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1. 发明申请

US20200218078A1 Real-Time Micro/Nano Optical Field Generation and Manipulation System/Method 审中-公开
公开(公告)号：US20200218078A1
公开(公告)日：2020-07-09
申请号：US16628549
申请日：2017-11-27
申请人： Soochow University
发明人： Yan Ye , Yishen Xu , Linsen Chen
IPC分类号： G02B27/09
摘要： The present disclosure discloses a real-time micro/nano optical field generation and manipulation system and method. The system comprises a light source, a spatial filtering unit, an optical 4F system and a light wave manipulation unit, and the optical 4F system comprises a first lens (set) and a second lens (set) sequentially arranged along a light path. The present disclosure achieves real-time modulation on an incident wavefront through a phase element or a phase element assemble. By dynamically manipulating an incident light sub-wavefront, or the light wave modulation optical element, or different areas of the optical element, or different parts of the optical field in an imaging plane and/or the like by the spatial filtering unit, real time light fields with different parameters are generated in the image plane of the system. By spatial filtering/spatial time division filtering/spatio-temporal multiplexing filtering and/or the change of the phase elements, flexible manipulation on patterns, pattern distribution areas and structural parameters such as the patterns' frequency, their orientations, duty ratios, phases or phase shifts and the like are realized. The system can be flexibly integrated into various lithography or microscopy systems for real-time micro/nano structure fabrication and dynamical or 3D detection with a real time manipulated structural illumination.

2. 发明授权

US11327326B2 Real-time micro/nano optical field generation and manipulation system/method 有权
公开(公告)号：US11327326B2
公开(公告)日：2022-05-10
申请号：US16628549
申请日：2017-11-27
申请人： Soochow University
发明人： Yan Ye , Yishen Xu , Linsen Chen
IPC分类号： G02B27/09 , G02B5/00 , G02B5/20
摘要： The present disclosure discloses a real-time micro/nano optical field generation and manipulation system and method. The system comprises a light source, a spatial filtering unit, an optical 4F system and a light wave manipulation unit, and the optical 4F system comprises a first lens (set) and a second lens (set) sequentially arranged along a light path. The present disclosure achieves real-time modulation on an incident wavefront through a phase element or a phase element assemble. By dynamically manipulating an incident light sub-wavefront, or the light wave modulation optical element, or different areas of the optical element, or different parts of the optical field in an imaging plane and/or the like by the spatial filtering unit, real time light fields with different parameters are generated in the image plane of the system. By spatial filtering/spatial time division filtering/spatio-temporal multiplexing filtering and/or the change of the phase elements, flexible manipulation on patterns, pattern distribution areas and structural parameters such as the patterns' frequency, their orientations, duty ratios, phases or phase shifts and the like are realized. The system can be flexibly integrated into various lithography or microscopy systems for real-time micro/nano structure fabrication and dynamical or 3D detection with a real time manipulated structural illumination.

3. 发明授权

US10054859B2 Real-time variable parameter micro-nano optical field modulation system and interference lithography system 有权
公开(公告)号：US10054859B2
公开(公告)日：2018-08-21
申请号：US15310245
申请日：2016-01-06
申请人： Soochow University
发明人： Yan Ye , Fengchuan Xu , Guojun Wei , Yishen Xu , Donglin Pu , Linsen Chen
IPC分类号： G03F7/20 , G02B27/42 , G02B27/09 , G02B27/00
CPC分类号： G03F7/7045 , G02B19/0095 , G02B27/00 , G02B27/0905 , G02B27/0944 , G02B27/095 , G02B27/0977 , G02B27/0988 , G02B27/4222 , G03F7/70408
摘要： A real-time variable parameter micro-nano optical field modulation system includes a light source, a 4F optical system and a set of light wave modulation optical components. The 4F optical system includes a first optical assembly and a second optical assembly arranged along an optical path in sequence. The light wave modulation optical components are arranged between the first optical assembly and the second optical assembly, and generate optical field distribution with adjustable patterns and structural parameters thereof on a back focal plane of the system by segmented modulation of sub-wavefronts.

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