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1. 发明申请

US20080183321A1 METHODS, SYSTEMS, AND COMPUTER PROGRAM PRODUCTS FOR PRODUCT RANDOMIZATION AND ANALYSIS IN A MANUFACTURING ENVIRONMENT 有权
标题翻译：制造环境中产品随机化和分析的方法，系统和计算机程序产品
公开(公告)号：US20080183321A1
公开(公告)日：2008-07-31
申请号：US11668731
申请日：2007-01-30
申请人： Susan M. Cianfrani , Christopher W. Long , Brad J. Rawlins , James Rice , Yunsheng Song
发明人： Susan M. Cianfrani , Christopher W. Long , Brad J. Rawlins , James Rice , Yunsheng Song
IPC分类号： G06F19/00
CPC分类号： G05B19/41875 , G05B2219/32097 , G05B2219/32225 , G05B2219/45031 , G06Q10/063 , Y02P90/10 , Y02P90/20 , Y02P90/22
摘要： Methods, systems, and computer program products for implementing product randomization and analysis in a manufacturing environment are provided. A method includes processing products for a plurality of lots, at process equipment, using a randomization technique for selecting each product in the lots. The method further including generating an operation identification record for each operation in the process recipe that includes mapping, for each operation, a slot identifier associated with a randomly selected product to a process variable identifier, a process tool, and the operation. The method also includes defining slot groupings using slot identifiers for a product carrier and identifying product yield patterns by analyzing historical yields for each of the slot groupings. The method also includes determining the frequency of occurrence of one or more product yield patterns for each operation in the process recipe by analyzing product yields from the operation identification records corresponding to the plurality of lots.
摘要翻译：提供了在制造环境中实施产品随机化和分析的方法，系统和计算机程序产品。一种方法包括使用用于选择批次中的每个产品的随机化技术在处理设备处处理多个批次的产品。所述方法还包括为所述过程配方中的每个操作生成操作识别记录，所述操作识别记录包括对于每个操作，将与随机选择的产品相关联的时隙标识符映射到过程变量标识符，处理工具和操作。该方法还包括使用产品载体的时隙标识符来定义时隙分组，并通过分析每个时隙分组的历史收益率来识别产品产量模式。该方法还包括通过从与多个批次相对应的操作识别记录中分析产品产量来确定处理配方中的每个操作的一个或多个产品收益模式的发生频率。

2. 发明授权

US08015040B2 Methods, systems, and computer program products for product randomization and analysis in a manufacturing environment 有权
标题翻译：用于制造环境中产品随机化和分析的方法，系统和计算机程序产品
公开(公告)号：US08015040B2
公开(公告)日：2011-09-06
申请号：US11668731
申请日：2007-01-30
申请人： Susan M. Cianfrani , Christopher W. Long , Brad J. Rawlins , James Rice , Yunsheng Song
发明人： Susan M. Cianfrani , Christopher W. Long , Brad J. Rawlins , James Rice , Yunsheng Song
IPC分类号： G06F17/30
CPC分类号： G05B19/41875 , G05B2219/32097 , G05B2219/32225 , G05B2219/45031 , G06Q10/063 , Y02P90/10 , Y02P90/20 , Y02P90/22
摘要： Methods, systems, and computer program products for implementing product randomization and analysis in a manufacturing environment are provided. A method includes processing products for a plurality of lots, at process equipment, using a randomization technique for selecting each product in the lots. The method further including generating an operation identification record for each operation in the process recipe that includes mapping, for each operation, a slot identifier associated with a randomly selected product to a process variable identifier, a process tool, and the operation. The method also includes defining slot groupings using slot identifiers for a product carrier and identifying product yield patterns by analyzing historical yields for each of the slot groupings. The method also includes determining the frequency of occurrence of one or more product yield patterns for each operation in the process recipe by analyzing product yields from the operation identification records corresponding to the plurality of lots.
摘要翻译：提供了在制造环境中实施产品随机化和分析的方法，系统和计算机程序产品。一种方法包括使用用于选择批次中的每个产品的随机化技术在处理设备处处理多个批次的产品。所述方法还包括为所述过程配方中的每个操作生成操作识别记录，所述操作识别记录包括对于每个操作，将与随机选择的产品相关联的时隙标识符映射到过程变量标识符，处理工具和操作。该方法还包括使用产品载体的时隙标识符来定义时隙分组，并通过分析每个时隙分组的历史收益率来识别产品产量模式。该方法还包括通过从与多个批次相对应的操作识别记录中分析产品产量来确定处理配方中的每个操作的一个或多个产品收益模式的发生频率。

3. 发明申请

US20070179651A1 AUTOMATED TOOL RECIPE VERIFICATION AND CORRECTION 有权
标题翻译：自动化工具验证和校正
公开(公告)号：US20070179651A1
公开(公告)日：2007-08-02
申请号：US11307293
申请日：2006-01-31
申请人： Timothy L. Holmes , Susan M. Cianfrani , Roger M. Young
发明人： Timothy L. Holmes , Susan M. Cianfrani , Roger M. Young
IPC分类号： G06F19/00
CPC分类号： G05B19/41875 , G05B2219/31422 , G05B2219/31443 , G05B2219/32182 , G05B2219/45031 , Y02P90/20 , Y02P90/22
摘要： Automated tool recipe verification and correction are disclosed. A tool recipe is intercepted during uploading or downloading of the tool recipe. A determination whether an associated parameter verification set (PVS) template for the tool recipe exists is performed, and if it exists, a determination whether to verify the tool recipe is performed. Each parameters of the tool recipe having an auditable corresponding parameter is compared to the auditable corresponding parameter of the associated PVS template. Where no non-matching parameter sets exist, the tool recipe is verified; otherwise, a determination as to whether of all of the non-matching parameter sets are indicated as modifiable in the associated PVS template is made. If all of the parameters of the non-matching parameter sets are modifiable, then they are modified to match the respective auditable corresponding parameter and the tool recipe is verified, otherwise, the verification is inhibited.
摘要翻译：公开了自动化的工具配方验证和校正。工具配方在上传或下载工具配方时被截取。确定是否存在用于工具配方的相关联的参数验证集（PVS）模板，并且如果存在，则执行是否验证工具配方的确定。具有可审计对应参数的工具配方的每个参数与相关PVS模板的可审计相应参数进行比较。在不存在非匹配参数集的情况下，对工具配方进行验证; 否则，做出关于所有不匹配参数集是否在相关联的PVS模板中被指示为可修改的确定。如果非匹配参数集的所有参数均可修改，则修改它们以匹配相应的可审计对应参数，并且验证工具配方，否则禁止验证。

4. 发明授权

US07248936B1 Automated tool recipe verification and correction 有权
标题翻译：自动化工具配方验证和校正
公开(公告)号：US07248936B1
公开(公告)日：2007-07-24
申请号：US11307293
申请日：2006-01-31
申请人： Timothy L. Holmes , Susan M. Cianfrani , Roger M. Young
发明人： Timothy L. Holmes , Susan M. Cianfrani , Roger M. Young
IPC分类号： G06F19/00
CPC分类号： G05B19/41875 , G05B2219/31422 , G05B2219/31443 , G05B2219/32182 , G05B2219/45031 , Y02P90/20 , Y02P90/22
摘要： Automated tool recipe verification and correction are disclosed. A tool recipe is intercepted during uploading or downloading of the tool recipe. A determination whether an associated parameter verification set (PVS) template for the tool recipe exists is performed, and if it exists, a determination whether to verify the tool recipe is performed. Each parameters of the tool recipe having an auditable corresponding parameter is compared to the auditable corresponding parameter of the associated PVS template. Where no non-matching parameter sets exist, the tool recipe is verified; otherwise, a determination as to whether of all of the non-matching parameter sets are indicated as modifiable in the associated PVS template is made. If all of the parameters of the non-matching parameter sets are modifiable, then they are modified to match the respective auditable corresponding parameter and the tool recipe is verified, otherwise, the verification is inhibited.
摘要翻译：公开了自动化的工具配方验证和校正。工具配方在上传或下载工具配方时被截取。确定是否存在用于工具配方的相关联的参数验证集（PVS）模板，并且如果存在，则执行是否验证工具配方的确定。具有可审计对应参数的工具配方的每个参数与相关PVS模板的可审计相应参数进行比较。在不存在非匹配参数集的情况下，对工具配方进行验证; 否则，做出关于所有不匹配参数集是否在相关联的PVS模板中被指示为可修改的确定。如果非匹配参数集的所有参数均可修改，则修改它们以匹配相应的可审计对应参数，并且验证工具配方，否则禁止验证。

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