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    • 6. 发明申请
    • METHOD OF SELECTIVE POST-GROWTH TUNING OF AN OPTICAL BANDGAP OF A SEMI-CONDUCTOR HETEROSTRUCTURE AND PRODUCTS PRODUCED THEREOF
    • 半导体结构的光学带状选择性后生长调谐方法及其生产的产品
    • US20070091954A1
    • 2007-04-26
    • US11554043
    • 2006-10-30
    • Gang LISoo Chua
    • Gang LISoo Chua
    • H01S5/00
    • H01L21/388H01L21/182H01L33/0095H01S5/4087
    • A method of controlling the degree of IFVEI for post-growth tuning of an optical bandgap of a semiconductor heterostructure. The resultant layer structure may contain a semi-conductor heterostructure with one or more regions with selectively modified bandgap. According to one aspect of the invention, a metal interlayer is deposited between the heterostructure and a dielectric layer such as silica. According to another aspect of the invention, an oxidized surface is provided between a dielectric layer and the heterostructure. The presence of the oxide layer improves stability and reproducibility in the post-annealing process. In a further aspect, the oxide layer may be provided between the interlayer and the heterostructure. In one embodiment of the invention, a photoresist mask with a specific pattern is deposited on the surface of the heterostructure so that the interlayer is deposited in an unmasked region whereon post-growth tuning results. In another embodiment, multiple photolithography is performed to deposit interlayers of varying thickness and/or regions on the heterostructure, followed by thermal post-annealing of the dielectric layer. This method produces heterostructures with optical bandgaps having selectively tuned regions.
    • 控制用于半导体异质结构的光学带隙的后生长调谐的IFVEI的程度的方法。 所得到的层结构可以包含具有一个或多个具有选择性改性带隙的区域的半导体异质结构。 根据本发明的一个方面,金属中间层沉积在异质结构和介电层如二氧化硅之间。 根据本发明的另一方面,在电介质层和异质结构之间提供氧化表面。 氧化物层的存在提高了后退火工艺中的稳定性和再现性。 在另一方面,氧化物层可以设置在中间层和异质结构之间。 在本发明的一个实施例中,具有特定图案的光致抗蚀剂掩模沉积在异质结构的表面上,使得中间层沉积在未成荫的区域中,其中生长后调节结果。 在另一个实施例中,执行多次光刻以在异质结构上沉积不同厚度和/或区域的夹层,然后对介电层进行热后退火。 该方法产生具有选择性调谐区域的光学带隙的异质结构。