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    • 6. 发明申请
    • DEPOSITION HEAD AND FILM FORMING APPARATUS
    • 沉积头和成膜装置
    • US20120031339A1
    • 2012-02-09
    • US13262335
    • 2010-04-02
    • Yuji OnoTomohiko EduraTeruyuki HayashiAkitake TamuraMisako Saito
    • Yuji OnoTomohiko EduraTeruyuki HayashiAkitake TamuraMisako Saito
    • C23C16/455
    • C23C14/12C23C14/24H01L51/001H01L51/50
    • There is provided a deposition head capable of discharging a material gas having a uniform flow rate and equi-thermal property from each component in a large-sized substrate as well as a conventional small-sized one for forming a uniform thin film. A deposition apparatus including the deposition head is also provided. The deposition head is provided within a deposition apparatus for forming a thin film on a substrate and configured to discharge a material gas toward the substrate. The deposition head includes an outer casing, and an inner casing provided within the outer casing and into which the material gas is introduced. In the inner casing, an opening configured to discharge the material gas toward the substrate is formed, and a heater configured to heat the material gas is provided at an outer surface of the outer casing or in a space between the outer casing and the inner casing.
    • 提供一种沉积头,其能够在大尺寸基板中排出具有均匀流速和等热特性的材料气体,以及用于形成均匀薄膜的常规小尺寸基板。 还提供了包括沉积头的沉积设备。 沉积头设置在用于在衬底上形成薄膜并用于将材料气体朝向衬底排出的沉积设备中。 沉积头包括外壳和设置在外壳内并且材料气体被引入的内壳。 在内壳体中,形成有将材料气体朝向基板排出的开口,在外壳的外表面或外壳与内壳之间的空间内设置加热材料气体的加热器 。
    • 7. 发明申请
    • Apparatus and Method for Appearance Inspection
    • 外观检查装置及方法
    • US20080225299A1
    • 2008-09-18
    • US11793016
    • 2006-04-12
    • Yuji Ono
    • Yuji Ono
    • G01N21/55
    • G01N21/8901G01B11/24G01N21/8903G02B5/09G02B21/0048G02B26/12
    • Rotating polygon mirrors are configured such that angles formed by a rotation axis and mirror surfaces differs from one another in the mirror surfaces in order to shift a collecting point of a scanning light flux in a sub-scanning direction in association with rotation at constant angular speed. A collecting point position forming optical system is configured such that the collecting point is moved in an inspection range Zr in a height direction Z. The XYZ scanning is performed by moving the inspection object in the sub-scanning direction such that the collecting point shifted in the sub-scanning direction and the height direction is linearly scanned in the height direction of the inspection object in synchronization with the rotation of the rotating polygon mirror at the constant angular speed, and the an appearance positional coordinate of the inspection object is determined by a confocal method to perform the appearance inspection.
    • 旋转多面镜被构造成使得由旋转轴和镜面形成的角度在镜面中彼此不同,以便以与恒定角速度的旋转相关联地在副扫描方向上移动扫描光束的收集点 。 收集点位置形成光学系统被构造为使得收集点在高度方向Z上的检查范围Zr中移动。通过沿副扫描方向移动检查对象,使得收集点移动到 副扫描方向和高度方向与旋转多面反射镜的旋转恒定的角速度同步地沿检查对象的高度方向线性扫描,检查对象的外观位置坐标由 共焦方式进行外观检查。
    • 8. 发明授权
    • 3D-shape measurement apparatus
    • 3D形状测量装置
    • US06703634B2
    • 2004-03-09
    • US10011280
    • 2001-12-11
    • Yuji Ono
    • Yuji Ono
    • G01B1124
    • G01B11/25
    • In a 3D-shape measurement apparatus, a photoreceptive optical system for linearly scanning a target-to-be-measured with a scanning light beam and guiding a reflected light beam from the object to a scanning convergence lens is constituted such that the position of an apparent emission point of the reflected light to be incident on the scanning convergence lens moves in the same direction as the direction along which the scanning light beam deviates due to deformation of a scanning optical system, and the apparent emission point is always positioned on a scanning plane even when the scanning position varies.
    • 在3D形状测量装置中,用扫描光束线性扫描被测目标物并将来自物体的反射光束引导到扫描会聚透镜的感光光学系统构成为: 入射到扫描会聚透镜的反射光的表观发射点沿与扫描光束由于扫描光学系统的变形而偏离的方向相同的方向移动,并且表观发射点总是位于扫描 即使扫描位置变化。
    • 9. 发明授权
    • Waterproof connector
    • 防水连接器
    • US06053754A
    • 2000-04-25
    • US199434
    • 1998-11-25
    • Koji KanoKoji SuzukiYuji OnoNaoki Murasawa
    • Koji KanoKoji SuzukiYuji OnoNaoki Murasawa
    • H01R13/46H01R13/52
    • H01R13/5221
    • To provide a waterproof connector capable of reducing a load applied upon connection or separation of a male connector to or from a female connector while sufficiently ensuring sufficient waterproofing. A plurality of individually fitting projections, each being adapted to support a female terminal, are provided on the top surface of a collectively fitting projection provided in a female connector housing. In a male connector housing, a plurality of individually fitting recesses, in each of which an associated one of the individually fitting projections is fittable, are provided in a bottom surface portion of a collectively fitting recess in which the collectively fitting projection is fittable. Each of the individually fitting recesses is adapted to support a male terminal. An elastic sealing member supported by the female connector housing includes a pair of collectively sealing lips respectively formed on the inner and outer peripheral surfaces of a collectively sealing portion to be held between the collectively fitting projection and the collectively fitting recess, and a pair of individually sealing lips respectively formed on the inner and outer peripheral surfaces of each of the individually sealing portions to be held between the associated one of the individually fitting portions and the associated one of the individually fitting recesses.
    • 提供一种防水连接器,其能够在充分确保足够的防水性的同时减少在将阳连接器连接到阴连接器或从阴连接器分离时施加的负载。 在设置在阴连接器壳体中的共同配合的突起的顶表面上设置有多个单独配合的突起,每个突起适于支撑阴端子。 在阳连接器壳体中,多个单独配合的凹部,其中每个单独配合的凹部中的相关联的一个单独配合的突起可装配在共同嵌合的凹部的底表面部分中,共同配合的凸起可装配在凹部中。 每个单独装配的凹部适于支撑公端子。 由阴连接器壳体支撑的弹性密封构件包括分别形成在共同密封部分的内周表面和外周表面上的一对共同密封唇,该组合密封部分将保持在共同配合的凸起和集体装配凹部之间,以及一对单独的 分别形成在每个单独密封部分的内周表面和外周表面上的密封唇被保持在相关的一个单独的装配部分和相关联的一个单独的装配凹部中。
    • 10. 发明申请
    • REGULATING VALVE DEVICE
    • 调节阀装置
    • US20120074339A1
    • 2012-03-29
    • US13138670
    • 2010-03-08
    • Nobukazu IkedaMichio YamajiTsuyoshi TanigawaHiroshi KanekoYasushi YagiYuji OnoTadahiro OhmiYasuyuki Shirai
    • Nobukazu IkedaMichio YamajiTsuyoshi TanigawaHiroshi KanekoYasushi YagiYuji OnoTadahiro OhmiYasuyuki Shirai
    • F16K31/12
    • F16K31/126F16K31/1268F16K41/10
    • [Problem] To provide a regulating valve device having a valve element opened or closed by a working fluid.[Solution to Problem] A valve element 310 has a structure in which a valve head 310a and a valve body 310b are coupled by a valve stem 310c. In the valve box 305, the valve element 310 and a power transmitting member 320a are slidably housed. A first bellows 320b is fixed to the power transmitting member 320a and the valve box 305 to form a first space Us at a position on a side of the power transmitting member 320a opposite the valve element. A second bellows 320c is fixed to the power transmitting member 320a and the valve box 305 to form a second space Ls at a position on a side of the power transmitting member 320a closer to the valve element. According to a ratio of air supplied to the first space Us from a first pipe 320d and air supplied to the second space Ls from a second pipe 320e, the power transmitting member 320a transmits power to the valve head 310a to open or close a transport channel 200a.
    • [问题]提供一种具有由工作流体打开或关闭的阀元件的调节阀装置。 问题的解决方案阀元件310具有阀头310a和阀体310b通过阀杆310c联接的结构。 在阀箱305中,阀元件310和动力传递部件320a可滑动地容纳。 第一波纹管320b固定到动力传递部件320a和阀箱305,以在与阀元件相对的动力传递部件320a的一侧的位置处形成第一空间Us。 第二波纹管320c固定在动力传递部件320a和阀箱305上,在动力传递部件320a的靠近阀体的一侧的位置形成第二空间Ls。 根据从第一管320d向第一空间Us供给的空气的比例和从第二管320e供给到第二空间Ls的空气的比例,动力传递构件320a向阀头310a传递动力以打开或关闭运送通道 200a。