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    • 1. 发明申请
    • METHOD OF MANUFACTURING SOI SUBSTRATE
    • 制造SOI衬底的方法
    • US20110244652A1
    • 2011-10-06
    • US13070512
    • 2011-03-24
    • Shunpei YAMAZAKIToru TAKAYAMAMizuho SATONoriaki UTO
    • Shunpei YAMAZAKIToru TAKAYAMAMizuho SATONoriaki UTO
    • H01L21/30
    • H01L21/02046H01L21/02052H01L21/302H01L21/76254
    • An object of the present invention is to provide an SOI substrate including a semiconductor layer which is efficiently planarized. A method for manufacturing an SOI substrate includes a step of irradiating a bond substrate with an accelerated ion to form an embrittlement region; a step of bonding the bond substrate and the base substrate with an insulating layer positioned therebetween; a step of splitting the bond substrate at the embrittlement region to leave a semiconductor layer bonded to the base substrate; a step of disposing the semiconductor layer in front of a semiconductor target containing the same semiconductor material as the semiconductor layer; and a step of alternately irradiating the surface of the semiconductor layer and the semiconductor target with a rare gas ion, so that the surface of the semiconductor layer is planarized.
    • 本发明的目的是提供一种SOI衬底,其包括有效平面化的半导体层。 SOI衬底的制造方法包括用加速离子照射接合衬底以形成脆化区域的步骤; 将所述接合基板与所述基板的绝缘层接合的工序; 在所述脆化区域分离所述键合衬底以留下结合到所述基底衬底的半导体层的步骤; 将半导体层设置在包含与半导体层相同的半导体材料的半导体靶的前面的步骤; 以及用稀有气体离子交替地照射半导体层和半导体靶的表面的步骤,使得半导体层的表面被平坦化。
    • 4. 发明申请
    • LIGHT EMITTING DEVICE AND METHOD OF MANUFACTURING THE SAME
    • 发光装置及其制造方法
    • US20110233557A1
    • 2011-09-29
    • US13108021
    • 2011-05-16
    • Shunpei YAMAZAKIToru TAKAYAMAMai AKIBA
    • Shunpei YAMAZAKIToru TAKAYAMAMai AKIBA
    • H01L33/16
    • H01L51/0097H01L27/3244H01L27/326H01L51/5237H01L51/5253H01L51/5256H01L51/529H01L51/56H01L2221/68368H01L2227/326H01L2251/5315H01L2251/5338
    • The present invention has an object of providing a light emitting device including an OLED formed on a plastic substrate, which can prevent the degradation due to penetration of moisture or oxygen. On a plastic substrate, a plurality of films for preventing oxygen or moisture from penetrating into an organic light emitting layer in the OLED (hereinafter, referred to as barrier films) and a film having a smaller stress than that of the barrier films (hereinafter, referred to as a stress relaxing film), the film being interposed between the barrier films, are provided. Owing to a laminate structure of a plurality of barrier films, even if a crack occurs in one of the barrier films, the other barrier film(s) can effectively prevent moisture or oxygen from penetrating into the organic light emitting layer. Moreover, the stress relaxing film, which has a smaller stress than that of the barrier films, is interposed between the barrier films, thereby making it possible to reduce a stress of the entire sealing film. As a result, a crack due to stress hardly occurs.
    • 本发明的目的是提供一种发光装置,其包括形成在塑料基板上的OLED,其能够防止由于水分或氧气的渗透而导致的劣化。 在塑料基板上,用于防止氧或水分渗入OLED中的有机发光层的多个膜(以下称为阻挡膜)和具有比阻挡膜的应力小的膜(以下称为“ 被称为应力缓和膜),膜被插入在阻挡膜之间。 由于多个阻挡膜的层压结构,即使在一个阻挡膜中发生裂纹,另一个阻挡膜可以有效地防止水分或氧气渗入有机发光层。 此外,在阻挡膜之间插入有比阻挡膜小的应力的应力缓和膜,从而可以减小整个密封膜的应力。 结果,几乎不发生由于应力引起的裂纹。