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1. 发明申请

US20080023334A1 Liquid Treatment Apparatus 审中-公开
标题翻译：液体处理装置
公开(公告)号：US20080023334A1
公开(公告)日：2008-01-31
申请号：US11629792
申请日：2005-06-16
申请人： Sota Nakagawa , Masaji Akahori , Makoto Kashiwagi , Yuji Sasaki
发明人： Sota Nakagawa , Masaji Akahori , Makoto Kashiwagi , Yuji Sasaki
IPC分类号： B01D61/48 , C02F1/469
CPC分类号： C02F1/469 , B01D61/44 , B01D61/48 , C02F1/4695 , C02F1/66 , C02F2101/14 , C02F2103/346 , C02F2201/46115
摘要： A liquid treatment apparatus includes a cathode chamber (4) having a cathode (7), an anode chamber (1) having an anode (6), a deionization chamber (2) disposed between the cathode chamber (4) and the anode chamber (1), and a neutralization chamber (3) disposed between the cathode chamber (4) and the anode chamber (1). The deionization chamber is configured to selectively remove cations or anions from a water to be treated and receive ions having the same charge as the selectively removed ions from the cathode chamber (4) or the anode chamber (1). The neutralization chamber is configured to receive the removed ions and electrically neutralize the removed ions by ions supplied from the anode chamber (1) or the cathode chamber (4). An ion exchange membrane is provided to partition the deionization chamber and the neutralization chamber.
摘要翻译：液体处理装置包括具有阴极（7）的阴极室（4），具有阳极（6）的阳极室（1），设置在阴极室（4）和阳极室（4）之间的去离子室 1）和设置在阴极室（4）和阳极室（1）之间的中和室（3）。去离子室被配置为从待处理的水中选择性地去除阳离子或阴离子，并接收与阴极室（4）或阳极室（1）中选择性去除的离子具有相同电荷的离子。中和室被配置为接收去除的离子并且通过从阳极室（1）或阴极室（4）供应的离子电离中去除的离子。提供离子交换膜以分离去离子室和中和室。

2. 发明申请

US20070215477A1 Bipolar Chamber and Electrochemical Liquid Treatment Apparatus Having Such Bipolar Chamber 审中-公开
标题翻译：具有这种双极室的双极室和电化学液体处理装置
公开(公告)号：US20070215477A1
公开(公告)日：2007-09-20
申请号：US11597203
申请日：2005-06-16
申请人： Masaji Akahori , Sota Nakagawa , Makoto Kashiwagi
发明人： Masaji Akahori , Sota Nakagawa , Makoto Kashiwagi
IPC分类号： B01D61/42
CPC分类号： B01D61/44 , B01D61/48 , B01D61/52 , C02F1/46109 , C02F1/4693 , C02F1/4695 , C02F2001/46128 , C02F2001/46133 , C02F2101/14 , C02F2103/346 , C02F2201/4618 , C25B1/02 , C25B9/066 , C25B13/08
摘要： A bipolar chamber is used in an electrochemical liquid treatment apparatus such as an electrodialyzer and an electrolyzer. The bipolar chamber includes an anion-exchange membrane (1), an electrode (2), and a cation-exchange membrane (3). A liquid is supplied between the cation-exchange membrane (3) and the anion-exchange membrane (1). The anion-exchange membrane (1), the electrode (2), and the cation-exchange membrane (3) are arranged in this order from an anode side of the bipolar chamber. The liquid may include pure water or a nonelectrolyte aqueous solution.
摘要翻译：在诸如电渗析器和电解器的电化学液体处理装置中使用双极室。双极室包括阴离子交换膜（1），电极（2）和阳离子交换膜（3）。在阳离子交换膜（3）和阴离子交换膜（1）之间供给液体。阴极交换膜（1），电极（2）和阳离子交换膜（3）从双极室的阳极侧依次配置。液体可以包括纯水或非电解质水溶液。

3. 发明申请

US20060243604A1 Method and apparatus for treating waste water 审中-公开
标题翻译：处理废水的方法和设备
公开(公告)号：US20060243604A1
公开(公告)日：2006-11-02
申请号：US10554462
申请日：2004-04-28
申请人： Sota Nakagawa , Masaji Akahori , Makoto Kashiwagi , Keiji Maishigi
发明人： Sota Nakagawa , Masaji Akahori , Makoto Kashiwagi , Keiji Maishigi
IPC分类号： G01N27/26
CPC分类号： C02F1/4693 , C02F1/42 , C02F1/4678 , C02F1/4695 , C02F1/5236 , C02F1/56 , C02F1/66 , C02F1/705 , C02F9/00 , C02F2001/46152 , C02F2101/20 , C02F2103/346 , C02F2201/46125 , C22B7/006 , C22B15/0086 , C25C1/12 , C25D21/16 , Y02P10/234 , Y02P10/236
摘要： The present invention relates to a method and apparatus for removing and recovering metal such as copper from various kinds of waste water containing copper. A method for treating waste water includes treating waste water in a copper treatment step (10) comprising a combination of electrodialysis operation and electrolytic deposition operation to produce treated water (107) having a lowered copper concentration, and recovering copper from the waste water.
摘要翻译：本发明涉及从各种含铜废水中除去和回收铜等金属的方法和装置。处理废水的方法包括在包含电渗析操作和电解沉积操作的组合的铜处理步骤（10）中处理废水以产生铜浓度降低的处理水（107），并从废水中回收铜。

4. 发明申请

US20090152117A1 Electrodialysis apparatus, waste water treatment method and fluorine treatment system 审中-公开
标题翻译：电渗析仪，废水处理方法及氟处理系统
公开(公告)号：US20090152117A1
公开(公告)日：2009-06-18
申请号：US11921743
申请日：2006-06-02
申请人： Masaji Akahori , Sota Nakagawa , Yuji Sasaki
发明人： Masaji Akahori , Sota Nakagawa , Yuji Sasaki
IPC分类号： B01D61/46
CPC分类号： C02F1/4693 , B01D61/48 , B01D61/485 , B01D61/50 , C02F1/4695 , C02F2101/14 , C02F2201/4618 , Y02A20/134
摘要： An electrodialysis apparatus includes an anode chamber (10) having an anode (2), and a cathode chamber (50) having a cathode (3). The electrodialysis apparatus includes a desalting chamber (40) for removing fluoride ions from waste water supplied to produce treated water, a concentrating chamber (30) for concentrating the fluoride ions, which have moved from the desalting chamber (40), in the waste water to produce concentrated water, and a buffer chamber (20) for blocking the fluoride ions in the waste water from flowing from the concentrating chamber (30) directly into the anode chamber (10). The electrodialysis apparatus also include a path for supplying pure water to the anode chamber (10), and a path for supplying effluent water from the anode chamber (10) to the buffer chamber (20).
摘要翻译：电渗透装置包括具有阳极（2）的阳极室（10）和具有阴极（3）的阴极室（50）。该电渗析装置包括用于从供给的废水中除去氟离子以产生处理水的脱盐室（40），用于浓缩已经从脱盐室（40）移动到废水中的氟离子的浓缩室（30）以产生浓缩水，以及缓冲室（20），用于阻止废水中的氟离子直接从浓缩室（30）流入阳极室（10）。电渗析装置还包括用于向阳极室（10）供应纯水的路径和用于将来自阳极室（10）的流出水供应到缓冲室（20）的路径。

5. 发明申请

US20070227905A1 Electrolytic Deposition Treatment Apparatus and Method 审中-公开
标题翻译：电解沉积处理装置及方法
公开(公告)号：US20070227905A1
公开(公告)日：2007-10-04
申请号：US11629791
申请日：2005-06-16
申请人： Masaji Akahori , Sota Nakagawa , Takuo Horie
发明人： Masaji Akahori , Sota Nakagawa , Takuo Horie
IPC分类号： C25C1/12 , C25B11/03 , C25C7/02 , C25C1/00
CPC分类号： B01D61/44 , B01D61/46 , B01D63/16 , B01D2325/14 , C02F1/4678 , C02F2001/46123 , C02F2001/46133 , C02F2101/20 , C02F2103/346 , C02F2201/46115 , C02F2201/4619
摘要： The present invention provides an electrolytic deposition treatment apparatus and method which can reduce metal ion concentration of waste water to be treated by electrolytic deposition to the degree to which treated water can be discharged to the outside, and which can treat waste water, even if the quantity of waste water produced in a semiconductor device fabrication apparatus is large. The electrolytic deposition treatment apparatus comprises a cathode(3) for depositing metal ions in water to be treated as metal, a cation exchange membrane(4) disposed so as to face the cathode(3), and an anode(6) disposed so as to face the cation exchange membrane(4) through a cation exchanger(5). The water to be treated is supplied to a space between the cathode(3) and the cation exchange membrane(4).
摘要翻译：本发明提供一种电解沉积处理装置和方法，其可以通过电解沉积将待处理的废水的金属离子浓度降低到处理水能够排出到外部的程度，并且其可以处理废水，即使在半导体装置制造装置中产生的废水量大。电解沉积处理装置包括：阴极（3），用于将金属离子沉积在待处理的水中作为金属;阳极交换膜（4），其设置为与阴极（3）相对;以及阳极（6）通过阳离子交换器（5）面对阳离子交换膜（4）。待处理的水被供给到阴极（3）和阳离子交换膜（4）之间的空间。

6. 发明申请

US20070056847A1 Electrochemical liquid treatment equipments 审中-公开
标题翻译：电化学液体处理设备
公开(公告)号：US20070056847A1
公开(公告)日：2007-03-15
申请号：US10556057
申请日：2004-05-25
申请人： Masaji Akahori , Sota Nakagawa , Yohei Takahashi
发明人： Masaji Akahori , Sota Nakagawa , Yohei Takahashi
IPC分类号： C25B9/10
CPC分类号： C02F1/4695 , B01D61/48 , B01D61/52 , B01J47/08 , C02F1/4693 , C02F2001/422 , C02F2001/425 , C02F2001/46166 , C02F2201/46115
摘要： The present invention aims to provide electrode compartment structures in electrochemical liquid treatment equipments, which enable stable operation using pure water as an electrode compartment liquid requiring no concentration adjustment without adverse electrode reaction. The present invention relates an electrochemical liquid treatment equipment comprising ion exchange membranes between an anode and a cathode, which has an anode compartment defined by the anode and a cation exchange membrane and a cathode compartment defined by the cathode and an anion exchange membrane (12), each of the anode compartment and cathode compartment being packed with an ion exchanger (14) composed of a fibrous a material, each of the anode and cathode (11) being formed from a liquid- and gas-permeable and electrically conductive material, and the equipment also having an electrode compartment liquid flowing chamber (15) which is formed behind each of the anode and cathode.
摘要翻译：本发明旨在提供电化学液体处理设备中的电极室结构，其能够使用纯水作为不需要浓度调节而不产生不利电极反应的电极室液体的稳定操作。本发明涉及一种包括阳极和阴极之间的离子交换膜的电化学液体处理设备，其具有由阳极限定的阳极室和由阴极和阴离子交换膜（12）限定的阳离子交换膜和阴极室，阳极室和阴极室中的每一个都填充有由纤维材料构成的离子交换器（14），阳极和阴极（11）中的每一个由液体和气体可渗透的导电材料形成，并且该设备还具有形成在每个阳极和阴极之后的电极室液体流动室（15）。

7. 发明申请

US20050177273A1 Material supply system in semiconductor device manufacturing plant 失效
标题翻译：半导体器件制造厂的材料供应系统
公开(公告)号：US20050177273A1
公开(公告)日：2005-08-11
申请号：US10507699
申请日：2003-03-27
申请人： Kunihiro Miyazaki , Soichi Nadahara , Kinya Usuda , Masaji Akahori , Sota Nakagawa , Ken Nakajima
发明人： Kunihiro Miyazaki , Soichi Nadahara , Kinya Usuda , Masaji Akahori , Sota Nakagawa , Ken Nakajima
IPC分类号： H01L21/02 , B24B57/02 , C11D11/00 , C23C16/52 , H01L21/00 , H01L21/306 , G06F19/00
CPC分类号： H01L21/67276 , B24B37/04 , B24B57/02 , C11D11/0047 , C23C16/52 , G05B2219/32082 , H01L21/02052 , Y02P90/20 , Y10S210/90
摘要： In a small scaled plant intended for flexible manufacturing, a pure water supply system is provided at a low cost without reducing a production efficiency. A pure water system produces a plurality of grades of pure water which are supplied through pipes connected to points of use for cleaning, CMP, lithography, and the like. Upon receipt of a request signal from each point of use for starting to use a certain grade of pure water, a controller determines whether or not a required amount exceeds the capacity of the grade of pure water which can be supplied by the pure water system. If not, the controller sends a use permission signal to the point of use for permitting the same to use the pure water. When a certain use point is using the requested grade of pure water, the controller may not permit the requesting point of use to use the pure water until a use end signal is sent from the use point which is using the pure water.
摘要翻译：在用于灵活制造的小规模工厂中，以低成本提供纯净水供应系统，而不降低生产效率。纯水系统产生多个等级的纯水，其通过连接到用于清洁，CMP，光刻等的使用点的管道供应。一旦控制器收到来自每个使用点的请求信号以开始使用一定等级的纯水，则控制器确定所需量是否超过纯水系统能提供的纯水等级的容量。如果没有，控制器将使用许可信号发送到使用点，以允许其使用纯净水。当某个使用点正在使用所要求的纯水量时，控制器可能不允许请求使用点使用纯净水，直到从使用纯水的使用点发出使用结束信号。

8. 发明申请

US20050051434A1 Method and apparatus for controlling electrolytic solution 审中-公开
标题翻译：电解液控制方法及装置
公开(公告)号：US20050051434A1
公开(公告)日：2005-03-10
申请号：US10933353
申请日：2004-09-03
申请人： Koji Mishima , Masao Hodai , Hiroyuki Kanda , Kunihito Ide , Satoru Yamamoto , Seiji Katsuoka , Masaaki Kinbara , Masaji Akahori , Sota Nakagawa
发明人： Koji Mishima , Masao Hodai , Hiroyuki Kanda , Kunihito Ide , Satoru Yamamoto , Seiji Katsuoka , Masaaki Kinbara , Masaji Akahori , Sota Nakagawa
IPC分类号： C25D21/16 , C25D21/12 , C25D21/18 , C25D21/22 , C25D21/06 , C25C7/00
CPC分类号： C25D21/12 , C25D21/22
摘要： An electrolytic solution control method can control the composition of an electrolytic solution efficiently with high precision, and can remove a partially decomposed product of an organic component from an electrolytic solution. The electrolytic solution control method includes storing an electrolytic solution containing an organic component and an inorganic component in an electrolytic solution storage tank while controlling and keeping the electrolytic solution at a predetermined composition, adjusting an inorganic component of the waste electrolytic solution after use in electrolytic processing in an electrolytic processing apparatus, and then returning the waste electrolytic solution to the electrolytic solution storage tank.
摘要翻译：电解液控制方法能够高精度地有效地控制电解液的组成，能够从电解液中除去有机成分的部分分解产物。电解液控制方法包括将电解液储存罐中含有有机成分和无机成分的电解液同时控制并保持电解液为规定的组成，在电解处理后调整废电解液的无机成分在电解处理装置中，然后将废电解液返回到电解液储罐。

9. 发明授权

US07305275B2 Material supply system in semiconductor device manufacturing plant 失效
标题翻译：半导体器件制造厂的材料供应系统
公开(公告)号：US07305275B2
公开(公告)日：2007-12-04
申请号：US10507699
申请日：2003-03-27
申请人： Kunihiro Miyazaki , Soichi Nadahara , Kinya Usuda , Masaji Akahori , Sota Nakagawa , Ken Nakajima
发明人： Kunihiro Miyazaki , Soichi Nadahara , Kinya Usuda , Masaji Akahori , Sota Nakagawa , Ken Nakajima
IPC分类号： G06F19/00
CPC分类号： H01L21/67276 , B24B37/04 , B24B57/02 , C11D11/0047 , C23C16/52 , G05B2219/32082 , H01L21/02052 , Y02P90/20 , Y10S210/90
摘要： In a small scaled plant intended for flexible manufacturing, a pure water supply system is provided at a low cost without reducing a production efficiency. A pure water system produces a plurality of grades of pure water which are supplied through pipes connected to points of use for cleaning, CMP, lithography, and the like. Upon receipt of a request signal from each point of use for starting to use a certain grade of pure water, a controller determines whether or not a required amount exceeds the capacity of the grade of pure water which can be supplied by the pure water system. If not, the controller sends a use permission signal to the point of use for permitting the same to use the pure water. When a certain use point is using the requested grade of pure water, the controller may not permit the requesting point of use to use the pure water until a use end signal is sent from the use point which is using the pure water.
摘要翻译：在用于灵活制造的小规模工厂中，以低成本提供纯净水供应系统，而不降低生产效率。纯水系统产生多个等级的纯水，其通过连接到用于清洁，CMP，光刻等的使用点的管道供应。一旦控制器收到来自每个使用点的请求信号以开始使用一定等级的纯水，则控制器确定所需量是否超过纯水系统能提供的纯水等级的容量。如果不是，控制器将使用许可信号发送到使用点，以允许其使用纯净水。当某个使用点正在使用所要求的纯水量时，控制器可能不允许请求使用点使用纯净水，直到从使用纯水的使用点发出使用结束信号。

10. 发明申请

US20060076297A1 Method and device for electrolytically removing and recovering metal ions from waste water 审中-公开
标题翻译：从废水中电解去除和回收金属离子的方法和装置
公开(公告)号：US20060076297A1
公开(公告)日：2006-04-13
申请号：US10536363
申请日：2003-03-12
申请人： Masaji Akahori , Sota Nakagawa
发明人： Masaji Akahori , Sota Nakagawa
IPC分类号： B01D17/06
CPC分类号： B01D61/48 , B01D61/44 , B01J47/08 , B01J49/30 , C02F1/42 , C02F1/44 , C02F1/444 , C02F1/4693 , C02F1/52 , C02F1/56 , C02F1/66 , C02F1/70 , C02F2001/46138 , C02F2001/46152 , C02F2001/46157 , C02F2101/20 , C02F2103/10 , C02F2103/346 , C02F2209/03 , C02F2209/40
摘要： The present invention relates to a method for removing and recovering metal ions from various kinds of waste water to be treated. The method comprises an oxidizing agent removing apparatus for decomposing and removing an oxidizing agent from the water, and an electrolytic deposition apparatus (21) for removing and recovering metal ions from the water discharged from the oxidizing agent removing apparatus. The electrolytic deposition apparatus has electrodes and an ion exchanger disposed between the electrodes.
摘要翻译：本发明涉及从各种待处理废水中去除和回收金属离子的方法。该方法包括从水中分解除去氧化剂的氧化剂除去装置，以及从从氧化剂除去装置排出的水中除去和回收金属离子的电解沉积装置（21）。电解沉积设备具有设置在电极之间的电极和离子交换器。

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