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    • 1. 发明授权
    • Liquid droplet ejection system and control program of ejection condition of compositions
    • 液滴喷射系统和组合物喷射条件控制程序
    • US08322847B2
    • 2012-12-04
    • US13049078
    • 2011-03-16
    • Shunpei YamazakiJun KoyamaYasuyuki AraiShinji MaekawaYohei Kanno
    • Shunpei YamazakiJun KoyamaYasuyuki AraiShinji MaekawaYohei Kanno
    • B41J2/01B05B7/06H01L21/36
    • H01L51/0004H01L51/56H05K1/0269H05K3/0008H05K3/1241
    • When using a liquid droplet ejection method, a conventional photomask is not required, however, it is required instead that a moving path of a nozzle or a substrate is controlled with accuracy at least in ejecting liquid droplets. According to the characteristics of compositions to be ejected or their pattern, such ejection conditions are desirably set as the moving rate of a nozzle or a substrate, ejection quantity, ejection distance and ejection rate of compositions, atmosphere of the space that the compositions are ejected, the temperature and moisture of the space, and heating temperature of the substrate. A liquid droplet ejection system in accordance with the invention comprises an input means for inputting data of a thin film pattern, a set means for setting a nozzle for a ejecting a composition containing a material for forming the thin film or setting a moving path of the substrate to which the composition is ejected, an image pick-up means for detecting an alignment marker formed on a substrate and a control means for controlling the moving path of the nozzle or the substrate.
    • 当使用液滴喷射方法时,不需要常规的光掩模,然而,需要至少在喷射液滴时精确地控制喷嘴或基板的移动路径。 根据要喷射的组合物或其图案的特征,这种喷射条件期望设置为喷嘴或基底的移动速率,喷射量,喷射距离和组合物的喷射速率,组合物喷出的空间的气氛 ,空间的温度和湿度,以及基板的加热温度。 根据本发明的液滴喷射系统包括用于输入薄膜图案的数据的输入装置,用于设置用于喷射包含用于形成薄膜的材料的组合物的喷嘴的设定装置或设置该薄膜图案的移动路径 用于检测形成在基板上的取向标记的图像拾取装置和用于控制喷嘴或基板的移动路径的控制装置。
    • 4. 发明申请
    • Liquid droplet ejection system and control program of ejection condition of compositions
    • 液滴喷射系统和组合物喷射条件控制程序
    • US20050122351A1
    • 2005-06-09
    • US10970712
    • 2004-10-21
    • Shunpei YamazakiJun KoyamaYasuyuki AraiShinji MaekawaYohei Kanno
    • Shunpei YamazakiJun KoyamaYasuyuki AraiShinji MaekawaYohei Kanno
    • B05C5/00B05C11/10H01L51/40H01L51/56H05K1/02H05K3/00H05K3/12B41J29/38
    • H01L51/0004H01L51/56H05K1/0269H05K3/0008H05K3/1241
    • When using a liquid droplet ejection method, a conventional photomask is not required, however, it is required instead that a moving path of a nozzle or a substrate is controlled with accuracy at least in ejecting liquid droplets. According to the characteristics of compositions to be ejected or their pattern, such ejection conditions are desirably set as the moving rate of a nozzle or a substrate, ejection quantity, ejection distance and ejection rate of compositions, atmosphere of the space that the compositions are ejected, the temperature and moisture of the space, and heating temperature of the substrate. A liquid droplet ejection system in accordance with the invention comprises an input means for inputting data of a thin film pattern, a set means for setting a nozzle for a ejecting a composition containing a material for forming the thin film or setting a moving path of the substrate to which the composition is ejected, an image pick-up means for detecting an alignment marker formed on a substrate and a control means for controlling the moving path of the nozzle or the substrate.
    • 当使用液滴喷射方法时,不需要常规的光掩模,然而,需要至少在喷射液滴时精确地控制喷嘴或基板的移动路径。 根据要喷射的组合物或其图案的特征,这种喷射条件期望设置为喷嘴或基底的移动速率,喷射量,喷射距离和组合物的喷射速率,组合物喷出的空间的气氛 ,空间的温度和湿度,以及基板的加热温度。 根据本发明的液滴喷射系统包括用于输入薄膜图案的数据的输入装置,用于设置用于喷射包含用于形成薄膜的材料的组合物的喷嘴的设定装置或设置该薄膜图案的移动路径 用于检测形成在基板上的取向标记的图像拾取装置和用于控制喷嘴或基板的移动路径的控制装置。
    • 6. 发明申请
    • Liquid Droplet Ejection System and Control Program of Ejection Condition of Compositions
    • 液滴喷射系统和组合喷射条件控制程序
    • US20110164083A1
    • 2011-07-07
    • US13049078
    • 2011-03-16
    • Shunpei YamazakiJun KoyamaYasuyuki AraiShihji MaekawaYohei Kanno
    • Shunpei YamazakiJun KoyamaYasuyuki AraiShihji MaekawaYohei Kanno
    • B41J2/07
    • H01L51/0004H01L51/56H05K1/0269H05K3/0008H05K3/1241
    • When using a liquid droplet ejection method, a conventional photomask is not required, however, it is required instead that a moving path of a nozzle or a substrate is controlled with accuracy at least in ejecting liquid droplets. According to the characteristics of compositions to be ejected or their pattern, such ejection conditions are desirably set as the moving rate of a nozzle or a substrate, ejection quantity, ejection distance and ejection rate of compositions, atmosphere of the space that the compositions are ejected, the temperature and moisture of the space, and heating temperature of the substrate. A liquid droplet ejection system in accordance with the invention comprises an input means for inputting data of a thin film pattern, a set means for setting a nozzle for a ejecting a composition containing a material for forming the thin film or setting a moving path of the substrate to which the composition is ejected, an image pick-up means for detecting an alignment marker formed on a substrate and a control means for controlling the moving path of the nozzle or the substrate.
    • 当使用液滴喷射方法时,不需要常规的光掩模,然而,需要至少在喷射液滴时精确地控制喷嘴或基板的移动路径。 根据要喷射的组合物或其图案的特征,这种喷射条件期望设置为喷嘴或基底的移动速率,喷射量,喷射距离和组合物的喷射速率,组合物喷出的空间的气氛 ,空间的温度和湿度,以及基板的加热温度。 根据本发明的液滴喷射系统包括用于输入薄膜图案的数据的输入装置,用于设置用于喷射包含用于形成薄膜的材料的组合物的喷嘴的设定装置或设置该薄膜图案的移动路径 用于检测形成在基板上的取向标记的图像拾取装置和用于控制喷嘴或基板的移动路径的控制装置。