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    • 4. 发明申请
    • METHOD AND SYSTEM FOR CONTROLLING RESISTIVITY IN INGOTS MADE OF COMPENSATED FEEDSTOCK SILICON
    • 用于控制补偿馈电硅的功率的方法和系统
    • US20150243569A1
    • 2015-08-27
    • US14634282
    • 2015-02-27
    • Silicor Materials Inc.
    • Fritz G. KirschtMarcin WalerysiakMatthias HeuerAnis JouiniKamel Ounadjela
    • H01L21/66H01L31/0288H01L31/18
    • H01L22/26C30B11/006C30B11/04C30B29/06H01L31/0288H01L31/182H01L31/1876
    • Techniques for controlling resistivity in the formation of a silicon ingot from compensated feedstock silicon material prepares a compensated, upgraded metallurgical silicon feedstock for being melted to form a silicon melt. The compensated, upgraded metallurgical silicon feedstock provides semiconductor predominantly of a single type (p-type or n-type) for which the process assesses the concentrations of boron and phosphorus and adds a predetermined amount of boron, phosphorus, aluminum and/or gallium. The process further melts the silicon feedstock with the boron, phosphorus, aluminum and/or gallium to form a molten silicon solution from which to perform directional solidification and maintains the homogeneity of the resistivity of the silicon throughout the ingot. A balanced amount of phosphorus can be optionally added to the aluminum and/or gallium. Resistivity may also be measured repeatedly during ingot formation, and additional dopant may be added in response, either repeatedly or continuously.
    • 用于控制从补偿的原料硅材料形成硅锭中的电阻率的技术准备补偿的升级冶金硅原料以便熔化以形成硅熔体。 补偿的升级冶金硅原料提供半导体主要是单一类型(p型或n型),其过程评估硼和磷的浓度并加入预定量的硼,磷,铝和/或镓。 该方法进一步用硼,磷,铝和/或镓熔化硅原料,以形成熔融硅溶液,从而进行定向凝固,并保持硅在整个锭中的电阻率的均匀性。 可以任选地在铝和/或镓中加入平衡量的磷。 也可以在晶锭形成期间重复地测量电阻率,并且可以重复地或连续地响应地添加另外的掺杂剂。