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1. 发明授权

US08906248B2 Silicon on insulator etch 有权
标题翻译：硅绝缘体刻蚀
公开(公告)号：US08906248B2
公开(公告)日：2014-12-09
申请号：US13324895
申请日：2011-12-13
申请人： Siyi Li , Robert C. Hefty , Mark Todhunter Robson , James R. Bowers , Audrey Charles
发明人： Siyi Li , Robert C. Hefty , Mark Todhunter Robson , James R. Bowers , Audrey Charles
IPC分类号： H01L21/302 , H01L21/461 , H01L21/3213 , H01L21/311
CPC分类号： H01L21/32137 , H01L21/3065 , H01L21/3081 , H01L21/31116
摘要： A method etching features through a stack of a silicon nitride layer over a silicon layer over a silicon oxide layer in a plasma processing chamber is provided. The silicon nitride layer is etched in the plasma processing chamber, comprising; flowing a silicon nitride etch gas; forming the silicon nitride etch gas into a plasma to etch the silicon nitride layer, and stopping the flow of the silicon nitride etch gas. The silicon layer is, comprising flowing a silicon etch gas, wherein the silicon etch gas comprises SF6 or SiF4, forming the silicon etch gas into a, and stopping the flow of the silicon etch gas. The silicon oxide layer is etched in the plasma processing chamber, comprising flowing a silicon oxide etch gas, forming the silicon oxide etch gas into a plasma, and stopping the flow of the silicon oxide etch gas.
摘要翻译：提供了通过在等离子体处理室中的硅氧化物层上的硅层上的氮化硅层的堆叠的方法蚀刻特征。在等离子体处理室中蚀刻氮化硅层，包括：流动氮化硅蚀刻气体; 将氮化硅蚀刻气体形成等离子体以蚀刻氮化硅层，并停止氮化硅蚀刻气体的流动。硅层包括流动硅蚀刻气体，其中硅蚀刻气体包括SF 6或SiF 4，将硅蚀刻气体形成为硅并且阻止硅蚀刻气体的流动。在等离子体处理室中蚀刻氧化硅层，包括使氧化硅蚀刻气体流动，将氧化硅蚀刻气体形成等离子体，并停止氧化硅蚀刻气体的流动。

2. 发明授权

US06779547B1 Automated condensation drain system 失效
标题翻译：自动冷凝排水系统
公开(公告)号：US06779547B1
公开(公告)日：2004-08-24
申请号：US10667836
申请日：2003-09-23
申请人： James R. Bowers
发明人： James R. Bowers
IPC分类号： F16K2400
CPC分类号： F16T1/00 , G01F15/08 , Y10T137/3105 , Y10T137/8326
摘要： An automated condensate drain system for gas flow elements is provided that includes a differential pressure transmitter, a sequence controller, and two condensate chambers for receiving and collecting accumulated moisture from air flow elements and transmitters. The condensate chambers are placed in low profile positions within the instrument piping system, requiring downward sloping of the instrument tubing to accentuate condensation drainage. The sequence controller initiates a drainage cycle (set as desired by operator), permitting the transmitter to enter an auto-zero cycle, thereby energizing an internal isolation valve in the transmitter while maintaining the transmitter output. The sequence controller energizes solenoid valves of the two condensate chambers, wherein the chambers open to permit drainage of accumulated moisture assisted by static pressure system. After the drainage cycle is completed, the sequence controller de-energizes solenoid valves and returns the drain valves to a closed position and the transmitter returns to normal operation.
摘要翻译：提供了一种用于气体流动元件的自动冷凝水排放系统，其包括差压变送器，顺序控制器和用于从气流元件和发射器接收和收集累积的水分的两个冷凝室。冷凝室被放置在仪器管道系统内的薄型位置，需要仪器管道向下倾斜以突出冷凝排水。顺序控制器启动排水循环（由操作员设定），允许变送器进入自动归零循环，从而在保持变送器输出的同时给变送器内部的隔离阀通电。顺序控制器激励两个冷凝室的电磁阀，其中，这些室打开以允许通过静压系统辅助的累积湿气排出。排水循环完成后，顺序控制器关闭电磁阀，并将排水阀返回到关闭位置，变送器恢复正常运行。

3. 发明授权

US5736651A High temperature gas flow sensing element 失效
标题翻译：高温气体流量传感元件
公开(公告)号：US5736651A
公开(公告)日：1998-04-07
申请号：US653749
申请日：1996-05-23
申请人： James R. Bowers
发明人： James R. Bowers
IPC分类号： G01F1/46
CPC分类号： G01F1/46
摘要： A high temperature gas flow sensing element is disclosed having a housing with similar internal dimensions as the fluid conduit, whether round or rectangular. An interior flow conditioner is affixed at the inlet of the flow element. A total pressure sensing pitot tube array is affixed traversing the interior cross sectional area of flow element for sensing the total pressure of fluid flowing into the flow element, and a static pressure sensing pitot tube array is also affixed traversing the interior cross sectional area of the flow element for sensing the average static pressure within the flow element. The pitot tubes and pressure sensing tubes are affixed at four places, two shell penetrations and two places at the manifolds, regardless of manifold design or the element shape. To prevent material stress and fatigue and leakage that can result from the different expansion rates of differing materials under high gradient temperature cycling, a high temperature packing, such as a ribbon packing or packing ring made of pliable material resistant to high temperatures, is used in place of the ferrule portion of a compression nut and fitting arrangement. Exterior first and second instrument taps are provide for connection of each array respectively to a differential pressure instrument for indicating flow rate and/or transmitting a flow rate signal. Further, exterior array access ports are provided to permit cleaning of each pitot arrays should they become plugged with particulates.
摘要翻译：公开了一种高温气体流量感测元件，其具有与流体导管相似的内部尺寸的壳体，无论是圆形还是矩形。内部流动调节器固定在流动元件的入口处。总压力感测皮托管阵列穿过流动元件的内部横截面积，用于感测流入流动元件的流体的总压力，并且静压感测皮托管阵列也被固定穿过流动元件的内部横截面积流体元件，用于感测流动元件内的平均静态压力。皮托管和压力传感管固定在四个位置，两个壳体穿透和两个位置在歧管，不管歧管设计或元件形状。为了防止在高梯度温度循环下由不同材料的不同膨胀率引起的材料应力和疲劳和泄漏，使用高温包装，例如由耐高温的柔韧材料制成的带状填料或填料环，用于压紧螺母和配合装置的套圈部分的位置。提供外部第一和第二仪器抽头用于将每个阵列分别连接到用于指示流量和/或传送流量信号的差压仪器。此外，提供外部阵列访问端口以允许每个皮托阵列在其被微粒堵塞时进行清洁。

4. 发明授权

US07159473B1 Internal tube support for flow elements providing for tube expansion within the flow element shell 失效
标题翻译：用于流动元件的内管支撑，用于在流动元件壳体内提供管膨胀
公开(公告)号：US07159473B1
公开(公告)日：2007-01-09
申请号：US11267804
申请日：2005-11-07
申请人： James R. Bowers
发明人： James R. Bowers
IPC分类号： G01F1/46 , G01D21/00
CPC分类号： G01F1/46 , G01D11/30 , G01F15/18
摘要： A tube mounting assembly for total traverse or static traverse sensing tubes is provided for use with Pitot tube devices where the tubes are allowed to expand and contract independent of the flow element shell. A female threaded pipe cap is tack welded or otherwise affixed to the inside internal surface of the flow element shell. A ½ inch NPTX tube fitting of the bore-thru fitting type is affixed to the pipe cap, and a traverse tube, sealed by high temperature packing or thread sealant between the tube and a tube nut, are then affixed to the opposite end of the bore-thru tube fitting.
摘要翻译：提供用于总横移或静态横移传感管的管安装组件，用于皮托管装置，其中允许管独立于流动元件壳膨胀和收缩。内螺纹管帽被定位焊接或以其他方式固定到流动元件壳体的内部内表面。将一个½英寸的NPTX管接头安装在管帽上，然后将管子和管螺母之间的高温密封剂或螺纹密封剂密封的横向管道固定到管帽的另一端通孔管接头。

5. 发明授权

US5436538A Locomotive wheel slip controller 失效
标题翻译：机车车轮滑动控制器
公开(公告)号：US5436538A
公开(公告)日：1995-07-25
申请号：US266422
申请日：1994-07-05
申请人： Daniel C. Garvey , James R. Bowers , Bruce G. Bailey
发明人： Daniel C. Garvey , James R. Bowers , Bruce G. Bailey
IPC分类号： B60T8/17 , B61C15/08
CPC分类号： B60T8/1705
摘要： A wheel slip controller for a locomotive is disclosed that utilizes PID controllers to control the traction wheels during normal locomotive operation. The controller monitors several independent wheel slip indicators to provide rapid detection of excessive wheel slip. Upon detecting excessive traction wheel slip, motor control from the operative PID controller is suspended and a wheel slip compensator assumes command of the traction wheel drive motors. The wheel slip compensator then dynamically compensates the motors depending upon the amount of wheel slip that is detected. Once the wheel slip condition has been corrected, control of the traction motors is transferred back to the interrupted PID controller.
摘要翻译：公开了一种用于机车的车轮滑动控制器，其利用PID控制器在正常机车操作期间控制牵引轮。控制器监控几个独立的车轮滑动指示器，以便快速检测车轮滑动过度。在检测到过大的牵引轮滑动时，来自操作PID控制器的电动机控制被暂停，并且车轮滑移补偿器承担牵引轮驱动电动机的指令。然后，车轮滑移补偿器根据检测到的车轮滑动量动态地补偿电动机。一旦车轮打滑状况得到纠正，牵引电动机的控制被转回到中断的PID控制器。

6. 发明授权

US4343195A Flow measuring device 失效
标题翻译：流量测量装置
公开(公告)号：US4343195A
公开(公告)日：1982-08-10
申请号：US170681
申请日：1980-07-21
申请人： Michael Victor , James R. Bowers
发明人： Michael Victor , James R. Bowers
IPC分类号： G01F1/46
CPC分类号： G01F1/46
摘要： A pitot tube having a series of pressure sensing ports on the upstream side of the tube and a second series of pressure sensing openings on the downstream side of the tube. A longitudinal internal wall in the tube forms a pair of chambers, one of which communicates with the upstream ports and the second which communicates with the downstream ports. A plate attached to the end of the tube has diverging passages communicating with the two chambers, the plate forming a flange for connecting a manifold, a transmitter for indicating the flow pressures sensed by the ports, a gauge or the like.
摘要翻译：皮托管，其在管的上游侧具有一系列压力感测端口，在管的下游侧具有第二系列压力感测开口。管中的纵向内壁形成一对室，其中一个室与上游端口连通，第二室与下游端口连通。连接到管端的板具有与两个腔室连通的发散通道，该板形成用于连接歧管的凸缘，用于指示由端口感测的流量压力的发射器，量规等。

7. 发明申请

US20190274875A1 THERMALLY-CONDUCTIVE BANDAGES AND WRAPS 审中-公开
公开(公告)号：US20190274875A1
公开(公告)日：2019-09-12
申请号：US16300000
申请日：2019-03-12
申请人： James R. Bowers
发明人： James R. Bowers
IPC分类号： A61F7/02 , A61F5/01 , A61F13/00 , A61F7/08 , A61F7/00
摘要： Provided herein are compositions and methods for providing a combination of compression and temperature therapy. In particular, provided herein are compression bandages that transmit cooling or heating to an injury.

8. 发明授权

US06959610B1 Manual purge system for instrumentation flow element tubing 失效
标题翻译：仪表流量元件管的手动清洗系统
公开(公告)号：US06959610B1
公开(公告)日：2005-11-01
申请号：US10769697
申请日：2004-02-02
申请人： James R. Bowers
发明人： James R. Bowers
IPC分类号： G01F1/46 , G01F15/12
CPC分类号： G01F15/12 , G01F1/46
摘要： An improved manual purge system for periodically cleaning pressure sensing flow element tubing is provided that is a complete self-contained system for allowing manual determination and initiation of flow element purging. Additionally, the system can be easily upgraded to an automatic purge system without removal from the process system.
摘要翻译：提供了一种改进的手动清洗系统，用于定期清洁压力传感流体元件管，这是一个完全独立的系统，用于允许手动确定和启动流动元件清洗。此外，系统可以轻松升级到自动清除系统，而无需从进程系统中删除。

9. 发明授权

US06841483B2 Unique process chemistry for etching organic low-k materials 失效
标题翻译：用于蚀刻有机低k材料的独特工艺化学
公开(公告)号：US06841483B2
公开(公告)日：2005-01-11
申请号：US09782185
申请日：2001-02-12
申请人： Helen H. Zhu , James R. Bowers , Ian J. Morey , Wayne Babie , Michael Goss
发明人： Helen H. Zhu , James R. Bowers , Ian J. Morey , Wayne Babie , Michael Goss
IPC分类号： H01L21/311 , H01L21/302
CPC分类号： H01L21/31138
摘要： Method for etching a feature in an integrated circuit wafer with minimized effect of micromasking. The method introduces a flow of etchant gas including a fluorocarbon gas to the wafer, and uses the etchant gas to form a plasma in proximity with at least a portion of the wafer. The plasma is used to etch at least a portion of the feature in the wafer. Disassociation of the fluorocarbon into fluorine and hydrocarbon species performs two functions. The fluorine species prevents or significantly reduces sputtered hardmask components from depositing on the floor of the etched feature during etching. The hydrocarbon species acts to form a passivation layer on the sidewalls of the feature.
摘要翻译：用微蚀刻效应最小化在集成电路晶片中蚀刻特征的方法。该方法将包括碳氟化合物气体的蚀刻剂气体流引入晶片，并且使用蚀刻剂气体在晶片的至少一部分附近形成等离子体。等离子体用于蚀刻晶片中的特征的至少一部分。将碳氟化合物分解成氟和烃类具有两个功能。氟化物防止或显着减少溅射的硬掩模组分在蚀刻期间沉积在蚀刻特征的地板上。烃类起到在特征的侧壁上形成钝化层的作用。

10. 发明授权

US06564651B1 Modular high-temperature gas flow sensing element for use with a cyclone furnace air flow measuring system 失效
标题翻译：用于旋风炉气流测量系统的模块化高温气体流量传感元件
公开(公告)号：US06564651B1
公开(公告)日：2003-05-20
申请号：US10020456
申请日：2001-12-07
申请人： James R. Bowers
发明人： James R. Bowers
IPC分类号： G01F146
CPC分类号： G01F1/46
摘要： A high temperature gas flow sensing element module, using Pitot tube technology, for use within a fluid conduit consisting of a housing having an inlet, an outlet, and forming a hollow interior cross-sectional area. Individually, the gas flow sensing element modules fit easily through typical furnace access doors. Thus, in typical furnace retrofit applications, a plurality of equally sized gas flow sensing element modules are arranged adjacent one another in a manner such that the inside dimensions of the entire arrangement coincide with the internal dimensions of the plenum or duct opening into which it is inserted. Pressure averaging piping is used to provide average total and static pressure across the entire gas flow sensing element to differential pressure flow indicators and/or transmitting devices.
摘要翻译：使用皮托管技术的高温气体流量感测元件模块用于由具有入口，出口并形成中空的内部横截面积的壳体组成的流体导管内。单独地，气体流量检测元件模块可以通过典型的炉门进入。因此，在典型的炉子改造应用中，多个相同尺寸的气体流量检测元件模块以彼此相邻的方式布置，使得整个布置的内部尺寸与其中的充气室或管道开口的内部尺寸一致插入。压力平均管道用于将整个气体流量感测元件的平均总静压力提供给差压流量指示器和/或发送装置。

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