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1. 发明申请

US20120305542A1 Oven Controlled MEMS Oscillator Device 审中-公开
标题翻译：烤箱控制MEMS振荡器装置
公开(公告)号：US20120305542A1
公开(公告)日：2012-12-06
申请号：US13150499
申请日：2011-06-01
申请人： Stephane Donnay , Xavier Rottenberg , Jonathan Borremans , Hendrikus Tilmans , Geert van der Plas , Michiel Pertijs
发明人： Stephane Donnay , Xavier Rottenberg , Jonathan Borremans , Hendrikus Tilmans , Geert van der Plas , Michiel Pertijs
IPC分类号： A21B1/02
CPC分类号： H03L1/022 , H03L1/04
摘要： A system is disclosed that includes an oven and a micromechanical oscillator inside the oven configured to oscillate at a predetermined frequency at a predetermined temperature, where the predetermined frequency is based on a temperature dependency and at least one predetermined property. The system further includes an excitation mechanism configured to excite the micromechanical oscillator to oscillate at the predetermined frequency and a temperature control loop configured to detect a temperature of the micromechanical oscillator using resistive sensing, determine whether the temperature of the micromechanical oscillator is within a predetermined range of the predetermined temperature based on the temperature dependency and the at least one predetermined property in order to minimize frequency drift, and adapt the temperature of the micromechanical oscillator to remain within the predetermined range. The system further includes a frequency output configured to output the predetermined frequency of the micromechanical oscillator.
摘要翻译：公开了一种系统，其包括烘箱内部的微机械振荡器，其配置成在预定频率以预定温度振荡，其中预定频率基于温度依赖性和至少一个预定特性。该系统还包括激励机构，其被配置为激励微机械振荡器以预定频率振荡;以及温度控制回路，其被配置为使用电阻感测来检测微机械振荡器的温度，确定微机械振荡器的温度是否在预定范围内基于温度依赖性和至少一个预定特性，以便使频率漂移最小化，并使微机械振荡器的温度保持在预定范围内。该系统还包括被配置为输出微机械振荡器的预定频率的频率输出。

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