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1. 发明申请

US20180274101A1 ATOMIC LAYER DEPOSITION APPARATUS AND ATOMIC LAYER DEPOSITION METHOD 审中-公开
公开(公告)号：US20180274101A1
公开(公告)日：2018-09-27
申请号：US15985306
申请日：2018-05-21
申请人： TOPPAN PRINTING CO., LTD.
发明人： Mitsuru KANO
IPC分类号： C23C16/54 , C23C16/455
CPC分类号： C23C16/54 , C23C16/45544 , C23C16/45551 , C23C16/545 , H01L21/02145 , H01L21/02178 , H01L21/02186 , H01L21/02194 , H01L21/02274 , H01L21/0228 , H01L51/0097 , H01L51/5253 , H01L51/56 , H01L2251/303 , H01L2251/5338
摘要： An atomic layer deposition apparatus for forming an atomic layer on a flexible substrate, the apparatus including an unwinding chamber having an unwinding roll for unwinding the flexible substrate, a winding chamber having a winding roll for winding the flexible substrate on which the atomic layer is formed, a plurality of reaction chambers provided between the unwinding chamber and the winding chamber so that the flexible substrate can pass therethrough, a first supply part for storing a gas containing a first precursor, a first supply pipe connected to the first supply part, a second supply part for storing a purge gas, a second supply pipe connected to the second supply part, a third supply part for storing a gas containing a second precursor, a third supply pipe connected to the third supply part, and an exhaust pipe connected to the plurality of reaction chambers.

2. 发明申请

US20180323401A1 LAMINATE AND METHOD OF PRODUCING THE SAME, GAS BARRIER FILM AND METHOD OF PRODUCING THE SAME, AND ORGANIC LIGHT-EMITTING ELEMENT 审中-公开
公开(公告)号：US20180323401A1
公开(公告)日：2018-11-08
申请号：US16019903
申请日：2018-06-27
申请人： TOPPAN PRINTING CO., LTD.
发明人： Jin SATO , Mitsuru KANO , Hiroshi KOYAMA , Kyoko KUROKI
IPC分类号： H01L51/52 , C23C16/02 , C23C16/40 , C23C16/455 , C23C16/56 , H01L51/56
CPC分类号： H01L51/5253 , B32B9/00 , C23C14/08 , C23C16/0272 , C23C16/30 , C23C16/403 , C23C16/455 , C23C16/45525 , C23C16/56 , H01L51/50 , H01L51/56 , H01L2251/301 , H01L2251/558 , H05B33/02 , H05B33/04
摘要： A laminate includes: a substrate having a first surface and made of a high-molecular-weight material; an undercoat layer located on at least part of the first surface of the substrate and containing a first inorganic substance that has adsorption sites to be coupled to precursors serving as film-forming materials of an atomic layer deposition film; a functional layer located covering an outer surface of the undercoat layer and containing a second inorganic substance to be coupled to the adsorption sites of the undercoat layer, the functional layer being the atomic layer deposition film formed of the precursors; and an overcoat layer located covering an outer surface of the functional layer and containing a third inorganic substance.

3. 发明申请

US20140020627A1 ROLL-TO-ROLL THIN FILM COATING MACHINE 审中-公开
标题翻译：滚动式薄膜薄膜涂布机
公开(公告)号：US20140020627A1
公开(公告)日：2014-01-23
申请号：US14034207
申请日：2013-09-23
申请人： TOPPAN PRINTING CO., LTD.
发明人： Mitsuru KANO , Yasuhiro Sasaki
IPC分类号： C23C16/54
摘要： A roll-to-roll thin film coating machine of the invention includes: a first vacuum chamber into which a first precursor gas is introduced; a second vacuum chamber into which a second precursor gas is introduced; a third vacuum chamber into which a purge gas is introduced, the purge gas discharging the first precursors and the second precursors; and a transfer mechanism transferring a windable base member through the first vacuum chamber, the second vacuum chamber, and the third vacuum chamber, the transfer mechanism including a holding unit holding both end portions of the base member in a width direction thereof.
摘要翻译：本发明的卷对卷薄膜包衣机包括：第一真空室，其中引入第一前体气体; 第二真空室，其中引入第二前体气体; 第三真空室，其中引入吹扫气体，所述吹扫气体排出所述第一前体和所述第二前体; 以及传送机构，其通过所述第一真空室，所述第二真空室和所述第三真空室传送可卷绕基材，所述传送机构包括保持所述基部构件的宽度方向的两端部的保持单元。

4. 发明申请

US20160017491A1 LAMINATE, BARRIER FILM AND METHOD FOR MANUFACTURING THESE 有权
标题翻译：层压板，阻挡膜及其制造方法
公开(公告)号：US20160017491A1
公开(公告)日：2016-01-21
申请号：US14866407
申请日：2015-09-25
申请人： Toppan Printing Co., Ltd.
发明人： Hiroshi KOYAMA , Jin SATO , Mitsuru KANO
IPC分类号： C23C16/455 , C23C16/02 , C23C16/40 , C23C16/04
CPC分类号： C23C16/45525 , B32B27/06 , B32B27/308 , B32B2307/7244 , B32B2457/20 , C23C16/0272 , C23C16/04 , C23C16/401 , C23C16/403 , C23C16/405
摘要： A laminate includes: a base material having a top surface; an under coat layer formed on at least a part of the top surface of the base material, having a membranous shape or a film shape and containing an organic polymer having an OH group; and an atomic layer deposition film formed in a membranous shape to cover an exposed surface of the under coat layer, the atomic layer deposition film being formed by a precursor as a material thereof. At least a part of the precursor is coupled to the OH group of the organic polymer.
摘要翻译：层压体包括：具有顶表面的基材; 在所述基材的上表面的至少一部分上形成有膜状或膜状且含有具有OH基的有机聚合物的底涂层; 以及形成为膜状的原子层沉积膜以覆盖底涂层的暴露表面，原子层沉积膜由前体作为其材料形成。至少一部分前体与有机聚合物的OH基团偶联。

5. 发明申请

US20140141255A1 LAMINATE BODY, GAS BARRIER FILM, AND METHOD OF MANUFACTURING THE SAME 有权
标题翻译：层压体，气体阻隔膜及其制造方法
公开(公告)号：US20140141255A1
公开(公告)日：2014-05-22
申请号：US14164867
申请日：2014-01-27
申请人： TOPPAN PRINTING CO., LTD.
发明人： Mitsuru KANO , JIN SATO , TOSHIAKI YOSHIHARA , MASATO KON
IPC分类号： C23C16/40 , C23C16/02
CPC分类号： C23C16/403 , B05D3/007 , B05D3/107 , B05D3/141 , B05D3/145 , B05D3/148 , B32B7/04 , C08K3/01 , C08K3/013 , C09J201/02 , C09J201/025 , C09J201/06 , C09J201/08 , C09J2400/10 , C09J2400/22 , C23C16/02 , C23C16/0227 , C23C16/0245 , C23C16/0272 , C23C16/04 , C23C16/405 , C23C16/44 , C23C16/455 , C23C16/45525 , C23C16/45555 , C23C28/00 , C23C28/042 , Y10T428/25 , Y10T428/251 , Y10T428/258 , Y10T428/259 , Y10T428/31562 , Y10T428/31721 , Y10T428/31757
摘要： A laminate body includes a base material, a film-like or a membrane-like undercoat layer that is formed in at least a portion of the outer surface of the base material, and an atomic layer deposition film that is formed on a surface opposite to a surface coming into contact with the base material among both surfaces of the undercoat layer in the thickness direction thereof. At least a portion of precursors of the atomic layer deposition film bind to the undercoat layer, and the atomic layer deposition film is formed into a membrane shape covering the undercoat layer.
摘要翻译：层压体包括形成在基材的外表面的至少一部分中的基材，膜状或膜状底涂层，以及形成在与基材的相反侧的表面上的原子层沉积膜在底涂层的厚度方向的两面中与基材接触的表面。原子层沉积膜的前体的至少一部分与底涂层结合，原子层沉积膜形成为覆盖底涂层的膜状。

6. 发明申请

US20200370165A1 LAMINATE AND METHOD OF PRODUCING THE SAME, AND GAS BARRIER FILM AND METHOD OF PRODUCING THE SAME 审中-公开
公开(公告)号：US20200370165A1
公开(公告)日：2020-11-26
申请号：US16990364
申请日：2020-08-11
申请人： TOPPAN PRINTING CO.,LTD.
发明人： Hiroshi KOYAMA , Jin SATO , Mitsuru KANO
IPC分类号： C23C14/20 , C23C16/40 , B32B9/00 , C23C28/04 , C23C16/54 , C23C14/00 , C23C16/455 , C23C16/02 , C23C14/08 , C23C14/34
摘要： A laminate that improves barrier properties of an atomic layer deposition film in spite of use of a substrate made of a polymer material, and provides a gas barrier film and a method of producing the same. The laminate includes: a substrate made a polymer material; an undercoat layer disposed on at least part of a surface of the substrate and made up of an inorganic material containing Ta; and an atomic layer deposition film disposed so as to cover a surface of the undercoat layer.

7. 发明申请

US20180002804A1 LAMINATE AND METHOD OF PRODUCING THE SAME, AND GAS BARRIER FILM AND METHOD OF PRODUCING THE SAME 审中-公开
公开(公告)号：US20180002804A1
公开(公告)日：2018-01-04
申请号：US15704228
申请日：2017-09-14
申请人： TOPPAN PRINTING CO., LTD.
发明人： Hiroshi KOYAMA , Jin SATO , Mitsuru KANO
IPC分类号： C23C14/20 , C23C16/455 , C23C16/40
CPC分类号： C23C14/20 , B32B9/00 , C23C14/0036 , C23C14/083 , C23C14/34 , C23C16/0272 , C23C16/40 , C23C16/402 , C23C16/403 , C23C16/405 , C23C16/45525 , C23C16/4554 , C23C16/45555 , C23C16/545 , C23C28/04
摘要： A laminate that improves barrier properties of an atomic layer deposition film in spite of use of a substrate made of a polymer material, and provides a gas barrier film and a method of producing the same. The laminate includes: a substrate made a polymer material; an undercoat layer disposed on at least part of a surface of the substrate and made up of an inorganic material containing Ta; and an atomic layer deposition film disposed so as to cover a surface of the undercoat layer.

8. 发明申请

US20170137941A1 LAMINATE AND METHOD OF MANUFACTURING THE SAME, AND GAS BARRIER FILM AND METHOD OF MANUFACTURING THE SAME 审中-公开
公开(公告)号：US20170137941A1
公开(公告)日：2017-05-18
申请号：US15417510
申请日：2017-01-27
申请人： TOPPAN PRINTING CO., LTD.
发明人： Hiroshi KOYAMA , Mitsuru KANO , Jin SATO
IPC分类号： C23C16/455 , C23C14/10 , C23C14/20 , C23C16/02
CPC分类号： C23C16/45553 , B32B7/10 , B32B9/00 , B32B27/06 , C23C14/10 , C23C14/20 , C23C16/0245 , C23C16/0272 , C23C16/403 , C23C16/45555
摘要： A laminate of the present invention includes: a substrate made of a polymer material; an undercoat layer disposed on at least part of an outer surface of the substrate and made up of an inorganic material containing an inorganic substance having a functional group; and an atomic layer deposition film disposed so as to cover an outer surface of the undercoat layer and containing a precursor which is a deposition raw material such that the precursor located on the outer surface of the undercoat layer and the functional group of the inorganic substance are bound to each other.

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