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    • 1. 发明授权
    • Substrate with transparent conductive film and organic electroluminescence device using the same
    • 具有透明导电膜的衬底和使用其的有机电致发光器件
    • US06787989B2
    • 2004-09-07
    • US09820385
    • 2001-03-29
    • Shunji WadaYukihiro Kato
    • Shunji WadaYukihiro Kato
    • H05B3300
    • H01L51/0021Y10T428/163
    • A substrate with a transparent condcutive film is provided, which has a high work function and an excellent surface smoothness as well as a reduced specific resistance to thereby ensure a reduced power consumption and enhanced display quality. An ITO film 2 is formed on a glass substrate 1 by an ion plating method by using an ITO sintered compact with an SnO2 content of 4 to 6 wt %. The ITO film 2 obtained as above has a surface having a work function of 4.9 to 5.5 eV, a surface roughness of 1 to 10 nm, and a specific resistance of 1.6×10−4 &OHgr;·cm or less. An organic EL device using the substrate is provided, in which an organic multilayer film (hole transport layer 5, light-emitting layer 7, and electron transport layer 6) is laminated on the surface of the ITO film 2, and further a metal thin film layer 4 is laminated on the surface of the organic multilayer film.
    • 提供具有透明的保护膜的基板,其具有高功函数和优异的表面平滑度以及降低的电阻率,从而确保降低的功耗和增强的显示质量。 通过使用SnO 2含量为4〜6重量%的ITO烧结体,通过离子镀法在玻璃基板1上形成ITO膜2。 如上获得的ITO膜2具有功函数为4.9〜5.5eV,表面粗糙度为1〜10nm,电阻率为1.6×10 -4Ω·cm以下的表面。 提供了一种使用该基板的有机EL器件,其中在ITO膜2的表面上层叠有机多层膜(空穴传输层5,发光层7和电子传输层6),并且还具有金属薄膜 膜层4层叠在有机多层膜的表面上。