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1. 发明授权

US06650801B1 Reversible optical circulator utilizing a bi-morphic piezoelectric apparatus 失效
标题翻译：利用双变压电装置的可逆光循环器
公开(公告)号：US06650801B1
公开(公告)日：2003-11-18
申请号：US10222716
申请日：2002-08-15
申请人： Shudong Wu , Simon X. F. Cao , Thomas Cooney , Weicheng Chen
发明人： Shudong Wu , Simon X. F. Cao , Thomas Cooney , Weicheng Chen
IPC分类号： G02B626
CPC分类号： G02B6/3566 , G02B6/2746 , G02B6/29302 , G02B6/29386 , G02B6/3528 , G02B6/3548 , G02B6/355 , G02B6/3572 , G02B6/3578 , G02B6/358
摘要： A reversible optical circulator has an optical switch that includes: an arm composed of piezoelectric material with first and second faces and first and second ends, an electrode coupled to the arm for providing a voltage difference between the first and second faces of the arm, a support coupled to the first end of the arm for fixedly supporting the first end, an object with a convex surface coupled to the second end of the arm, a polarization rotation element coupled to the second face of the arm, a first magnet proximately located to the object and the first face of the arm, and a second magnet proximately located to the object and the second face of the arm. By using this optical switch, the optical circulator has stable and reproducible operation, high switching speeds, and low sensitivity to slight optical mis-alignments.
摘要翻译：可逆光环行器具有光开关，其包括：由压电材料构成的臂，其具有第一和第二面以及第一和第二端，耦合到臂的电极，用于在臂的第一和第二面之间提供电压差，支撑件，其联接到臂的第一端以固定地支撑第一端，具有联接到臂的第二端的凸表面的物体，耦合到臂的第二面的偏振旋转元件，大致位于所述物体和所述臂的第一面以及位于所述物体和所述臂的第二面附近的第二磁体。通过使用该光学开关，光环行器具有稳定且可重现的操作，高切换速度，以及对轻微光学误差的低灵敏度。

2. 发明授权

US06463189B1 Method and apparatus for optical switching devices utilizing a bi-morphic piezoelectric apparatus 失效
标题翻译：利用双向压电装置的光开关装置的方法和装置
公开(公告)号：US06463189B1
公开(公告)日：2002-10-08
申请号：US09513777
申请日：2000-02-24
申请人： Shudong Wu , Simon X. F. Cao , Thomas Cooney , Weicheng Chen
发明人： Shudong Wu , Simon X. F. Cao , Thomas Cooney , Weicheng Chen
IPC分类号： G02B626
CPC分类号： G02B6/3566 , G02B6/2746 , G02B6/29302 , G02B6/29386 , G02B6/3528 , G02B6/3548 , G02B6/355 , G02B6/3572 , G02B6/3578 , G02B6/358
摘要： The present invention provides a method and apparatus for optical switching devices utilizing a bi-morphic piezoelectric apparatus. The optical switching devices include an arm comprising a piezoelectric material, the arm including a first and a second face and a first and a second end, wherein the first face is opposite to the second face, wherein the first end is opposite to the second end; at least one electrode coupled to the arm for providing a voltage difference between the first and second faces of the arm; a support coupled to the first end of the arm for fixedly supporting the first end; an object with a convex surface coupled to the second end of the arm; an optical element coupled to the second face of the arm capable of deflecting an optical signal traveling therethrough; a first magnet proximately located to the object and to the first face of the arm; and a second magnet proximately located to the object and to the second face of the arm. The optical switching devices include optical switches utilizing a single electro-mechanical apparatuses or a plurality of them in a cascade arrangement, a reversible optical circulator, and a switchable optical channel separator. The optical devices have stable and reproducible operation, high switching speeds, and low sensitivity to slight optical mis-alignments or vibrations. They are of a compact modular design that allows the construction of more complex optical devices through utilization of a cascading arrangement.
摘要翻译：本发明提供一种利用双向压电装置的光开关装置的方法和装置。光开关器件包括一个包括压电材料的臂，该臂包括第一和第二面以及第一和第二端，其中第一面与第二面相对，其中第一端与第二端相对 ; 耦合到臂的至少一个电极，用于在臂的第一和第二面之间提供电压差; 耦合到所述臂的第一端以固定地支撑所述第一端的支撑件; 具有联接到所述臂的第二端的凸表面的物体; 耦合到所述臂的所述第二面的光学元件，其能够偏转从其行进的光信号; 近似位于物体和臂的第一面的第一磁体; 以及靠近所述物体和所述臂的第二面附近的第二磁体。光开关装置包括利用单个机电装置或其串联布置的多个光学开关的光学开关，可逆光环行器和可切换的光通道分离器。光学器件具有稳定且可重复的操作，高开关速度，以及对轻微光学误差或振动的低灵敏度。它们具有紧凑的模块化设计，允许通过使用级联布置来构建更复杂的光学器件。

3. 发明申请

US20120240859A1 WAFER SUSCEPTOR AND CHEMICAL VAPOR DEPOSITION APPARATUS 审中-公开
标题翻译： WAFER SUSCEPTOR和化学蒸气沉积装置
公开(公告)号：US20120240859A1
公开(公告)日：2012-09-27
申请号：US13168077
申请日：2011-06-24
申请人： Weicheng Chen , Zonglin Lee , Hsinchuan Wang
发明人： Weicheng Chen , Zonglin Lee , Hsinchuan Wang
IPC分类号： C23C16/458 , B05C13/00
CPC分类号： H01L21/68764 , C23C16/4584 , H01L21/68771
摘要： A wafer susceptor and a chemical vapor deposition apparatus. In one embodiment, the chemical vapor deposition apparatus includes a chamber, a susceptor, a heater and a gas supply system. The susceptor is disposed within the chamber and is rotatable around a rotation axis, wherein an upper surface of the susceptor is suitable for carrying a plurality of wafers, and a middle region of a lower surface of the susceptor is set with a first cavity. The heater is disposed under the susceptor and is used to heat the wafers on the susceptor. The gas supply system is used to introduce a reactive gas into the chamber.
摘要翻译：晶片基座和化学气相沉积装置。在一个实施例中，化学气相沉积设备包括腔室，基座，加热器和气体供应系统。感受体设置在室内并且可围绕旋转轴线旋转，其中，基座的上表面适于承载多个晶片，并且基座的下表面的中间区域设置有第一腔体。加热器设置在基座下方，用于加热基座上的晶片。气体供应系统用于将反应性气体引入室中。

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