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1. 发明申请

US20110141462A1 WAFER INSPECTION SYSTEM 审中-公开
标题翻译：波浪检测系统
公开(公告)号：US20110141462A1
公开(公告)日：2011-06-16
申请号：US13034565
申请日：2011-02-24
申请人： Silviu Reinhorn , Daniel Some , Gilad Almogy
发明人： Silviu Reinhorn , Daniel Some , Gilad Almogy
IPC分类号： G01N21/88
CPC分类号： G01N21/9501 , G01N21/1717
摘要： Apparatus for inspecting a surface, including a plurality of pump sources having respective pump optical output ends and providing respective pump beams through the pump optical output ends, and a plurality of probe sources having respective probe optical output ends and providing respective probe beams through the probe optical output ends. There is an alignment mounting which holds the respective pump optical output ends and probe optical output ends in equal respective effective spatial offsets, and optics which convey the respective pump beams and probe beams to the surface, so as to generate returning radiation from a plurality of respective locations thereon, and which convey the returning radiation from the respective locations. The apparatus includes a receiving unit which is adapted to receive the returning radiation and which is adapted to determine a characteristic of the respective locations in response thereto.
摘要翻译：用于检查表面的装置，包括具有相应的泵浦光学输出端的多个泵浦源，并且通过泵浦光学输出端提供相应的泵浦光束，以及具有相应的探测光学输出端的多个探测源，并且通过探针提供相应的探测光束光输出端。存在对准安装，其将相应的泵浦光学输出端和探测光学输出端保持在相等的有效空间偏移中;以及光学器件，其将相应的泵浦光束和探测光束传送到表面，以便产生来自多个各自的位置，并且从各个位置传送返回的辐射。该装置包括接收单元，该接收单元适于接收返回的辐射并适于响应于此确定相应位置的特性。

2. 发明申请

US20060012791A1 Wafer inspection system 审中-公开
标题翻译：晶圆检查系统
公开(公告)号：US20060012791A1
公开(公告)日：2006-01-19
申请号：US11158733
申请日：2005-06-21
申请人： Silviu Reinhorn , Daniel Some , Gilad Almogy
发明人： Silviu Reinhorn , Daniel Some , Gilad Almogy
IPC分类号： G01N21/88
CPC分类号： G01N21/9501 , G01N21/1717
摘要： Apparatus for inspecting a surface, including a plurality of pump sources having respective pump optical output ends and providing respective pump beams through the pump optical output ends, and a plurality of probe sources having respective probe optical output ends and providing respective probe beams through the probe optical output ends. There is an alignment mounting which holds the respective pump optical output ends and probe optical output ends in equal respective effective spatial offsets, and optics which convey the respective pump beams and probe beams to the surface, so as to generate returning radiation from a plurality of respective locations thereon, and which convey the returning radiation from the respective locations. The apparatus includes a receiving unit which is adapted to receive the returning radiation and which is adapted to determine a characteristic of the respective locations in response thereto.
摘要翻译：用于检查表面的装置，包括具有相应的泵浦光学输出端的多个泵浦源，并且通过泵浦光学输出端提供相应的泵浦光束，以及具有相应的探测光学输出端的多个探测源，并且通过探针提供相应的探测光束光输出端。存在对准安装，其将相应的泵浦光学输出端和探测光学输出端保持在相等的有效空间偏移中;以及光学器件，其将相应的泵浦光束和探测光束传送到表面，以便产生来自多个各自的位置，并且从各个位置传送返回的辐射。该装置包括接收单元，该接收单元适于接收返回的辐射并适于响应于此确定相应位置的特性。

3. 发明授权

US06671398B2 Method and apparatus for inspection of patterned semiconductor wafers 有权
公开(公告)号：US06671398B2
公开(公告)日：2003-12-30
申请号：US09964733
申请日：2001-09-28
申请人： Silviu Reinhorn , Gilad Almogy
发明人： Silviu Reinhorn , Gilad Almogy
IPC分类号： G06K900
CPC分类号： G01N21/95692 , H01L22/12
摘要： Novel method and apparatus are disclosed for inspecting a wafer surface to detect the presence thereon of exposed conductive material, particularly for determining the integrity of contact holes and vias, in semiconductor wafer manufacturing. The method comprises the steps of irradiating a spot of the wafer surface with a beam having a wavelength sufficiently shorter than the working function of the metal, such as deep UV light beam, collecting the electrons released by the irradiated wafer, generating an electrical signal that is a function of the collected electrons, and inspecting the signal to determine whether the contact holes or vias within the irradiated wafer spot are open. The apparatus comprises a vacuum chamber having therein a stage and chuck for supporting the wafer. An illumination source generates irradiating energy which is formed into a beam using appropriate optics so as to obtain the desired beam spot of the wafer's surface. an electron detector collects electrons released from the wafer surface and sends a corresponding signal to a processor for processing the signal to determine whether the metal at the bottom of the hole is exposed. Optionally, the light scattered by the wafer is detected by detectors arranged around the illuminating beam.

4. 发明授权

US06853446B1 Variable angle illumination wafer inspection system 有权
标题翻译：可变角度照明晶圆检查系统
公开(公告)号：US06853446B1
公开(公告)日：2005-02-08
申请号：US09641137
申请日：2000-08-16
申请人： Gilad Almogy , Hadar Mazaki , Zvi Howard Phillip , Silviu Reinhorn , Boris Goldberg , Daniel I. Some
发明人： Gilad Almogy , Hadar Mazaki , Zvi Howard Phillip , Silviu Reinhorn , Boris Goldberg , Daniel I. Some
IPC分类号： G01N21/21 , G01N21/95 , G02B21/08 , G02B26/10 , G01N21/00
CPC分类号： G02B26/10 , G01N21/21 , G01N21/9501 , G02B21/082
摘要： A variable illumination angle inspection system is provided, including a light source providing a light beam and a scanner imparting scanning deflection to the light beam to provide a scanning beam approaching a substrate at a first angle. A deflection element is selectively insertable into an optical path of the scanning beam to deflect the scanning beam so as to cause the scanning beam to approach the substrate at a second angle.
摘要翻译：提供了可变照明角度检查系统，包括提供光束的光源和向光束施加扫描偏转的扫描器，以提供以第一角度接近基板的扫描光束。偏转元件可选择性地插入到扫描光束的光路中以偏转扫描光束，以使扫描光束以第二角度接近基板。

5. 发明授权

US06791099B2 Laser scanning wafer inspection using nonlinear optical phenomena 失效
标题翻译：激光扫描晶圆检查采用非线性光学现象
公开(公告)号：US06791099B2
公开(公告)日：2004-09-14
申请号：US09784626
申请日：2001-02-14
申请人： Daniel I. Some , Silviu Reinhorn , Gilad Almogy
发明人： Daniel I. Some , Silviu Reinhorn , Gilad Almogy
IPC分类号： G01V800
CPC分类号： G01N21/9501 , G01N21/4788 , G01N21/64 , G01N21/65 , G01N21/658
摘要： An optical inspection apparatus and method is provided that utilizes both linear and nonlinear optical phenomena to detect defects. Embodiments include irradiating a portion of the surface of an article, such as a semiconductor device, with a light beam, such as a scanning laser at an incident wavelength. The light emanating from the irradiated surface portion is then separated into light at the incident wavelength and light at one or more predetermined non-incident wavelengths, as by a diffraction grating, prism or filters. The light at the incident and nonincident wavelengths is sent to separate detectors, such as photomultipliers (PMT), which respectively convert the detected linear optical phenomena (representing, e.g., surface topography) into an electrical signal, and the detected nonlinear optical phenomena, such as fluorescence, Raman scattering and/or second harmonic generation, into electrical signals representing, e.g., chemical composition and material interfaces. The signal from each detector is sent to a processor, which generates a defect map based on the information gleaned from both the linear and nonlinear optical phenomena.
摘要翻译：提供一种利用线性和非线性光学现象来检测缺陷的光学检查装置和方法。实施例包括用入射波长的诸如扫描激光束的光束照射诸如半导体器件的物品的表面的一部分。然后将从照射的表面部分发出的光分离成入射波长的光和一个或多个预定非入射波长的光，如通过衍射光栅，棱镜或滤光器。将入射波长和非相干波长的光发送到分离的检测器，例如光电倍增管（PMT），其分别将检测到的线性光学现象（例如，表面形貌）转换为电信号，以及检测到的非线性光学现象作为荧光，拉曼散射和/或二次谐波产生，代表例如化学成分和材料界面的电信号。来自每个检测器的信号被发送到处理器，其基于从线性和非线性光学现象收集的信息产生缺陷图。

6. 发明授权

US06317514B1 Method and apparatus for inspection of patterned semiconductor wafers 有权
标题翻译：用于检查图案化半导体晶片的方法和装置
公开(公告)号：US06317514B1
公开(公告)日：2001-11-13
申请号：US09150296
申请日：1998-09-09
申请人： Silviu Reinhorn , Gilad Almogy
发明人： Silviu Reinhorn , Gilad Almogy
IPC分类号： G06K900
CPC分类号： G01N21/95692 , H01L22/12
摘要： Novel method and apparatus are disclosed for inspecting a wafer surface to detect the presence thereon of exposed conductive material, particularly for determining the integrity of contact holes and vias, in semiconductor wafer manufacturing. The method comprises the steps of irradiating a spot of the wafer surface with a beam having a wavelength sufficiently shorter than the working function of the metal, such as deep UV light beam, collecting the electrons released by the irradiated wafer, generating an electrical signal that is a function of the collected electrons, and inspecting the signal to determine whether the contact holes or vias within the irradiated wafer spot are open. The apparatus comprises a vacuum chamber having therein a stage and chuck for supporting the wafer. An illumination source generates irradiating energy which is formed into a beam using appropriate optics so as to obtain the desired beam spot of the wafer's surface. an electron detector collects electrons released from the wafer surface and sends a corresponding signal to a processor for processing the signal to determine whether the metal at the bottom of the hole is exposed. Optionally, the light scattered by the wafer is detected by detectors arranged around the illuminating beam.
摘要翻译：公开了新颖的方法和装置，用于检查晶片表面以检测其中暴露的导电材料的存在，特别是用于确定半导体晶片制造中的接触孔和通孔的完整性。该方法包括以下步骤：用波长足够短于诸如深UV光束的金属的工作功能的波长的光束照射晶片表面，收集被辐射的晶片释放的电子，产生电信号，是收集的电子的函数，并且检查信号以确定辐射晶片位置内的接触孔或通孔是否打开。该装置包括其中具有用于支撑晶片的台和卡盘的真空室。照明源产生照射能量，其使用适当的光学器件形成为光束，以便获得晶片表面的期望的光束点。电子检测器收集从晶片表面释放的电子，并将相应的信号发送到处理器以处理信号，以确定孔底部的金属是否暴露。可选地，通过布置在照明光束周围的检测器来检测被晶片散射的光。

7. 发明授权

US07463352B2 Method and apparatus for article inspection including speckle reduction 有权
标题翻译：用于物品检查的方法和装置，包括减少斑点
公开(公告)号：US07463352B2
公开(公告)日：2008-12-09
申请号：US11040528
申请日：2005-01-21
申请人： Avner Karpol , Silviu Reinhorn , Emanuel Elysaf , Shimon Yalov , Boaz Kenan
发明人： Avner Karpol , Silviu Reinhorn , Emanuel Elysaf , Shimon Yalov , Boaz Kenan
IPC分类号： G01N21/88
CPC分类号： G03F7/70616 , G01N21/4788 , G01N21/9501 , G01N21/956 , G01N2021/479 , G02B27/48 , G03F1/84
摘要： A method and apparatus for reducing speckle during inspection of articles used in the manufacture of semiconductor devices, including wafers, masks, photomasks, and reticles. The coherence of a light beam output by a coherent light source, such as a pulsed laser, is reduced by disposing elements in a light path. Examples of such elements include optical fiber bundles; optical light guides; optical gratings; an integrating sphere; and an acousto-optic modulator. These various elements may be combined as desired, such that light beams output by the element combinations have optical path length differences that are greater than a coherence length of the light beam output by the coherent light source.
摘要翻译：一种用于在用于制造半导体器件（包括晶片，掩模，光掩模和掩模版）的制品的检查期间减少斑点的方法和装置。通过在光路中设置元件来减少由相干光源（例如脉冲激光）输出的光束的相干性。这些元件的实例包括光纤束; 光学导光板; 光栅; 积分球; 和声光调制器。这些各种元件可以根据需要组合，使得由元件组合输出的光束具有的光路长度差大于由相干光源输出的光束的相干长度。

8. 发明申请

US20080231845A1 HIGH RESOLUTION WAFER INSPECTION SYSTEM 有权
标题翻译：高分辨率波浪检测系统
公开(公告)号：US20080231845A1
公开(公告)日：2008-09-25
申请号：US11952010
申请日：2007-12-06
申请人： Dan Grossman , Moshe Langer , Roman Kris , Silviu Reinhorn , Ron Naftali , Haim Feldman
发明人： Dan Grossman , Moshe Langer , Roman Kris , Silviu Reinhorn , Ron Naftali , Haim Feldman
IPC分类号： G01N21/95
CPC分类号： G01N21/17 , G01N21/1717 , G01N21/9501 , G01N2021/1719
摘要： A method for inspecting a region, including irradiating the region via an optical system with a pump beam at a pump wavelength. A probe beam at a probe wavelength irradiates the region so as to generate returning probe beam radiation from the region. The beams are scanned across the region at a scan rate. A detector receives the returning probe radiation, and forms an image of the region that corresponds to a resolution better than pump and probe Abbe limits of the optical system. Roles of the pump and probe beams may be alternated, and a modulation frequency of the pump beam may be changed, to produce more information. Information extracted from the probe signal can also differentiate between different materials on the region
摘要翻译：一种用于检查区域的方法，包括通过具有泵浦波长的泵浦光束的光学系统照射该区域。探测波长的探测光束照射该区域，以产生从该区域返回的探测光束辐射。以扫描速率跨越该区域扫描光束。检测器接收返回的探针辐射，并且形成对应于分辨率的区域的图像优于光学系统的泵浦和探针阿贝限制。泵和探针光束的作用可以交替变化，并且可以改变泵浦光束的调制频率，以产生更多的信息。从探测信号中提取的信息也可以区分该区域上的不同材料

9. 发明申请

US20060234784A1 Collapsible portable display 审中-公开
标题翻译：可折叠便携式显示屏
公开(公告)号：US20060234784A1
公开(公告)日：2006-10-19
申请号：US11166965
申请日：2005-06-27
申请人： Silviu Reinhorn
发明人： Silviu Reinhorn
IPC分类号： H04M1/00
CPC分类号： H04M1/0268 , H04M1/0272 , H04N9/3141
摘要： A collapsible portable video display is provided, which incorporates a mini-projector, a folding mirror, and a rear projection foldable screen. In one type of implementation the display is incorporated into a mobile consumer appliance, such as a cellphone, mobile DVD player, etc. In other type of implementation the display device is a stand-alone device having inputs for video and audio signals.
摘要翻译：提供了可折叠便携式视频显示器，其包括微型投影仪，折叠镜和后投影式可折叠屏幕。在一种类型的实现中，显示器被并入到诸如手机，移动DVD播放器等的移动消费者设备中。在其他类型的实现中，显示设备是具有用于视频和音频信号的输入的独立设备。

10. 发明授权

US06853475B2 Wafer defect detection system with traveling lens multi-beam scanner 有权
标题翻译：带移动透镜多光束扫描仪的晶圆缺陷检测系统
公开(公告)号：US06853475B2
公开(公告)日：2005-02-08
申请号：US10617449
申请日：2003-07-11
申请人： Haim Feldman , Emanuel Elyasaf , Nissim Elmaliach , Ron Naftali , Boris Golberg , Silviu Reinhorn
发明人： Haim Feldman , Emanuel Elyasaf , Nissim Elmaliach , Ron Naftali , Boris Golberg , Silviu Reinhorn
IPC分类号： G01B11/30 , G01N21/89 , G01N21/95 , G01N21/956 , H01L21/66 , G02F1/11
CPC分类号： G01N21/9501 , G01N21/8806 , G01N2021/8825 , G02B21/002 , G02B21/125
摘要： A system for inspecting a specimen, such as a semiconductor wafer that uses a laser light source for providing a beam of light. The beam is applied to a traveling lens acousto-optic device having an active region and responsive to an RF input signal to selectively generate plural traveling lenses in the active region. The traveling lens acousto-optic device is operative to receive the light beam and generate plural flying spot beams, at the respective focus of each of the generated traveling lenses. A light detector unit, having a plurality of detector sections, each detector section having a plurality of light detectors and at least one multi-stage storage device operative to receive in parallel an input from the plurality of light detectors, is used to generate useable scan data. Information stored in each of the storage devices is serially read out concurrently from the multiple stages.
摘要翻译：用于检查样本的系统，例如使用激光源提供光束的半导体晶片。光束被施加到具有有源区域并且响应于RF输入信号的移动透镜声光器件，以在有源区域中选择性地生成多个行进透镜。移动透镜声光装置可操作以在每个所生成的行进透镜的各个焦点处接收光束并产生多个飞点光束。一种具有多个检测器部分的光检测器单元，每个检测器部分具有多个光检测器和用于并行接收来自多个光检测器的输入的至少一个多级存储装置，用于产生可用的扫描数据。存储在每个存储设备中的信息从多个阶段同时连续地读出。

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