会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 8. 发明授权
    • Compositions and methods for CMP of phase change alloys
    • 相变合金CMP的组成和方法
    • US07897061B2
    • 2011-03-01
    • US11699129
    • 2007-01-29
    • Jeffrey DysardPaul FeeneySriram Anjur
    • Jeffrey DysardPaul FeeneySriram Anjur
    • C09K13/00
    • C23F3/06C09G1/02C09K3/1409C09K3/1463H01L45/06H01L45/144H01L45/148H01L45/1683
    • The present invention provides a chemical-mechanical polishing (CMP) composition suitable for polishing a substrate comprising a phase change alloy (PCA), such as a germanium-antimony-tellurium (GST) alloy. The composition comprises not more than about 6 percent by weight of a particulate abrasive material in combination with an optional oxidizing agent, at least one chelating agent, and an aqueous carrier therefor. The chelating agent comprises a compound or combination of compounds capable of chelating a phase change alloy or component thereof (e.g., germanium, indium, antimony and/or tellurium species) that is present in the substrate, or chelating a substance that is formed from the PCA during polishing of the substrate with the CMP composition. A CMP method for polishing a phase change alloy-containing substrate utilizing the composition is also disclosed.
    • 本发明提供适用于抛光包含相变合金(PCA)如锗 - 锑 - 碲(GST)合金的基材的化学机械抛光(CMP)组合物。 组合物包含不超过约6重量%的颗粒磨料与任选的氧化剂,至少一种螯合剂及其水性载体的组合。 螯合剂包括能够螯合存在于底物中的相变合金或其组分(例如,锗,铟,锑和/或碲物质)的化合物或化合物的组合,或螯合由该底物形成的物质 PCA在用CMP组合物抛光衬底的过程中。 还公开了利用该组合物研磨含相变合金的基材的CMP方法。