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1. 发明授权

US08656778B2 In-plane capacitive mems accelerometer 有权
标题翻译：平面电容mems加速度计
公开(公告)号：US08656778B2
公开(公告)日：2014-02-25
申请号：US12982720
申请日：2010-12-30
申请人： Shuwen Guo , Alexander Spivak , Anita Fink
发明人： Shuwen Guo , Alexander Spivak , Anita Fink
IPC分类号： G01P15/125
CPC分类号： G01P15/125 , G01P15/0802 , G01P2015/0814
摘要： A system for determining in-plane acceleration of an object. The system includes an in-plane accelerometer with a substrate rigidly attached to an object, and a proof mass—formed from a single piece of material—movably positioned a predetermined distance above the substrate. The proof mass includes a plurality of electrode protrusions extending downward from the proof mass to form a gap of varying height between the proof mass and the substrate. The proof mass is configured to move in a direction parallel to the upper surfaces of each of the plurality of substrate electrodes when the object is accelerating, which results in a change in the area of the gap, and a change in capacitance between the substrate and the proof mass. The in-plane accelerometer can be fabricated using the same techniques used to fabricate an out-of-plane accelerometer and is suitable for high-shock applications.
摘要翻译：一种用于确定物体的平面内加速度的系统。该系统包括面内加速度计，其具有刚性地连接到物体的基底，以及由单个材料块质量形成的 - 可移动地定位在基底上方预定距离的检测体。检测质量包括从检验质量块向下延伸的多个电极突起，以在检验质量块和衬底之间形成不同高度的间隙。检测质量被配置为当物体加速时在平行于多个基板电极中的每一个的上表面的方向上移动，这导致间隙的面积的变化，以及基板和证明质量。平面内加速度计可以使用与制造平面外加速度计相同的技术制造，适用于高冲击应用。

2. 发明申请

US20120167685A1 IN-PLANE CAPACITIVE MEMS ACCELEROMETER 有权
标题翻译：内置电容式MEMS加速度计
公开(公告)号：US20120167685A1
公开(公告)日：2012-07-05
申请号：US12982720
申请日：2010-12-30
申请人： Shuwen Guo , Alexander Spivak , Anita Fink
发明人： Shuwen Guo , Alexander Spivak , Anita Fink
IPC分类号： G01P15/125
CPC分类号： G01P15/125 , G01P15/0802 , G01P2015/0814
摘要： A system for determining in-plane acceleration of an object. The system includes an in-plane accelerometer with a substrate rigidly attached to an object, and a proof mass—formed from a single piece of material—movably positioned a predetermined distance above the substrate. The proof mass includes a plurality of electrode protrusions extending downward from the proof mass to form a gap of varying height between the proof mass and the substrate. The proof mass is configured to move in a direction parallel to the upper surfaces of each of the plurality of substrate electrodes when the object is accelerating, which results in a change in the area of the gap, and a change in capacitance between the substrate and the proof mass. The in-plane accelerometer can be fabricated using the same techniques used to fabricate an out-of-plane accelerometer and is suitable for high-shock applications.
摘要翻译：一种用于确定物体的平面内加速度的系统。该系统包括面内加速度计，其具有刚性地连接到物体的基底，以及由单个材料块质量形成的 - 可移动地定位在基底上方预定距离的检测体。检测质量包括从检验质量块向下延伸的多个电极突起，以在检验质量块和衬底之间形成不同高度的间隙。检测质量被配置为当物体加速时在平行于多个基板电极中的每一个的上表面的方向上移动，这导致间隙的面积的变化，以及基板和证明质量。平面内加速度计可以使用与制造平面外加速度计相同的技术制造，适用于高冲击应用。

3. 发明申请

US20050279174A1 Linearity semi-conductive pressure sensor 有权
标题翻译：线性半导体压力传感器
公开(公告)号：US20050279174A1
公开(公告)日：2005-12-22
申请号：US10872055
申请日：2004-06-18
申请人： Kyong Park , Alexander Spivak
发明人： Kyong Park , Alexander Spivak
IPC分类号： G01L9/00 , G01L9/12
CPC分类号： G01L9/0073
摘要： A pressure sensor system involves a semi-conductive diaphragm electrode overlying a cavity in a semiconductor chip, with the center of the diaphragm secured to a mesa extending upwardly from the cavity. A second electrode is implemented by a heavily doped raised ring between the mesa and the periphery of the chip at the ring of maximum deflection of the diaphragm. The raised ring electrode is heavily doped with one polarity, with light doping near the base of the raised area, and the remainder of the cavity is heavily doped with the opposite polarity. The plot of Linearity Error versus width of the ring electrode, has a minimum, and the width of the ring electrode and related constructional features are selected to conform to the minimum point of the linearity function. The reference capacitor is arcuate in configuration and extends part way around and in immediate proximity to the sensor diaphragm.
摘要翻译：压力传感器系统包括覆盖半导体芯片中的空腔的半导电隔膜电极，其中隔膜的中心固定到从空腔向上延伸的台面。第二电极通过在隔膜的最大偏转环处的芯片的台面和周边之间的重掺杂凸起环实现。升高的环形电极被重掺杂，具有一个极性，在凸起区域的底部附近具有轻掺杂，并且空腔的其余部分以相反的极性重掺杂。线性误差与环形电极宽度的关系曲线最小，并且选择环形电极的宽度和相关的结构特征以符合线性函数的最小点。参考电容器是弓形的并且在传感器隔膜附近并且靠近传感器隔膜的一部分延伸。

4. 发明申请

US20050223783A1 Microfluidic system 审中-公开
标题翻译：微流体系统
公开(公告)号：US20050223783A1
公开(公告)日：2005-10-13
申请号：US10818769
申请日：2004-04-06
申请人： Alexander Spivak
发明人： Alexander Spivak
IPC分类号： F04B19/24 , F04B43/04 , F04B43/06 , G01N11/00 , G01N11/08
CPC分类号： G01N11/08 , F04B19/24 , F04B43/043 , F04B43/06
摘要： A system for measuring viscosity includes microfluidic passageways coupled to a micro-cavity, and semiconductive electrodes for applying an electric field across said electrodes. The resultant pressure increase and deflection of the diaphragm changes the capacitance of the MEMS capacitor. Pumps such as a thermal pump or a surface acoustic wave pump control flow of fluid to be measured to and from the micro-cavity. Semiconductor device fabrication techniques are employed to produce the viscosity measurement system.
摘要翻译：用于测量粘度的系统包括耦合到微腔的微流体通道和用于在所述电极上施加电场的半导体电极。所产生的压力增加和膜片的偏转改变了MEMS电容器的电容。诸如热泵或表面声波泵之类的泵控制待测微流体的流体的流动。采用半导体器件制造技术来生产粘度测量系统。

5. 发明申请

US20100018326A1 Coriolis effect mass flow meter and gyroscope 失效
公开(公告)号：US20100018326A1
公开(公告)日：2010-01-28
申请号：US12148162
申请日：2008-04-17
申请人： Chuang-Chia Lin , Alexander Spivak , Christopher Sanden , Odd Harald Steen Eriksen
发明人： Chuang-Chia Lin , Alexander Spivak , Christopher Sanden , Odd Harald Steen Eriksen
IPC分类号： G01F1/84
CPC分类号： G01F1/8454
摘要： A Coriolis effect device includes a housing defining an interior chamber having a central axis, an inlet, an outlet, a leading disc and a trailing disc. Each disc is supported for oscillatory movement within the interior chamber of the housing. The leading disc defines a leading flow path in fluid communication with the inlet and interior chamber, wherein a portion of the leading flow path extends radially with respect to the central axis. The trailing disc is axially spaced from the leading disc. The trailing disc defines a trailing flow path in fluid communication with the interior chamber and the outlet, wherein a portion of the trailing flow path extends radially with respect to the central axis. A phase difference between leading and trailing oscillating signals picked up from the disc movement can be used to determine a mass flow rate of fluid passing from the inlet to the outlet.

6. 发明授权

US07784359B2 Coriolis effect mass flow meter and gyroscope 失效
标题翻译：科里奥利效应质量流量计和陀螺仪
公开(公告)号：US07784359B2
公开(公告)日：2010-08-31
申请号：US12148162
申请日：2008-04-17
申请人： Chuang-Chia Lin , Alexander Spivak , Christopher Sanden , Odd Harald Steen Eriksen
发明人： Chuang-Chia Lin , Alexander Spivak , Christopher Sanden , Odd Harald Steen Eriksen
IPC分类号： G01F1/84
CPC分类号： G01F1/8454
摘要： A Coriolis effect device includes a housing defining an interior chamber having a central axis, an inlet, an outlet, a leading disc and a trailing disc. Each disc is supported for oscillatory movement within the interior chamber of the housing. The leading disc defines a leading flow path in fluid communication with the inlet and interior chamber, wherein a portion of the leading flow path extends radially with respect to the central axis. The trailing disc is axially spaced from the leading disc. The trailing disc defines a trailing flow path in fluid communication with the interior chamber and the outlet, wherein a portion of the trailing flow path extends radially with respect to the central axis. A phase difference between leading and trailing oscillating signals picked up from the disc movement can be used to determine a mass flow rate of fluid passing from the inlet to the outlet.
摘要翻译：科里奥利效应器件包括限定具有中心轴线，入口，出口，引导盘和后盘的内部腔室的壳体。每个碟片都支撑在外壳内腔内的振荡运动。引导盘限定与入口和内部腔室流体连通的引导流动路径，其中前导流动路径的一部分相对于中心轴线径向延伸。后盘与引导盘轴向间隔开。牵引盘限定与内部腔室和出口流体连通的后部流动路径，其中后部流动路径的一部分相对于中心轴线径向延伸。可以使用从盘移动拾取的前后振荡信号之间的相位差来确定从入口到出口的流体的质量流量。

7. 发明申请

US20090049927A1 Force balanced impeller flow meter for mass flow rate control 失效
公开(公告)号：US20090049927A1
公开(公告)日：2009-02-26
申请号：US11895196
申请日：2007-08-23
申请人： Alexander Spivak , Odd Harald Eriksen , Felix Goldenberg , Alexander Grichener , Christopher Sanden , Joe McTighe , Chuang-Chia Lin
发明人： Alexander Spivak , Odd Harald Eriksen , Felix Goldenberg , Alexander Grichener , Christopher Sanden , Joe McTighe , Chuang-Chia Lin
IPC分类号： G01F1/82
CPC分类号： G01F1/28 , G01F1/78
摘要： A force balanced mass flow meter is disclosed that includes a cylindrical sensor housing having an interior bore, an impeller body supported for axial rotation within the interior bore of the sensor housing, and including structure for converting fluid inertia into flow induced torque when fluid flows relative to the impeller body, a proximity sensor for measuring a rotation angle of the impeller body relative to the sensor housing, an electromagnet for generating a magnetic field about the sensor housing to prevent rotation of the impeller body, electronics for determining electrical values from the proximity sensor when fluid flows relative to the impeller body and a controller for controlling current supplied to the electromagnet in response to electrical values determined from the proximity sensor, to generate a magnetic field sufficient to prevent impeller rotation.

8. 发明申请

US20060185436A1 Linearity semi-conductive pressure sensor 审中-公开
公开(公告)号：US20060185436A1
公开(公告)日：2006-08-24
申请号：US11405960
申请日：2006-04-17
申请人： Kyong Park , Alexander Spivak
发明人： Kyong Park , Alexander Spivak
IPC分类号： G01L9/12
CPC分类号： G01L9/0073
摘要： A pressure sensor system involves a semi-conductive diaphragm electrode overlying a cavity in a semiconductor chip, with the center of the diaphragm secured to a mesa extending upwardly from the cavity. A second electrode is implemented by a heavily doped raised ring between the mesa and the periphery of the chip at the ring of maximum deflection of the diaphragm. The raised ring electrode is heavily doped with one polarity, with light doping near the base of the raised area, and the remainder of the cavity is heavily doped with the opposite polarity. The plot of Linearity Error versus width of the ring electrode, has a minimum, and the width of the ring electrode and related constructional features are selected to conform to the minimum point of the linearity function. The reference capacitor is arcuate in configuration and extends part way around and in immediate proximity to the sensor diaphragm.

9. 发明授权

US08659307B2 Capacitive sensors for monitoring load bearing on pins 有权
标题翻译：电容传感器用于监控引脚上的负载
公开(公告)号：US08659307B2
公开(公告)日：2014-02-25
申请号：US12857793
申请日：2010-08-17
申请人： Harald Eriksen , Alexander Spivak , Christopher Sanden
发明人： Harald Eriksen , Alexander Spivak , Christopher Sanden
IPC分类号： G01R27/26
CPC分类号： B64D29/06 , E05B41/00 , E05B2047/0069 , E05C19/14 , G01L1/142 , G01L5/0004 , Y10T292/0949
摘要： A sensor for monitoring external loads acting on a pin assembly includes a pin having an axial interior bore defined therein and having a length defined from a first end to an opposed second end thereof. A core pin is mounted axially within the interior bore of the pin spaced radially inwardly from the interior bore for relative displacement with respect to the pin. A capacitor is provided having an inner capacitor plate mounted to the core pin, and an outer capacitor plate mounted to the pin, such that relative displacement of the core and the pin due to external loading on the pin results in relative displacement of the inner and outer capacitor plates. The capacitor is configured and adapted to be connected to an electrical circuit to produce signals indicative of external loading on the pin based on relative displacement of the inner and outer capacitor plates.
摘要翻译：用于监测作用在销组件上的外部负载的传感器包括具有限定在其中的轴向内孔并具有从第一端限定到其相对的第二端的长度的销。芯销轴向地安装在销的内孔内，与内孔径向向内间隔开，以相对于销的相对位移。提供一种电容器，其具有安装到芯销的内部电容器板和安装到销的外部电容器板，使得由于外部负载引起的芯和销的相对位移导致内部和/ 外部电容器板。电容器被配置并适于连接到电路，以基于内部和外部电容器板的相对位移产生指示引脚上的外部负载的信号。

10. 发明申请

US20120043978A1 CAPACITIVE SENSORS FOR MONITORING LOAD BEARING ON PINS 有权
标题翻译：用于监测PINS上负载轴承的电容式传感器
公开(公告)号：US20120043978A1
公开(公告)日：2012-02-23
申请号：US12857793
申请日：2010-08-17
申请人： Odd Harald Steen Eriksen , Alexander Spivak , Christopher Sanden
发明人： Odd Harald Steen Eriksen , Alexander Spivak , Christopher Sanden
IPC分类号： G01R27/26 , E05C19/10
CPC分类号： B64D29/06 , E05B41/00 , E05B2047/0069 , E05C19/14 , G01L1/142 , G01L5/0004 , Y10T292/0949
摘要： A sensor for monitoring external loads acting on a pin assembly includes a pin having an axial interior bore defined therein and having a length defined from a first end to an opposed second end thereof. A core pin is mounted axially within the interior bore of the pin spaced radially inwardly from the interior bore for relative displacement with respect to the pin. A capacitor is provided having an inner capacitor plate mounted to the core pin, and an outer capacitor plate mounted to the pin, such that relative displacement of the core and the pin due to external loading on the pin results in relative displacement of the inner and outer capacitor plates. The capacitor is configured and adapted to be connected to an electrical circuit to produce signals indicative of external loading on the pin based on relative displacement of the inner and outer capacitor plates.
摘要翻译：用于监测作用在销组件上的外部负载的传感器包括具有限定在其中的轴向内孔并具有从第一端限定到其相对的第二端的长度的销。芯销轴向地安装在销的内孔内，与内孔径向向内间隔开，以相对于销的相对位移。提供一种电容器，其具有安装到芯销的内部电容器板和安装到销的外部电容器板，使得由于外部负载引起的芯和销的相对位移导致内部和/ 外部电容器板。电容器被配置并适于连接到电路，以基于内部和外部电容器板的相对位移产生指示引脚上的外部负载的信号。

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