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1. 发明授权

US11086149B2 Electro-optic device 有权
公开(公告)号：US11086149B2
公开(公告)日：2021-08-10
申请号：US16832784
申请日：2020-03-27
申请人： TDK Corporation , FUJITSU OPTICAL COMPONENTS LIMITED
发明人： Shinji Iwatsuka , Kenji Sasaki , Hiroki Hara , Yasuhiro Ohmori , Masaharu Doi , Shintaro Takeuchi , Yoshihiko Yoshida , Yoshinobu Kubota
IPC分类号： G02F1/035 , G02F1/01 , G02F1/225 , G02B6/12 , G02F1/21
摘要： An electro-optic device is provided with a substrate, an optical waveguide formed of a lithium niobate film with a ridge shape on the substrate, and an electrode that applies an electric field to the optical waveguide. The optical waveguide includes a first waveguide section provided at least in an electric field application region applied with the electric field and having a thickness of 1 μm or larger and a second waveguide section provided in a region other than the electric field application region and having a thickness of 0.3 μm or larger and less than 1 μm.

2. 发明授权

US11226531B2 Optical modulator 有权
公开(公告)号：US11226531B2
公开(公告)日：2022-01-18
申请号：US16641225
申请日：2018-07-31
申请人： TDK Corporation
发明人： Shinji Iwatsuka , Makoto Endo , Kenji Sasaki
IPC分类号： G02F1/225 , G02F1/03 , G02F1/035 , G02F1/21
摘要： An optical modulator includes: first and second optical waveguides formed of an electro-optic material film on a substrate so as to have a ridge shape and to be disposed adjacent to each other; a buffer layer covering at least the upper surfaces of the first and second optical waveguides; and first and second signal electrodes provided above the buffer layer. The first and second signal electrodes have, respectively, first and second lower layer parts opposite, respectively, to the first and second optical waveguides through the buffer layer; and first and second upper layer parts provided, respectively, above the first and second lower layer parts. Widths of the lower surfaces of the first and second lower layer parts are smaller than widths of the first and second upper layer parts.

3. 发明申请

US20200174337A1 OPTICAL MODULATOR 审中-公开
公开(公告)号：US20200174337A1
公开(公告)日：2020-06-04
申请号：US16782387
申请日：2020-02-05
申请人： TDK CORPORATION
发明人： Shinji IWATSUKA , Kenji Sasaki
IPC分类号： G02F1/225 , G02F1/035
摘要： An object of the present invention is to provide a single drive type optical modulator having good high-frequency characteristics and reduced wavelength chirp of the modulated light. An optical modulator 100 is provided with a Mach-Zehnder optical waveguide 10 including first and second optical waveguides 10a, 10b, a buffer layer 4 covering the first and second optical waveguides 10a, 10b, and an electrode layer 6 including first and second ground electrodes 8, 9 and a signal electrode 7 positioned between the first and second ground electrodes 8, 9 in a plan view, the signal electrode 7 has a first lower surface S11 covering the first optical waveguide 10a through the buffer layer 4, the first ground electrode 8 has a first lower surface S21 covering the second optical waveguide 10b through the buffer layer 4 and a second lower surface S22 positioned above the first lower surface S21, and a gap G3 between the signal electrode 7 and the second ground electrode 9 is larger than a gap G2 between the signal electrode 7 and the first ground electrode 8.

4. 发明授权

US10359684B2 Optical waveguide element and optical modulator using the same 有权
公开(公告)号：US10359684B2
公开(公告)日：2019-07-23
申请号：US16185337
申请日：2018-11-09
申请人： TDK Corporation
发明人： Shinji Iwatsuka , Kenji Sasaki , Satoshi Shirai
IPC分类号： G02B6/28 , G02F1/21 , G02B6/122 , G02B6/126 , G02B6/293 , G02F1/225
摘要： Disclosed herein is an optical waveguide element that includes a substrate and a waveguide layer formed on the substrate and comprising lithium niobate. The waveguide layer has a slab part having a predetermined thickness and a ridge part protruding from the slab part. The maximum thickness of the slab part is 0.05 times or more and less than 0.4 times a wavelength of a light propagating in the ridge part.

5. 发明申请

US20190079366A1 OPTICAL WAVEGUIDE ELEMENT AND OPTICAL MODULATOR USING THE SAME 审中-公开
公开(公告)号：US20190079366A1
公开(公告)日：2019-03-14
申请号：US16185337
申请日：2018-11-09
申请人： TDK Corporation
发明人： Shinji IWATSUKA , Kenji Sasaki , Satoshi Shirai
IPC分类号： G02F1/225 , G02B6/126 , G02B6/122 , G02B6/293 , G02F1/21 , G02B6/28
CPC分类号： G02F1/2257 , G02B6/122 , G02B6/126 , G02B6/2813 , G02B6/29352 , G02F2001/212 , G02F2202/20 , G02F2203/07
摘要： Disclosed herein is an optical waveguide element that includes a substrate and a waveguide layer formed on the substrate and comprising lithium niobate. The waveguide layer has a slab part having a predetermined thickness and a ridge part protruding from the slab part. The maximum thickness of the slab part is 0.05 times or more and less than 0.4 times a wavelength of a light propagating in the ridge part.

6. 发明授权

US09939709B2 Optical waveguide element and optical modulator using the same 有权
公开(公告)号：US09939709B2
公开(公告)日：2018-04-10
申请号：US15236633
申请日：2016-08-15
申请人： TDK Corporation
发明人： Shinji Iwatsuka , Kenji Sasaki , Satoshi Shirai
IPC分类号： G02F1/225 , G02B6/28 , G02B6/122 , G02B6/126 , G02F1/21 , G02B6/293
CPC分类号： G02F1/2257 , G02B6/122 , G02B6/126 , G02B6/2813 , G02B6/29352 , G02F2001/212 , G02F2202/20 , G02F2203/07
摘要： Disclosed herein is an optical waveguide element that includes a substrate and a waveguide layer formed on the substrate and comprising lithium niobate. The waveguide layer has a slab part having a predetermined thickness and a ridge part protruding from the slab part. The maximum thickness of the slab part is 0.05 times or more and less than 0.4 times a wavelength of a light propagating in the ridge part.

7. 发明授权

US10649246B2 Dielectric thin film-applied substrate and optical modulation element using the same 有权
公开(公告)号：US10649246B2
公开(公告)日：2020-05-12
申请号：US16318058
申请日：2017-07-14
申请人： TDK CORPORATION
发明人： Kenji Sasaki , Shinji Iwatsuka
IPC分类号： G02F1/035 , G02B6/12 , G02F1/03 , G02F1/225 , G02B5/30 , G02B6/122
摘要： A dielectric thin film-applied substrate that suppresses occurrence of cracks when the film thickness of the lithium niobate film is equal to or larger than 1 μm. The dielectric thin film-applied substrate includes a single crystal substrate and a dielectric thin film made of c-axis oriented lithium niobate epitaxially formed on a main surface of the single crystal substrate. The dielectric thin film has a twin crystal structure including first and second crystals 180° apart, centered on the c-axis. In pole figure measurement by X-ray diffraction, the ratio between a first diffraction intensity corresponding to the first crystal and a second diffraction intensity corresponding to the second crystal is equal to or higher than 0.5 and equal to or lower than 2.0, which alleviates distortions accumulated inside the lithium niobate film and supresses occurrences of cracks accompanying increases in the film thickness.

8. 发明申请

US20180188629A1 OPTICAL WAVEGUIDE ELEMENT AND OPTICAL MODULATOR USING THE SAME 审中-公开
公开(公告)号：US20180188629A1
公开(公告)日：2018-07-05
申请号：US15906280
申请日：2018-02-27
申请人： TDK Corporation
发明人： Shinji Iwatsuka , Kenji Sasaki , Satoshi Shirai
IPC分类号： G02F1/225 , G02B6/126 , G02B6/122 , G02F1/21 , G02B6/28 , G02B6/293
CPC分类号： G02F1/2257 , G02B6/122 , G02B6/126 , G02B6/2813 , G02B6/29352 , G02F2001/212 , G02F2202/20 , G02F2203/07
摘要： Disclosed herein is an optical waveguide element that includes a substrate and a waveguide layer formed on the substrate and comprising lithium niobate. The waveguide layer has a slab part having a predetermined thickness and a ridge part protruding from the slab part. The maximum thickness of the slab part is 0.05 times or more and less than 0.4 times a wavelength of a light propagating in the ridge part.

9. 发明授权

US10203583B2 Optical waveguide element and optical modulator using the same 有权
公开(公告)号：US10203583B2
公开(公告)日：2019-02-12
申请号：US15906280
申请日：2018-02-27
申请人： TDK Corporation
发明人： Shinji Iwatsuka , Kenji Sasaki , Satoshi Shirai
IPC分类号： G02F1/225 , G02B6/126 , G02B6/122 , G02B6/28 , G02F1/21 , G02B6/293
摘要： Disclosed herein is an optical waveguide element that includes a substrate and a waveguide layer formed on the substrate and comprising lithium niobate. The waveguide layer has a slab part having a predetermined thickness and a ridge part protruding from the slab part. The maximum thickness of the slab part is 0.05 times or more and less than 0.4 times a wavelength of a light propagating in the ridge part.

10. 发明授权

US10955722B2 Optical modulator 有权
公开(公告)号：US10955722B2
公开(公告)日：2021-03-23
申请号：US16782387
申请日：2020-02-05
申请人： TDK CORPORATION
发明人： Shinji Iwatsuka , Kenji Sasaki
IPC分类号： G02F1/035 , G02F1/225 , G02F1/21
摘要： An object of the present invention is to provide a single drive type optical modulator having good high-frequency characteristics and reduced wavelength chirp of the modulated light. An optical modulator 100 is provided with a Mach-Zehnder optical waveguide 10 including first and second optical waveguides 10a, 10b, a buffer layer 4 covering the first and second optical waveguides 10a, 10b, and an electrode layer 6 including first and second ground electrodes 8, 9 and a signal electrode 7 positioned between the first and second ground electrodes 8, 9 in a plan view, the signal electrode 7 has a first lower surface S11 covering the first optical waveguide 10a through the buffer layer 4, the first ground electrode 8 has a first lower surface S21 covering the second optical waveguide 10b through the buffer layer 4 and a second lower surface S22 positioned above the first lower surface S21, and a gap G3 between the signal electrode 7 and the second ground electrode 9 is larger than a gap G2 between the signal electrode 7 and the first ground electrode 8.

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