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    • 1. 发明授权
    • Micromechanical device and method of manufacturing micromechanical device
    • 微机械装置及其制造方法
    • US07972884B2
    • 2011-07-05
    • US12399348
    • 2009-03-06
    • Susumu ObataMichinobu InoueTakeshi Miyagi
    • Susumu ObataMichinobu InoueTakeshi Miyagi
    • H01L21/00
    • B81B3/0078B81B2201/016B81B2203/0109H01H1/50H01H3/60H01H59/0009Y10T29/49002
    • An example of the present invention is a micromechanical device including, a substrate in which a signal line is provided, a micromachine which is mounted on the substrate, is formed of a conductive material into a beam-like shape, is elastically deformed by a function of an electric field in such a manner that the beam-like part moves closer to or apart from the signal line, and changes the electric characteristics concomitantly with the deformation, a deformation restraint section constituted of a material having a higher viscosity coefficient than the conductive material, provided on the opposite side of the micromachine to the signal line, for restraining deformation of the micromachine in a direction in which the micromachine is separated from the signal line, and a sealing body provided on the principal surface of the substrate, for covering the micromachine with a hollow section located therebetween.
    • 本发明的一个实例是一种微机械装置,其特征在于,包括:设置有信号线的基板,安装在基板上的微机械,由导电材料形成为梁状,通过功能弹性变形 电场的方式使得束状部分靠近信号线或离开信号线移动,并且随着变形而改变电特性,变形抑制部分由具有比导电性更高的粘度系数的材料构成 材料,其设置在所述微机械相对于所述信号线的相反侧,用于限制所述微机械从所述微机械与所述信号线分离的方向上的变形;以及设置在所述基板主表面上的密封体, 具有位于其间的中空部分的微机械。
    • 3. 发明申请
    • MICROMECHANICAL DEVICE AND METHOD OF MANUFACTURING MICROMECHANICAL DEVICE
    • 微生物装置及制造微生物装置的方法
    • US20090236114A1
    • 2009-09-24
    • US12399348
    • 2009-03-06
    • Susumu ObataMichinobu InoueTakeshi Miyagi
    • Susumu ObataMichinobu InoueTakeshi Miyagi
    • H05K5/06H05K7/02
    • B81B3/0078B81B2201/016B81B2203/0109H01H1/50H01H3/60H01H59/0009Y10T29/49002
    • An example of the present invention is a micromechanical device including, a substrate in which a signal line is provided, a micromachine which is mounted on the substrate, is formed of a conductive material into a beam-like shape, is elastically deformed by a function of an electric field in such a manner that the beam-like part moves closer to or apart from the signal line, and changes the electric characteristics concomitantly with the deformation, a deformation restraint section constituted of a material having a higher viscosity coefficient than the conductive material, provided on the opposite side of the micromachine to the signal line, for restraining deformation of the micromachine in a direction in which the micromachine is separated from the signal line, and a sealing body provided on the principal surface of the substrate, for covering the micromachine with a hollow section located therebetween.
    • 本发明的一个实例是一种微机械装置,其特征在于,包括:设置有信号线的基板,安装在基板上的微机械,由导电材料形成为梁状,通过功能弹性变形 电场的方式使得束状部分靠近信号线或离开信号线移动,并且随着变形而改变电特性,变形抑制部分由具有比导电性更高的粘度系数的材料构成 材料,其设置在所述微机械相对于所述信号线的相反侧,用于限制所述微机械从所述微机械与所述信号线分离的方向上的变形;以及设置在所述基板主表面上的密封体, 具有位于其间的中空部分的微机械。
    • 5. 发明授权
    • Micromechanical device and method of manufacturing micromechanical device
    • 微机械装置及其制造方法
    • US08004053B2
    • 2011-08-23
    • US12255144
    • 2008-10-21
    • Takeshi MiyagiMichinobu InoueSusumu ObataYoshiaki Sugizaki
    • Takeshi MiyagiMichinobu InoueSusumu ObataYoshiaki Sugizaki
    • H01L29/84
    • B81C1/00293B81B3/0078B81C2203/0136B81C2203/0145H03H9/1057Y10T29/49002
    • A micromechanical device according to an aspect of the present invention includes, a substrate, a micromachine which is mounted on the substrate, is provided with a mechanism deformed by a function of an electric field, and changes the electrical characteristics concomitantly with the deformation, an inner inorganic sealing film which contains an inorganic material, is provided on a principal surface of the substrate, covers the micromachine through a hollow section containing a gaseous body therein, and is provided with opening shape sections allowing the hollow section to communicate with the outside, an organic sealing film which contains an organic material, is formed on the inner inorganic sealing film, and blocks up the opening shape sections, and an outer inorganic sealing film which contains an inorganic material with lower moisture permeability than the organic material, is formed on the organic sealing film, and covers the organic sealing film.
    • 根据本发明的一个方面的微机械装置包括:基板,安装在基板上的微型机械,具有通过电场的功能变形的机构,并且随着变形而改变电特性, 含有无机材料的内无机密封膜设置在基板的主表面上,通过包含气体的中空部分覆盖微机械,并且设置有允许中空部分与外部连通的开口形状部分, 在内无机密封膜上形成含有有机材料的有机密封膜,并且封闭开口形状部分,并且形成包含具有比有机材料低的透湿性的无机材料的外部无机密封膜, 有机密封膜,并覆盖有机密封膜。