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1. 发明授权

US08617078B2 Ultrasonic transducer and ultrasonic diagnostic device using same 有权
标题翻译：超声波换能器和超声波诊断装置使用相同
公开(公告)号：US08617078B2
公开(公告)日：2013-12-31
申请号：US13577816
申请日：2011-01-25
申请人： Shuntaro Machida , Taiichi Takezaki , Toshiyuki Mine
发明人： Shuntaro Machida , Taiichi Takezaki , Toshiyuki Mine
IPC分类号： A61B8/00
CPC分类号： B06B1/0292 , A61B8/00
摘要： In an ultrasonic transducer comprising a first electrode, a first insulating film disposed on the first electrode, a hollow part provided above the first insulating film and disposed between surfaces above and below the hollow part, a second insulating film disposed above the hollow part, and a second electrode disposed on the second insulating film, a first conductive film disposed on a side of the surface below the hollow part and a second conductive film disposed on a side of the surface above the hollow part are provided, the first conductive film and the second conductive film are disposed so that they overlap with a region in which the surfaces above and below the hollow part contact with each other as seen from above when the transducer is driven, and they do not overlap with each other in the region as seen from above.
摘要翻译：在包括第一电极的超声换能器中，设置在第一电极上的第一绝缘膜，设置在第一绝缘膜之上并设置在中空部分之上和之下的表面之间的中空部分，设置在中空部分上方的第二绝缘膜，以及设置在第二绝缘膜上的第二电极，设置在中空部分下方的表面侧的第一导电膜和设置在中空部分上方表面侧的第二导电膜，第一导电膜和第二导电膜被设置为使得它们与中空部分的上表面和下表面之间的表面彼此重叠的区域与传感器被驱动时从上方观察到，并且它们在区域中彼此不重叠，如从以上。

2. 发明申请

US20120316445A1 Ultrasonic transducer and ultrasonic diagnostic device using same 有权
标题翻译：超声波换能器和超声波诊断装置使用相同
公开(公告)号：US20120316445A1
公开(公告)日：2012-12-13
申请号：US13577816
申请日：2011-01-25
申请人： Shuntaro Machida , Taiichi Takezaki , Toshiyuki Mine
发明人： Shuntaro Machida , Taiichi Takezaki , Toshiyuki Mine
IPC分类号： H02N1/08 , A61B8/00
CPC分类号： B06B1/0292 , A61B8/00
摘要： In an ultrasonic transducer comprising a first electrode, a first insulating film disposed on the first electrode, a hollow part provided above the first insulating film and disposed between surfaces above and below the hollow part, a second insulating film disposed above the hollow part, and a second electrode disposed on the second insulating film, a first conductive film disposed on the side of the surface below the hollow part and a second conductive film disposed on the side of the surface above the hollow part are provided, the first conductive film and the second conductive film are disposed so that they overlap with a region in which the surfaces above and below the hollow part contact with each other as seen from above when the transducer is driven, and they do not overlap with each other in the region as seen from above. With such a configuration, there are provided a structure suitable for, even when the surface above the hollow part contacts with the surface below the hollow part, suppressing concentration of electric fields and electric currents in the insulating films in the contact region, and suppressing injection of electrical charge into the insulating films and degradation of dielectric strength thereof, and an ultrasonic diagnostic device using it.
摘要翻译：在包括第一电极的超声换能器中，设置在第一电极上的第一绝缘膜，设置在第一绝缘膜之上并设置在中空部分之上和之下的表面之间的中空部分，设置在中空部分上方的第二绝缘膜，以及设置在第二绝缘膜上的第二电极，设置在中空部分下方的表面侧的第一导电膜和设置在中空部分上方表面侧的第二导电膜，第一导电膜和第二导电膜被设置为使得它们与中空部分的上表面和下表面之间的表面彼此重叠的区域与传感器被驱动时从上方观察到，并且它们在区域中彼此不重叠，如从以上。通过这样的结构，即使当中空部件上方的表面与中空部件下方的表面接触时，也能够抑制接触区域中的绝缘膜中的电场和电流的集中，并抑制注入的绝缘膜中的电荷和介电强度的降低，以及使用它的超声波诊断装置。

3. 发明申请

US20090322181A1 ULTRASONIC TRANSDUCER AND METHOD OF MANUFACTURING THE SAME 审中-公开
标题翻译：超声波传感器及其制造方法
公开(公告)号：US20090322181A1
公开(公告)日：2009-12-31
申请号：US12484685
申请日：2009-06-15
申请人： SHUNTARO MACHIDA , Takashi Kobayashi , Taiichi Takezaki
发明人： SHUNTARO MACHIDA , Takashi Kobayashi , Taiichi Takezaki
IPC分类号： H02N11/00 , G10K9/12
CPC分类号： B06B1/0292
摘要： A technique for a capacitive micromachined ultrasonic transducer (CMUT) for achieving high transmitted sound pressure and high receiver sensitivity is provided. An opening portion (7a) having a diameter of, for example, about 10 μm is provided at a center portion of a top electrode (7). The opening portion (7a) is provided to include a contact region (14) therewithin where a lower surface of a second insulating film covering a lower surface of the top electrode (7) and an upper surface of a first insulating film covering an upper surface of a bottom electrode (3) are contacted with each other upon driving the ultrasonic transducer when viewed in plan view, so that the ultrasonic transducer has a structure in which the first and second insulating films are not sandwiched by the top electrode (7) and the bottom electrode (3) in the contact region (14).
摘要翻译：提供了一种用于实现高透射声压和高接收灵敏度的电容微加工超声波换能器（CMUT）的技术。在顶部电极（7）的中央部设置具有例如约10μm的直径的开口部（7a）。开口部分（7a）设置成包括其中覆盖上电极（7）的下表面的第二绝缘膜的下表面和覆盖上电极（7）的第一绝缘膜的上表面的接触区域（14）在从俯视观察时驱动超声波换能器时，底部电极（3）彼此接触，使得超声波换能器具有其中第一和第二绝缘膜不被顶部电极（7）和接触区域（14）中的底部电极（3）。

4. 发明授权

US09941817B2 Ultrasonic transducer and ultrasonic diagnostic equipment using the same 有权
公开(公告)号：US09941817B2
公开(公告)日：2018-04-10
申请号：US13879439
申请日：2011-10-13
申请人： Taiichi Takezaki , Shuntaro Machida
发明人： Taiichi Takezaki , Shuntaro Machida
IPC分类号： H02N1/08 , A61B8/00 , B06B1/02 , G01N29/24 , H04R19/04
CPC分类号： H02N1/08 , A61B8/4483 , A61B8/4494 , B06B1/0292 , G01N29/2406 , H04R19/04
摘要： High transfer sound pressure and high reception sensitivity are realized, and reliability is improved in terms of long term operation, in a capacitive detector-type ultrasonic transducer (CMUT). The ultrasonic transducer, which has a lower electrode (201), a hollow portion (202) that is formed on the lower electrode and surrounded by insulating films (209,208), an upper electrode (205) that is formed on the hollow portion, and a plurality of insulating film projections (204) that are formed in the hollow portion (202), comprises a plurality of rigid members (203) that are formed on the hollow portion, either the lower electrode (201) and/or the upper electrode (205) is disposed in a position that does not overlap with the insulating film projections (204) when viewed from the upper surface by carving out the portion that overlaps with the insulating film projections (204), and the respective rigid members (203) are disposed such that a region is present that overlaps with the insulating film projections (204) when viewed from the upper surface.

5. 发明申请

US20130241345A1 ULTRASONIC TRANSDUCER AND ULTRASONIC DIAGNOSTIC EQUIPMENT USING THE SAME 有权
标题翻译：超声波传感器和超声波诊断设备
公开(公告)号：US20130241345A1
公开(公告)日：2013-09-19
申请号：US13879439
申请日：2011-10-13
申请人： Taiichi Takezaki , Shuntaro Machida
发明人： Taiichi Takezaki , Shuntaro Machida
IPC分类号： H02N1/08
CPC分类号： H02N1/08 , A61B8/4483 , A61B8/4494 , B06B1/0292 , G01N29/2406 , H04R19/04
摘要： High transfer sound pressure and high reception sensitivity are realized, and reliability is improved in terms of long term operation, in a capacitive detector-type ultrasonic transducer (CMUT). The ultrasonic transducer, which has a lower electrode (201), a hollow portion (202) that is formed on the lower electrode and surrounded by insulating films (209,208), an upper electrode (205) that is formed on the hollow portion, and a plurality of insulating film projections (204) that are formed in the hollow portion (202), comprises a plurality of rigid members (203) that are formed on the hollow portion, either the lower electrode (201) and/or the upper electrode (205) is disposed in a position that does not overlap with the insulating film projections (204) when viewed from the upper surface by carving out the portion that overlaps with the insulating film projections (204), and the respective rigid members (203) are disposed such that a region is present that overlaps with the insulating film projections (204) when viewed from the upper surface.
摘要翻译：实现了高传输声压和高接收灵敏度，并且在电容式检测器型超声换能器（CMUT）中，长期运行方面的可靠性提高。具有下部电极（201）的超声波换能器，形成在下部电极上并被绝缘膜（209,208）包围的中空部分（202），形成在中空部分上的上部电极（205），以及形成在中空部分（202）中的多个绝缘膜突起（204）包括形成在中空部分上的多个刚性构件（203），下部电极（201）和/或上部电极（205）通过雕刻出与绝缘膜突起（204）重叠的部分，从上表面观察时，与绝缘膜突起（204）不重叠的位置，以及各个刚性部件（203）被布置成使得当从上表面观察时存在与绝缘膜突起（204）重叠的区域。

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