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1. 发明授权

US4828668A Sputtering system for deposition on parallel substrates 失效
标题翻译：用于沉积在平行衬底上的溅射系统
公开(公告)号：US4828668A
公开(公告)日：1989-05-09
申请号：US23398
申请日：1987-03-09
申请人： Shunpei Yamazaki , Kunio Suzuki , Mikio Kinka , Takeshi Fukada , Masayoshi Abe , Katsuhiko Shibata , Hisato Shinohara , Masato Susukida
发明人： Shunpei Yamazaki , Kunio Suzuki , Mikio Kinka , Takeshi Fukada , Masayoshi Abe , Katsuhiko Shibata , Hisato Shinohara , Masato Susukida
IPC分类号： C23C14/34 , C23C14/56
CPC分类号： C23C14/56 , C23C14/3464
摘要： An improved sputtering system for depositing film on a substrate is disclosed. The system comprises a vacuum chamber, a pair of electrodes with a target inbetween, a cart on which a plurality of substrates are mounted and a transportation mechanism for transporting the cart passing through the deposition space between the electrodes. The substrates are mounted perpendicular to the electric field induced by the pair of electrodes.
摘要翻译：公开了一种用于在衬底上沉积膜的改进的溅射系统。该系统包括真空室，一对具有目标物的电极，其上安装有多个基板的手推车和用于传送通过电极之间的沉积空间的车辆的运送机构。基板垂直于由一对电极引起的电场安装。

2. 发明授权

US4959533A Photosensitive semiconductor contact image sensor 失效
标题翻译：感光半导体接触式图像传感器
公开(公告)号：US4959533A
公开(公告)日：1990-09-25
申请号：US259522
申请日：1988-10-18
申请人： Shunpei Yamazaki , Takeshi Fukada , Mitsunori Sakama , Hisato Shinohara , Nobumitsu Amachi , Naoya Sakamoto , Takashi Inuzima
发明人： Shunpei Yamazaki , Takeshi Fukada , Mitsunori Sakama , Hisato Shinohara , Nobumitsu Amachi , Naoya Sakamoto , Takashi Inuzima
IPC分类号： H01L27/146 , H04N1/031
CPC分类号： H04N1/0316 , H01L27/14623 , H01L27/14665 , H04N1/0313
摘要： An improved image sensor is described. The sensor includes a photosensitive semiconductor device comprises a glass substrate, a light blocking electrode formed on the glass substrate, a photosensitive semiconductor film formed on the electrode, a transparent electrode. A light window is opened through the semiconductor device. On the light path including the light window, an uneven interface is formed in order that light rays incident on the sensor is modified and reachs the photosensitive semiconductor after reflection on an original.

3. 发明授权

US5091638A Contact image sensor having light-receiving windows 失效
标题翻译：联系具有收光窗口的图像传感器
公开(公告)号：US5091638A
公开(公告)日：1992-02-25
申请号：US554342
申请日：1990-07-19
申请人： Shunpei Yamazaki , Takeshi Fukada , Mitsunori Sakama , Hisato Shinohara , Nobumitsu Amachi , Naoya Sakamoto , Takashi Inuzima
发明人： Shunpei Yamazaki , Takeshi Fukada , Mitsunori Sakama , Hisato Shinohara , Nobumitsu Amachi , Naoya Sakamoto , Takashi Inuzima
IPC分类号： H01L27/146 , H04N1/031
CPC分类号： H04N1/0316 , H01L27/14623 , H01L27/14665 , H04N1/0313
摘要： An improved image sensor is described. The sensor includes a photosensitive semiconductor device comprises a glass substrate, a light blocking electrode formed on the glass substrate, a photosensitive semiconductor film formed on the electrode, a transparent electrode. A light window is opened through the semiconductor device. On the light path including the light window, an uneven interface is formed in order that light rays incident on the sensor is modified and reachs the photosensitive semiconductor after reflection on an original.

4. 发明授权

US06720576B1 Plasma processing method and photoelectric conversion device 失效
公开(公告)号：US06720576B1
公开(公告)日：2004-04-13
申请号：US09149289
申请日：1998-09-09
申请人： Setsuo Nakajima , Yasuyuki Arai , Hisato Shinohara , Masayoshi Abe
发明人： Setsuo Nakajima , Yasuyuki Arai , Hisato Shinohara , Masayoshi Abe
IPC分类号： H01L2904
CPC分类号： H01L31/202 , H01L31/03921 , H01L31/046 , H01L31/0463 , H01L31/206 , Y02E10/50 , Y02P70/521
摘要： A photoelectric conversion device taking the form of a thin film and having a substrate exhibiting poor thermal resistance. The device prevents thermal deformation which would normally be caused by local application of excessive heat to the substrate. The device has output terminals permitting the output from the device to be taken out. The output terminals are formed on the surface of the substrate opposite to the photoelectric conversion device. The device further includes electrical connector portions for electrically connecting the electrodes of the device with the output terminals. The present invention also provides a method of treating a substrate having poor thermal resistance with a plasma with a high throughput. The substrate is continuously supplied into a reaction chamber and treated with a plasma. This supply operation is carried out in such a way that the total length of the substrate existing in a plasma processing region formed by electrodes is longer than the length of the electrodes.

5. 发明授权

US07095090B2 Photoelectric conversion device 失效
标题翻译：光电转换装置
公开(公告)号：US07095090B2
公开(公告)日：2006-08-22
申请号：US10821879
申请日：2004-04-12
申请人： Setsuo Nakajima , Yasuyuki Arai , Hisato Shinohara , Masayoshi Abe
发明人： Setsuo Nakajima , Yasuyuki Arai , Hisato Shinohara , Masayoshi Abe
IPC分类号： H01L31/0203
CPC分类号： H01L31/202 , H01L31/03921 , H01L31/046 , H01L31/0463 , H01L31/206 , Y02E10/50 , Y02P70/521
摘要： A photoelectric conversion device taking the form of a thin film and having a substrate exhibiting poor thermal resistance. The device prevents thermal deformation which would normally be caused by local application of excessive heat to the substrate. The device has output terminals permitting the output from the device to be taken out. The output terminals are formed on the surface of the substrate opposite to the photoelectric conversion device. The device further includes electrical connector portions for electrically connecting the electrodes of the device with the output terminals. The present invention also provides a method of treating a substrate having poor thermal resistance with a plasma with a high throughput. The substrate is continuously supplied into a reaction chamber and treated with a plasma. This supply operation is carried out in such a way that the total length of the substrate existing in a plasma processing region formed by electrodes is longer than the length of the electrodes.
摘要翻译：采用薄膜形式并具有差的耐热性的基板的光电转换装置。该装置防止通常由于对基板局部施加过多热量引起的热变形。该装置具有允许从装置输出的输出端子被取出。输出端子形成在与光电转换装置相对的基板的表面上。该装置还包括用于将装置的电极与输出端子电连接的电连接器部分。本发明还提供了一种以高通量用等离子体处理耐热性差的基板的方法。将基板连续地供给到反应室中并用等离子体处理。这种供给操作是这样进行的：存在于由电极形成的等离子体处理区域中的基板的总长度比电极的长度长。

6. 发明授权

US5821597A Photoelectric conversion device 失效
公开(公告)号：US5821597A
公开(公告)日：1998-10-13
申请号：US554241
申请日：1995-11-08
申请人： Setsuo Nakajima , Yasuyuki Arai , Hisato Shinohara , Masayoshi Abe
发明人： Setsuo Nakajima , Yasuyuki Arai , Hisato Shinohara , Masayoshi Abe
IPC分类号： H01L27/142 , H01L31/0392 , H01L31/20 , H01L31/075 , H01L23/04 , H01L31/105 , H01L31/117
CPC分类号： H01L31/206 , H01L31/02008 , H01L31/03921 , H01L31/046 , H01L31/0463 , H01L31/0465 , H01L31/202 , Y02E10/50 , Y02P70/521
摘要： A photoelectric conversion device taking the form of a thin film and having a substrate exhibiting poor thermal resistance. The device prevents thermal deformation which would normally be caused by local application of excessive heat to the substrate. The device has output terminals permitting the output from the device to be taken out. The output terminals are formed on the surface of the substrate opposite to the photoelectric conversion device. The device further includes electrical connector portions for electrically connecting the electrodes of the device with the output terminals. The present invention also provides a method of treating a substrate having poor thermal resistance with a plasma with a high throughput. The substrate is continuously supplied into a reaction chamber and treated with a plasma. This supply operation is carried out in such a way that the total length of the substrate existing in a plasma processing region formed by electrodes is longer than the length of the electrodes.

7. 发明授权

US06827787B2 Conveyor device and film formation apparatus for a flexible substrate 有权
标题翻译：用于柔性基底的输送装置和成膜装置
公开(公告)号：US06827787B2
公开(公告)日：2004-12-07
申请号：US09777280
申请日：2001-02-05
申请人： Masato Yonezawa , Naoto Kusumoto , Hisato Shinohara
发明人： Masato Yonezawa , Naoto Kusumoto , Hisato Shinohara
IPC分类号： C23C1600
CPC分类号： C23C16/545
摘要： With a conventional cylindrical can method, a region used as a film formation ground electrode is a portion of the cylindrical can, and an apparatus becomes larger in size in proportion to the surface area of the electrode. A conveyor device and a film formation apparatus having the conveyor device are provided, which have a unit for continuously conveying a flexible substrate from one end to the other end, and which are characterized in that a plurality of cylindrical rollers are provided between the one end and the other end along an arc with a radius R, the cylindrical rollers being arranged such that their center axes run parallel to each other, and that a mechanism for conveying the flexible substrate while the substrate is in contact with each of the plurality of cylindrical rollers is provided.
摘要翻译：采用常规的圆筒罐法，用作成膜接地电极的区域是圆筒形罐的一部分，并且设备的尺寸与电极的表面积成比例变大。本发明提供一种具有输送装置的输送装置和成膜装置，其具有从一端向另一端连续输送柔性基板的单元，其特征在于，在一端并且另一端沿着具有半径R的圆弧，所述圆柱滚子被布置成使得它们的中心轴彼此平行地延伸;以及用于在所述基板与所述多个圆柱体中的每一个接触的同时传送所述柔性基板的机构提供滚筒。

8. 发明授权

US5708252A Excimer laser scanning system 失效
标题翻译：准分子激光扫描系统
公开(公告)号：US5708252A
公开(公告)日：1998-01-13
申请号：US589341
申请日：1996-01-22
申请人： Hisato Shinohara , Akira Sugawara
发明人： Hisato Shinohara , Akira Sugawara
IPC分类号： B23K26/06 , B23K26/073 , H01L21/20 , H05K1/03 , H05K3/02 , H05K3/38
CPC分类号： B23K26/0738 , B23K26/066 , B23K26/364 , B23K26/40 , H01L21/2026 , B23K2203/172 , H05K1/0306 , H05K3/027 , H05K3/38
摘要： A method for treating an object with a laser including emitting a laser beam from a laser; expanding the laser beam in a first direction; removing a portion of the laser beam though a mask, the portion including at least edges of the expanded laser beam extending in the first direction; and condensing the laser beam in a second direction orthogonal to the first direction in order to form a line-shaped laser beam on an object.
摘要翻译：一种使用激光处理物体的方法，包括从激光器发射激光束; 沿第一方向扩展激光束; 通过掩模去除所述激光束的一部分，所述部分至少包括沿所述第一方向延伸的所述扩大的激光束的边缘; 并且在与第一方向正交的第二方向上会聚激光束，以便在物体上形成线形激光束。

9. 发明授权

US07365004B2 Method for manufacturing semiconductor device 有权
标题翻译：制造半导体器件的方法
公开(公告)号：US07365004B2
公开(公告)日：2008-04-29
申请号：US11033380
申请日：2005-01-12
申请人： Hiroki Adachi , Kazuo Nishi , Masato Yonezawa , Yukihiro Isobe , Hisato Shinohara
发明人： Hiroki Adachi , Kazuo Nishi , Masato Yonezawa , Yukihiro Isobe , Hisato Shinohara
IPC分类号： H01L21/4763
CPC分类号： H01L31/03921 , H01L31/035281 , H01L31/046 , H01L31/0463 , Y02E10/50
摘要： The invention is aimed to prevent that fall of characteristic of a solar battery and producing yield caused by particles of powder condition generating from working part at laser beam process in the method producing the solar battery by laser beam process. The constitution of the invention is characterized by comprising: a first step forming the lower electrode and the semiconductor layer on the insulating substrate by laminating; a second step forming a protective film on surface of the semiconductor; a third step forming an opening portion at the semiconductor layer, or the semiconductor layer and the lower electrode by laser beam process after the second step; and a fourth step removing the protective film.
摘要翻译：本发明旨在防止太阳能电池的特性的下降，并且通过激光束工艺在产生太阳能电池的方法中，在激光束工艺产生的粉末状态的颗粒产生的产率产生。本发明的结构的特征在于包括：通过层压在绝缘基板上形成下电极和半导体层的第一步骤; 在半导体的表面上形成保护膜的第二步骤; 在第二步骤之后通过激光束处理在半导体层形成开口部分的第三步骤或半导体层和下部电极; 以及除去保护膜的第四步骤。

10. 再颁专利

USRE33947E Laser scribing method 失效
公开(公告)号：USRE33947E
公开(公告)日：1992-06-02
申请号：US608397
申请日：1990-11-02
申请人： Hisato Shinohara
发明人： Hisato Shinohara
IPC分类号： H01S3/10 , B23K26/06 , B23K26/073 , B23K26/36 , H01L21/20 , H01L21/268 , H01L39/24 , H05K1/03 , H05K3/02 , H05K3/38
CPC分类号： B23K26/0738 , B23K26/066 , B23K26/364 , B23K26/40 , H01L21/2026 , H01L21/268 , H01L39/2467 , B23K2203/172 , H05K1/0306 , H05K3/027 , H05K3/38
摘要： A laser scribing system and method is described. In the system, a film formed on a substrate is irradiated with laser beam which is focused on a limited portion of the film in order to remove the portion and produce a groove. Laser beam used for eliminating the portion of film formed on a substrate is deprived of its border portion in advance of the focusing. Sperical aberration is suppressed due to this elimination.

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