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    • 6. 发明授权
    • Magnetic head for perpendicular magnetic recording and method of manufacturing same
    • 用于垂直磁记录的磁头及其制造方法
    • US07796361B2
    • 2010-09-14
    • US11727371
    • 2007-03-26
    • Yoshitaka SasakiHiroyuki ItohHironori ArakiShigeki Tanemura
    • Yoshitaka SasakiHiroyuki ItohHironori ArakiShigeki Tanemura
    • G11B5/31
    • G11B5/3116G11B5/1278G11B5/3163
    • A pole layer has a track width defining portion and a wide portion. The pole layer has: first and second side surfaces located opposite to each other in a first region extending from a medium facing surface to a position at a distance of 10 to 300 nm from the medium facing surface; third and fourth side surfaces located in a second region other than the first region; a fifth side surface located at the boundary between the first and second regions and connecting the first and third side surfaces to each other; and a sixth side surface located at the boundary between the first and second regions and connecting the second and fourth side surfaces to each other. The distance between the first and second side surfaces taken in the track width direction decreases with decreasing distance from the top surface of the substrate. The angle formed by the third and fourth side surfaces with respect to the direction orthogonal to the top surface of the substrate is smaller than that formed by the first and second side surfaces with respect to the direction orthogonal to the top surface of the substrate.
    • 极层具有轨道宽度限定部分和宽部分。 所述极层具有:第一和第二侧表面在从介质相对表面延伸到距介质面向表面10至300nm距离的位置的第一区域中彼此相对; 位于除了第一区域之外的第二区域中的第三和第四侧表面; 第五侧表面,位于第一和第二区域之间的边界处,并且将第一和第三侧表面彼此连接; 以及位于第一和第二区域之间的边界处并将第二和第四侧表面彼此连接的第六侧表面。 在轨道宽度方向上取得的第一和第二侧表面之间的距离随着距衬底顶表面的距离减小而减小。 由第三和第四侧面相对于与基板顶面垂直的方向形成的角度小于由第一和第二侧面相对于与基板顶面正交的方向形成的角度。
    • 8. 发明申请
    • Method of manufacturing magnetic head for perpendicular magnetic recording
    • 用于垂直磁记录的磁头制造方法
    • US20090294402A1
    • 2009-12-03
    • US12153987
    • 2008-05-28
    • Hironori ArakiYoshitaka SasakiHiroyuki ItohShigeki TanemuraKazuo Ishizaki
    • Hironori ArakiYoshitaka SasakiHiroyuki ItohShigeki TanemuraKazuo Ishizaki
    • B44C1/22
    • G11B5/3116G11B5/1278G11B5/3163
    • A magnetic head includes: a pole layer including a track width defining portion and a wide portion; and an encasing layer disposed on a bottom forming layer and having a groove that accommodates the pole layer. The groove includes a first portion for accommodating at least part of the track width defining portion, and a second portion for accommodating at least part of the wide portion. A manufacturing method for the magnetic head includes: the step of etching a nonmagnetic layer that will become the encasing layer later, such that an initial groove including the first portion is formed in the nonmagnetic layer; the step of forming an initial groove mask covering the first portion; and a second etching step for etching the nonmagnetic layer so as to complete the groove. When the second etching step starts, a portion of the top surface of the bottom forming layer located in a region in which the second portion is to be formed is covered with the nonmagnetic layer or the initial groove mask.
    • 磁头包括:包括轨道宽度限定部分和宽部分的极层; 以及设置在底部形成层上并具有容纳极层的槽的封装层。 凹槽包括用于容纳轨道宽度限定部分的至少一部分的第一部分和用于容纳至少部分宽部分的第二部分。 磁头的制造方法包括以下步骤:在非磁性层中形成包含第一部分的初始槽,从而蚀刻将成为封装层的非磁性层; 形成覆盖所述第一部分的初始槽掩模的步骤; 以及用于蚀刻非磁性层以完成凹槽的第二蚀刻步骤。 当第二蚀刻步骤开始时,位于要形成第二部分的区域中的底部形成层的顶表面的一部分被非磁性层或初始凹槽掩模覆盖。