode through the circuit side electrical contact, the MEMS side electrical contact, and the through electrode, and a diagnosis circuit that is connected electrically with the diagnosis electrode and the movable electrode through the circuit side electrical contact, the MEMS side electrical contact, and the through electrode. The diagnosis electrodes of at least two MEMS units are connected electrically with each other, and are connected to a same MEMS side electrical contact through a same through electrode.
    • MEMS器件包括MEMS单元和电路板。 每个MEMS单元包括基板,具有可移动电极的可移动部分,驱动电极,诊断电极,多个通孔电极和多个MEMS侧电触头。 电路板包括多个电路侧电触点,通过电路侧电触头与MEMS驱动电极和可动电极电连接的驱动电路,MEMS侧电触头和贯通电极,以及诊断电路, 通过电路侧电接触,MEMS侧电接触和通电电极与诊断电极和可动电极电连接。 至少两个MEMS单元的诊断电极彼此电连接,并且通过相同的通过电极连接到相同的MEMS侧电接触。