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    • 7. 发明申请
    • METHOD FOR MANUFACTURING EJECTION ELEMENT SUBSTRATE
    • 制造喷射元件基板的方法
    • US20120111828A1
    • 2012-05-10
    • US13281714
    • 2011-10-26
    • Souta TakeuchiHirokazu KomuroSadayoshi Sakuma
    • Souta TakeuchiHirokazu KomuroSadayoshi Sakuma
    • G01D15/18
    • B41J2/1628B41J2/1603B41J2/1629B41J2/1631B41J2/1634B41J2/1639B41J2/1642B41J2/1643B41J2/1645B41J2002/14403
    • Provided is a method for manufacturing an ejection element substrate which is provided with a flow-channel-forming member having an ejection orifice for ejecting a liquid and a liquid flow channel that is communicated with the ejection orifice, and a substrate having a supply port for supplying the liquid to the liquid flow channel, and further a filter structure formed in the bottom of the supply port, including: forming the supply port by forming a through-hole by etching the substrate from a second face of the substrate on the side opposite to a first face of the substrate, on which the flow-channel-forming member is disposed; providing a resinous protection film on the side face and the bottom of the supply port; and forming a minute opening in the resinous protection film in the bottom of the supply port by carrying out a laser processing from the side of the second face.
    • 本发明提供一种喷射元件基板的制造方法,该喷射元件基板具有流路形成部件,该流路形成部件具有用于喷射液体的喷射孔和与该喷射孔连通的液体流路,以及具有供给口 将液体供给到液体流动通道,以及形成在供给口底部的过滤器结构,其特征在于,包括:通过从相对侧的基板的第二面上从基板的第二面蚀刻基板形成通孔而形成供给口 到所述基板的第一面,所述流路形成构件设置在所述基板的第一面上; 在供给口的侧面和底部设置树脂保护膜; 通过从第二面侧进行激光加工,在供给口的底部的树脂保护膜上形成微小的开口。
    • 9. 发明授权
    • Method for manufacturing ejection element substrate
    • 喷射元件基板的制造方法
    • US08691101B2
    • 2014-04-08
    • US13281714
    • 2011-10-26
    • Souta TakeuchiHirokazu KomuroSadayoshi Sakuma
    • Souta TakeuchiHirokazu KomuroSadayoshi Sakuma
    • G01D15/18
    • B41J2/1628B41J2/1603B41J2/1629B41J2/1631B41J2/1634B41J2/1639B41J2/1642B41J2/1643B41J2/1645B41J2002/14403
    • A method for manufacturing an ejection element substrate, which is provided with a flow-channel-forming member having an ejection orifice for ejecting a liquid and a liquid flow channel that is communicated with the ejection orifice, a substrate having a supply port for supplying the liquid to the liquid flow channel, and a filter structure formed in the bottom of the supply port, includes: forming the supply port by forming a through-hole by etching the substrate from a second face of the substrate on the side opposite to a first face of the substrate, on which the flow-channel-forming member is disposed; providing a resinous protection film on the side face and the bottom of the supply port; and forming a minute opening in the resinous protection film in the bottom of the supply port by carrying out a laser processing from the side of the second face.
    • 一种喷射元件基板的制造方法,其特征在于,具备流道形成部件,该流路形成部件具有用于喷射液体的喷射孔和与所述喷射孔连通的液体流路;基板,具有供给口 液体流到液体流动通道,以及形成在供给口底部的过滤器结构,包括:通过从基板的第二面在与第一部分相反的一侧蚀刻基板而形成通孔来形成供给口 在其上设置有流路形成构件的基板的表面; 在供给口的侧面和底部设置树脂保护膜; 通过从第二面侧进行激光加工,在供给口的底部的树脂保护膜上形成微小的开口。