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    • 5. 发明授权
    • Liquid discharge head and method of manufacturing the same
    • 液体排放头及其制造方法
    • US06908564B2
    • 2005-06-21
    • US10418216
    • 2003-04-18
    • Shuji KoyamaToshio KashinoHiroaki Mihara
    • Shuji KoyamaToshio KashinoHiroaki Mihara
    • B41J2/045B41J2/055B41J2/14B41J2/16B41J2/04
    • B41J2/1604B41J2/1404B41J2/14048B41J2/1623B41J2/1629B41J2/1631B41J2/1632B41J2/1642
    • Patterning is performed to thermal oxide films 12a and 12b formed on both surface sides of a silicon substrate in which crystal orientation of a surface is (100) or (110), a liquid chamber pattern and a liquid supplying port pattern are formed, and a liquid chamber and a liquid supplying port are formed separately by anisotropically etching the silicon substrate from both surface sides at the same time. Then, a silicon nitride film is deposited with a low pressure chemical vapor deposition to both surface sides of the silicon substrate and all faces of the liquid chamber and the liquid supplying port which are formed by etching. As a result, when the silicon substrate is used for a top plate, stiffness of the top plate is improved, design freedom of the liquid chamber and the liquid supplying port is increased, misalignment is prevented in bonding to the substrate, degradation of ejecting performance is prevented, and a liquid discharge head having high preciseness and high reliability can be provided.
    • 对形成在表面的结晶取向为(100)或(110)的硅衬底的两个表面侧,形成液体室图案和液体供给端口图案的热氧化膜12a和12b进行图案化, 并且通过同时从两个表面侧各向异性地蚀刻硅衬底而分别形成液体室和液体供给口。 然后,通过低压化学气相沉积将氮化硅膜沉积到硅衬底的两个表面侧和通过蚀刻形成的液体室和液体供给口的所有表面。 结果,当硅衬底用于顶板时,顶板的刚度提高,液室和液体供应口的设计自由度增加,在与基板接合时防止失准,喷射性能降低 并且可以提供具有高精度和高可靠性的液体排出头。
    • 9. 发明授权
    • Liquid ejection head cartridge and liquid container usable therewith
    • 液体喷射头盒和可用于其的液体容器
    • US06247806B1
    • 2001-06-19
    • US08886429
    • 1997-07-01
    • Hidehisa MatsumotoToshiaki SasakiHiroyuki IshinagaToshio KashinoKiyomitsu KudoYoshie AsakawaHiroaki Mihara
    • Hidehisa MatsumotoToshiaki SasakiHiroyuki IshinagaToshio KashinoKiyomitsu KudoYoshie AsakawaHiroaki Mihara
    • B41J2175
    • B41J2/17553B41J2/14048B41J2/17513
    • A liquid ejection head cartridge includes a liquid ejecting head and a liquid container. The liquid ejection head includes an ejection outlet, a bubble generation region, and a movable member disposed faced to the bubble generation region and displaceable between a first position and a second position further from the bubble generation region than the first position. The movable member moves from the first to the second position by pressure produced by the generation of a bubble to permit expansion of the bubble more in a downstream side closer to the ejection outlet. The liquid container includes a substantially prism-like outer wall provided with a substantial air vent portion and having a corner, and an inner wall having a prism-like shape with outer surfaces substantially equivalent to inside surfaces of the outer wall and having a corner portion corresponding to the corner of the outer wall, the inner wall being separable from the outer wall and defining a liquid accommodating portion for containing liquid, the inner wall further having a liquid supply portion for supplying the liquid out of the liquid accommodating portion to the liquid ejection head. The inner wall has a thickness which is smaller in the corner portion than a thickness of a central portion of the outer surfaces of the inner wall.
    • 液体喷射头盒包括液体喷射头和液体容器。 液体喷射头包括喷射出口,气泡生成区域和面对气泡产生区域设置的可移动部件,并且可以在比第一位置更远离气泡发生区域的第一位置和第二位置之间移位。 可移动部件通过产生气泡产生的压力从第一位置移动到第二位置,以允许气泡在更靠近喷射出口的下游侧膨胀。 液体容器包括大致棱柱状的外壁,该外壁具有大致空气排出部分并具有角部,内壁具有棱柱形状,其外表面基本上等于外壁的内表面,并且具有角部 对应于所述外壁的角部,所述内壁与所述外壁分离并且限定用于容纳液体的液体容纳部,所述内壁还具有用于将液体从所述液体容纳部供给到所述液体的液体供给部 喷头 内壁的角部的厚度比内壁的外表面的中央部的厚度小。