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1. 发明申请

US20130320411A1 BORDERLESS CONTACTS FOR METAL GATES THROUGH SELECTIVE CAP DEPOSITION 审中-公开
公开(公告)号：US20130320411A1
公开(公告)日：2013-12-05
申请号：US13488581
申请日：2012-06-05
申请人： Su-Chen Fan , Balasubramanian S. Haran , David V. Horak , Shom Ponoth , Chih-Chao Yang
发明人： Su-Chen Fan , Balasubramanian S. Haran , David V. Horak , Shom Ponoth , Chih-Chao Yang
IPC分类号： H01L21/336 , H01L29/78
CPC分类号： H01L29/78 , H01L21/28247 , H01L21/76834 , H01L21/76897 , H01L29/66545
摘要： A semiconductor device including a gate structure present on a channel portion of a substrate, in which the gate structure includes at least one high-k gate dielectric layer and at least one metal gate conductor. A source region and a drain region is present on opposing sides of the channel portion of the substrate. A metal oxide gate cap is present on an upper surface of the metal gate conductor. The metal oxide composition of the metal oxide gate cap may be zirconium oxide, aluminum oxide, magnesium oxide, hafnium oxide or a combination thereof. Contacts may extend through an intralevel dielectric layer into contact with at least one of the source region and the drain region.

2. 发明授权

US08629008B2 Electrical isolation structures for ultra-thin semiconductor-on-insulator devices 有权
标题翻译：用于超薄绝缘体上半导体器件的电气隔离结构
公开(公告)号：US08629008B2
公开(公告)日：2014-01-14
申请号：US13348018
申请日：2012-01-11
申请人： Balasubramanian S. Haran , David V. Horak , Charles W. Koburger, III , Shom Ponoth
发明人： Balasubramanian S. Haran , David V. Horak , Charles W. Koburger, III , Shom Ponoth
IPC分类号： H01L21/02
CPC分类号： H01L29/0653 , H01L21/76283 , H01L21/84 , H01L27/1203 , H01L29/66772 , H01L29/78603 , H01L29/78654
摘要： After formation of raised source and drain regions, a conformal dielectric material liner is deposited within recessed regions formed by removal of shallow trench isolation structures and underlying portions of a buried insulator layer in a semiconductor-on-insulator (SOI) substrate. A dielectric material that is different from the material of the conformal dielectric material liner is subsequently deposited and planarized to form a planarized dielectric material layer. The planarized dielectric material layer is recessed selective to the conformal dielectric material liner to form dielectric fill portions that fill the recessed regions. Horizontal portions of the conformal dielectric material liner are removed by an anisotropic etch, while remaining portions of the conformal dielectric material liner form an outer gate spacer. At least one contact-level dielectric layer is deposited. Contact via structures electrically isolated from a handle substrate can be formed within the contact via holes.
摘要翻译：在形成升高的源极和漏极区域之后，通过去除绝缘体上半导体（SOI）衬底中的浅沟槽隔离结构和掩埋绝缘体层的下面部分而形成的凹陷区域内淀积保形电介质材料衬垫。随后沉积并平面化与保形介质材料衬垫的材料不同的介电材料，以形成平坦化的介电材料层。平坦化的介电材料层对保形介电材料衬垫有选择性的凹陷，以形成填充凹陷区域的介电填充部分。通过各向异性蚀刻去除保形电介质材料衬里的水平部分，而保形介质材料衬垫的剩余部分形成外栅间隔件。沉积至少一个接触电介质层。可以在接触通孔内形成与手柄基板电隔离的结构的接触。

3. 发明申请

US20130175622A1 ELECTRICAL ISOLATION STRUCTURES FOR ULTRA-THIN SEMICONDUCTOR-ON-INSULATOR DEVICES 有权
标题翻译：用于超薄半导体绝缘体器件的电气隔离结构
公开(公告)号：US20130175622A1
公开(公告)日：2013-07-11
申请号：US13348018
申请日：2012-01-11
申请人： Balasubramanian S. Haran , David V. Horak , Charles W. Koburger, III , Shom Ponoth
发明人： Balasubramanian S. Haran , David V. Horak , Charles W. Koburger, III , Shom Ponoth
IPC分类号： H01L29/78 , H01L21/336
CPC分类号： H01L29/0653 , H01L21/76283 , H01L21/84 , H01L27/1203 , H01L29/66772 , H01L29/78603 , H01L29/78654
摘要： After formation of raised source and drain regions, a conformal dielectric material liner is deposited within recessed regions formed by removal of shallow trench isolation structures and underlying portions of a buried insulator layer in a semiconductor-on-insulator (SOI) substrate. A dielectric material that is different from the material of the conformal dielectric material liner is subsequently deposited and planarized to form a planarized dielectric material layer. The planarized dielectric material layer is recessed selective to the conformal dielectric material liner to form dielectric fill portions that fill the recessed regions. Horizontal portions of the conformal dielectric material liner are removed by an anisotropic etch, while remaining portions of the conformal dielectric material liner form an outer gate spacer. At least one contact-level dielectric layer is deposited. Contact via structures electrically isolated from a handle substrate can be formed within the contact via holes.
摘要翻译：在形成升高的源极和漏极区域之后，通过去除绝缘体上半导体（SOI）衬底中的浅沟槽隔离结构和掩埋绝缘体层的下面部分而形成的凹陷区域内淀积保形电介质材料衬垫。随后沉积并平面化与保形介质材料衬垫的材料不同的介电材料，以形成平坦化的介电材料层。平坦化的介电材料层对保形介电材料衬垫有选择性的凹陷，以形成填充凹陷区域的介电填充部分。通过各向异性蚀刻去除保形电介质材料衬里的水平部分，而保形介质材料衬垫的剩余部分形成外栅间隔件。沉积至少一个接触电介质层。可以在接触通孔内形成与手柄基板电隔离的结构的接触。

4. 发明授权

US08383490B2 Borderless contact for ultra-thin body devices 有权
公开(公告)号：US08383490B2
公开(公告)日：2013-02-26
申请号：US13191540
申请日：2011-07-27
申请人： Su Chen Fan , Balasubramanian S. Haran , David V. Horak
发明人： Su Chen Fan , Balasubramanian S. Haran , David V. Horak
IPC分类号： H01L21/76
CPC分类号： H01L29/0653 , H01L21/76283 , H01L21/76832 , H01L21/76834 , H01L21/76897 , H01L21/84 , H01L27/1203 , H01L29/41783 , H01L29/665 , H01L29/66628 , H01L29/7841 , H01L29/7843 , H01L29/78609
摘要： After formation of a semiconductor device on a semiconductor-on-insulator (SOI) layer, a first dielectric layer is formed over a recessed top surface of a shallow trench isolation structure. A second dielectric layer that can be etched selective to the first dielectric layer is deposited over the first dielectric layer. A contact via hole for a device component located in or on a top semiconductor layer is formed by an etch. During the etch, the second dielectric layer is removed selective to the first dielectric layer, thereby limiting overetch into the first dielectric layer. Due to the etch selectivity, a sufficient amount of the first dielectric layer is present between the bottom of the contact via hole and a bottom semiconductor layer, thus providing electrical isolation for the ETSOI device from the bottom semiconductor layer.

5. 发明申请

US20130026570A1 BORDERLESS CONTACT FOR ULTRA-THIN BODY DEVICES 有权
公开(公告)号：US20130026570A1
公开(公告)日：2013-01-31
申请号：US13191540
申请日：2011-07-27
申请人： Su Chen Fan , Balasubramanian S. Haran , David V. Horak
发明人： Su Chen Fan , Balasubramanian S. Haran , David V. Horak
IPC分类号： H01L29/772 , H01L23/48 , H01L21/28
CPC分类号： H01L29/0653 , H01L21/76283 , H01L21/76832 , H01L21/76834 , H01L21/76897 , H01L21/84 , H01L27/1203 , H01L29/41783 , H01L29/665 , H01L29/66628 , H01L29/7841 , H01L29/7843 , H01L29/78609
摘要： After formation of a semiconductor device on a semiconductor-on-insulator (SOI) layer, a first dielectric layer is formed over a recessed top surface of a shallow trench isolation structure. A second dielectric layer that can be etched selective to the first dielectric layer is deposited over the first dielectric layer. A contact via hole for a device component located in or on a top semiconductor layer is formed by an etch. During the etch, the second dielectric layer is removed selective to the first dielectric layer, thereby limiting overetch into the first dielectric layer. Due to the etch selectivity, a sufficient amount of the first dielectric layer is present between the bottom of the contact via hole and a bottom semiconductor layer, thus providing electrical isolation for the ETSOI device from the bottom semiconductor layer.

6. 发明申请

US20140061930A1 OVERLAY-TOLERANT VIA MASK AND REACTIVE ION ETCH (RIE) TECHNIQUE 有权
标题翻译：通过掩蔽和反应离子蚀刻（RIE）技术的超耐性
公开(公告)号：US20140061930A1
公开(公告)日：2014-03-06
申请号：US13604660
申请日：2012-09-06
申请人： Steven J. Holmes , David V. Horak , Charles W. Koburger, III , Shom Ponoth , Chih-Chao Yang
发明人： Steven J. Holmes , David V. Horak , Charles W. Koburger, III , Shom Ponoth , Chih-Chao Yang
IPC分类号： H01L23/48 , H01L21/768
CPC分类号： H01L23/528 , H01L21/31144 , H01L21/76807 , H01L21/76816 , H01L21/76831 , H01L23/5226 , H01L2924/0002 , H01L2924/0001 , H01L2924/00
摘要： A method is provided that includes first etching a substrate according to a first mask. The first etching forms a first etch feature in the substrate to a first depth. The first etching also forms a sliver opening in the substrate. The sliver opening may then be filled with a fill material. A second mask may be formed by removing a portion of the first mask. The substrate exposed by the second mask may be etched with a second etch, in which the second etching is selective to the fill material. The second etching extends the first etch feature to a second depth that is greater than the first depth, and the second etch forms a second etch feature. The first etch feature and the second etch feature may then be filled with a conductive metal.
摘要翻译：提供了一种方法，其包括首先根据第一掩模蚀刻衬底。第一蚀刻在衬底中形成第一深度的第一蚀刻特征。第一蚀刻还在衬底中形成条条开口。然后可以用填充材料填充条子开口。可以通过去除第一掩模的一部分来形成第二掩模。可以用第二蚀刻蚀刻由第二掩模曝光的衬底，其中第二蚀刻对填充材料是选择性的。第二蚀刻将第一蚀刻特征延伸到大于第一深度的第二深度，并且第二蚀刻形成第二蚀刻特征。然后可以用导电金属填充第一蚀刻特征和第二蚀刻特征。

7. 发明授权

US08609534B2 Electrical fuse structure and method of fabricating same 有权
标题翻译：电熔丝结构及其制造方法
公开(公告)号：US08609534B2
公开(公告)日：2013-12-17
申请号：US12890941
申请日：2010-09-27
申请人： Chih-Chao Yang , David V. Horak , Charles W. Koburger, III , Shom Ponoth
发明人： Chih-Chao Yang , David V. Horak , Charles W. Koburger, III , Shom Ponoth
IPC分类号： H01L21/4763
CPC分类号： H01L23/5256 , H01L21/76805 , H01L21/76807 , H01L21/76831 , H01L23/5226 , H01L2924/0002 , H01L2924/00
摘要： A high programming efficiency electrical fuse is provided utilizing a dual damascene structure located atop a metal layer. The dual damascene structure includes a patterned dielectric material having a line opening located above and connected to an underlying via opening. The via opening is located atop and is connected to the metal layer. The dual damascene structure also includes a conductive feature within the line opening and the via opening. Dielectric spacers are also present within the line opening and the via opening. The dielectric spacers are present on vertical sidewalls of the patterned dielectric material and separate the conductive feature from the patterned dielectric material. The presence of the dielectric spacers within the line opening and the via opening reduces the area in which the conductive feature is formed. As such, a high programming efficiency electrical fuse is provided in which space is saved.
摘要翻译：使用位于金属层顶部的双镶嵌结构来提供高编程效率电熔丝。双镶嵌结构包括图案化电介质材料，其具有位于下面的通孔开口上方并连接到下面的通孔开口的线路开口。通孔开口位于顶部并连接到金属层。双镶嵌结构还包括线路开口和通孔开口内的导电特征。电介质间隔物也存在于线路开口和通孔开口内。介电间隔物存在于图案化电介质材料的垂直侧壁上，并将导电特征与图案化电介质材料分开。在线路开口和通孔开口内的电介质间隔物的存在减少了形成导电特征的区域。因此，提供了节省空间的高编程效率电熔丝。

8. 发明申请

US20130328208A1 DUAL DAMASCENE DUAL ALIGNMENT INTERCONNECT SCHEME 有权
标题翻译：双重对等双向对联方案
公开(公告)号：US20130328208A1
公开(公告)日：2013-12-12
申请号：US13490542
申请日：2012-06-07
申请人： Steven J. Holmes , David V. Horak , Charles W. Koburger, III , Shom Ponoth , Chih-Chao Yang
发明人： Steven J. Holmes , David V. Horak , Charles W. Koburger, III , Shom Ponoth , Chih-Chao Yang
IPC分类号： H01L23/48 , H01L21/28
CPC分类号： H01L21/76897 , H01L21/76807 , H01L21/76808 , H01L21/76811 , H01L21/76819 , H01L21/76831 , H01L21/76832 , H01L21/76834 , H01L21/76883 , H01L23/5226 , H01L2924/0002 , H01L2924/00
摘要： A stack of a first metal line and a first dielectric cap material portion is formed within a line trench of first dielectric material layer. A second dielectric material layer is formed thereafter. A line trench extending between the top surface and the bottom surface of the second dielectric material layer is patterned. A photoresist layer is applied over the second dielectric material layer and patterned with a via pattern. An underlying portion of the first dielectric cap material is removed by an etch selective to the dielectric materials of the first and second dielectric material layer to form a via cavity that is laterally confined along the widthwise direction of the line trench and along the widthwise direction of the first metal line. A dual damascene line and via structure is formed, which includes a via structure that is laterally confined along two independent horizontal directions.
摘要翻译：在第一介电材料层的线沟槽内形成第一金属线和第一介电帽材料部分的堆叠。之后形成第二电介质材料层。在第二介电材料层的顶表面和底表面之间延伸的线沟槽被图案化。将光致抗蚀剂层施加在第二介电材料层上并用通孔图案构图。通过对第一和第二介电材料层的介电材料的选择性蚀刻来去除第一电介质盖材料的下部，以形成沿着线沟槽的宽度方向横向限制并沿着宽度方向的第一条金属线。形成双镶嵌线和通孔结构，其包括沿着两个独立的水平方向横向限制的通孔结构。

9. 发明申请

US20130112462A1 Metal Alloy Cap Integration 审中-公开
标题翻译：金属合金盖整合
公开(公告)号：US20130112462A1
公开(公告)日：2013-05-09
申请号：US13290557
申请日：2011-11-07
申请人： Chih-Chao Yang , David V. Horak , Charles W. Koburger, III , Shom Ponoth
发明人： Chih-Chao Yang , David V. Horak , Charles W. Koburger, III , Shom Ponoth
IPC分类号： H05K1/09 , H05K3/00
CPC分类号： H01L23/53238 , H01L21/76834 , H01L21/76847 , H01L21/76849 , H01L21/76877 , H01L21/76882 , H01L23/5329 , H01L23/53295 , H01L2924/0002 , Y10T29/49124 , H01L2924/00
摘要： A metal interconnect structure, which includes metal alloy capping layers, and a method of manufacturing the same. The originally deposited alloy capping layer element within the interconnect features will diffuse into and segregate onto top surface of the metal interconnect. The metal alloy capping material is deposited on a reflowed copper surface and is not physically in contact with sidewalls of the interconnect features. Thus, there is a reduction in electrical resistivity impact from residual alloy elements in the interconnect structure. That is, there is a reduction, of alloy elements inside the features of the metal interconnect structure. The metal interconnect structure includes a dielectric layer with a recessed line, a liner material on sidewalls, a copper material, an alloy cap, and a capping layer.
摘要翻译：包括金属合金覆盖层的金属互连结构及其制造方法。互连特征内的原始沉积的合金覆盖层元件将扩散到并分离到金属互连的顶表面上。金属合金覆盖材料沉积在回流铜表面上，并且不物理地与互连特征的侧壁接触。因此，互连结构中的残余合金元素的电阻率冲击降低。也就是说，在金属互连结构的特征内部存在合金元素的减少。金属互连结构包括具有凹陷线的介电层，侧壁上的衬垫材料，铜材料，合金盖和覆盖层。

10. 发明申请

US20130069161A1 INTEGRATED CIRCUIT STRUCTURE HAVING SELECTIVELY FORMED METAL CAP 有权
标题翻译：具有选择性金属盖的集成电路结构
公开(公告)号：US20130069161A1
公开(公告)日：2013-03-21
申请号：US13233064
申请日：2011-09-15
申请人： Chih-Chao Yang , David V. Horak , Charles W. Koburger, III , Shom Ponoth
发明人： Chih-Chao Yang , David V. Horak , Charles W. Koburger, III , Shom Ponoth
IPC分类号： H01L21/768 , H01L23/48
CPC分类号： H01L29/42372 , H01L21/28247 , H01L21/76834 , H01L21/7685 , H01L21/76856 , H01L21/76888 , H01L21/76897 , H01L29/495 , H01L29/517 , H01L29/78
摘要： Methods of forming an integrated circuit structure utilizing a selectively formed and at least partially oxidized metal cap over a gate, and associated structures. In one embodiment, a method includes providing a precursor structure including a transistor having a metal gate; forming an etch stop layer over an exposed portion of the metal gate; at least partially oxidizing the etch stop layer; and forming a dielectric layer over the at least partially oxidized etch stop layer.
摘要翻译：在栅极上利用选择性地形成和至少部分氧化的金属盖形成集成电路结构的方法以及相关联的结构。在一个实施例中，一种方法包括提供包括具有金属栅极的晶体管的前体结构; 在所述金属栅极的暴露部分上形成蚀刻停止层; 至少部分氧化所述蚀刻停止层; 以及在所述至少部分氧化的蚀刻停止层上形成电介质层。

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