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1. 发明授权

US08203859B2 High frequency device with variable frequency and variable load impedance matching 有权
标题翻译：具有可变频率和可变负载阻抗匹配的高频器件
公开(公告)号：US08203859B2
公开(公告)日：2012-06-19
申请号：US11954436
申请日：2007-12-12
申请人： Shuji Omae , Kosuke Maeda , Ryohei Tanaka , Hideo Ito
发明人： Shuji Omae , Kosuke Maeda , Ryohei Tanaka , Hideo Ito
IPC分类号： H02M5/00 , H02P11/00
CPC分类号： H01J37/32174 , H01J37/32091 , H01J37/32183 , H03H7/40
摘要： A high frequency device for supplying a high frequency power to a load, the high frequency device includes: an oscillating unit that can vary an oscillation frequency; a high frequency power supplying unit that serves as a power source by amplifying an oscillation signal output from the oscillating unit for supplying the high frequency power to the load; a reflected-wave information calculating unit that calculates reflected wave information on a reflected wave power, and outputs the reflected wave information; a frequency control unit that controls the oscillation frequency of the oscillating unit so as to lower the reflected wave information; an impedance adjusting unit that is disposed at a downstream of the high frequency power supplying unit in a power supplying direction, and that has at least one variable reactance element which can be controlled; and an element control unit that controls the variable reactance element of the impedance adjusting unit so as to lower the reflected wave information.
摘要翻译：一种用于向负载提供高频电力的高频装置，所述高频装置包括：可改变振荡频率的振荡单元; 高频供电单元，通过放大从所述振荡单元输出的用于向所述负载提供高频功率的振荡信号，作为电源; 反射波信息计算单元，其计算反射波功率的反射波信息，并输出反射波信息; 频率控制单元，其控制所述振荡单元的振荡频率以降低所述反射波信息; 阻抗调整单元，其设置在所述高频供电单元的供电方向的下游，并且具有可控制的至少一个可变电抗元件; 以及元件控制单元，其控制阻抗调节单元的可变电抗元件，以便降低反射波信息。

2. 发明授权

US07495524B2 Impedance matching apparatus 有权
标题翻译：阻抗匹配装置
公开(公告)号：US07495524B2
公开(公告)日：2009-02-24
申请号：US11687912
申请日：2007-03-19
申请人： Shuji Omae , Shinichi Negi , Kosuke Maeda
发明人： Shuji Omae , Shinichi Negi , Kosuke Maeda
IPC分类号： H03H7/38
CPC分类号： H03F1/565
摘要： An impedance matching apparatus has: a storing portion 70 for previously storing, for plural positions which can be taken by a movable portion of a variable impedance element, allowable power values respectively corresponding to the plural positions of the movable portion; and an abnormality determining portion 80 for determining an allowable power value based on the present positions of the movable portion supplied from position detecting portions 41, 42 and the allowable power values stored in the storing portion 70, for comparing the allowable power value with an input power value, and for determining that it is abnormal when the input power value is larger than the allowable power value. Accordingly, the calculation load during the matching operation can be reduced.
摘要翻译：阻抗匹配装置具有：存储部分70，用于预先存储可变阻抗元件的可移动部分可以采取的多个位置，分别对应于可移动部分的多个位置的容许功率值; 以及异常确定部分80，用于基于从位置检测部分41,42提供的可移动部分的当前位置和存储在存储部分70中的可允许功率值来确定容许功率值，用于将容许功率值与输入功率值，并且用于当输入功率值大于容许功率值时确定其异常。因此，可以减少匹配操作期间的计算负荷。

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