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    • 4. 发明授权
    • Optical voltage electric field sensor
    • 光电压电场传感器
    • US5446381A
    • 1995-08-29
    • US112070
    • 1993-08-26
    • Hisakazu OkajimaMasanobu Yamamoto
    • Hisakazu OkajimaMasanobu Yamamoto
    • G01R15/24G01R19/00G02F1/03G01D5/34
    • G01R15/242
    • An optical voltage electric field sensor of the type which includes a light source, a polarizer for linearly polarizing an incident light beam emanated from the light source, a phase plate for applying a phase difference to the linearly polarized light beam, a Pockels element for modulating the linearly polarized light beam applied with the phase difference in accordance with a voltage or electric filed applied thereto, an analyzer for separating the modulated light beam into a S-polarized light beam and a P-polarized light beam, a first light-receiving element arranged to receive the S-polarized light beam for converting the S-polarized light beam into a first electric signal V.sub.1 indicative of the intensity of the light beam, and a second light-receiving element arranged to receive the P-polarized light beam for converting the P-polarized light beam into a second electric signal indicative of the intensity of the light beam. The sensor further includes a first calculation circuit for calculating an equationV.sub.11 =(V.sub.1 -DC.sub.1)/DC.sub.1(where DC.sub.1 is a direct current component of the first electric signal) to produce an output V.sub.11 therefrom, a second calculation circuit for calculating an equationV.sub.22 =(V.sub.2 -DC.sub.2)/DC.sub.2(where DC.sub.2 is a direct current component of the second electric signal) to produce an output V.sub.22 therefrom, and a third calculation circuit for calculating an equationV.sub.3 =1[(.alpha./V.sub.11)-(.beta./V.sub.22)](where .alpha. and .beta. are constants) to produce an output V.sub.3 for measurement of the applied voltage or electric field.
    • 一种光电压电场传感器,其包括光源,用于线性偏振从光源发射的入射光束的偏振器,用于向线偏振光束施加相位差的相位板,用于调制的Pockels元件 根据施加的电压或电场施加相位差的线偏振光束,将调制光束分离成S偏振光束和P偏振光束的分析器,第一受光元件 布置成接收用于将S偏振光束转换成表示光束强度的第一电信号V1的S偏振光束,以及布置成接收用于转换的P偏振光束的第二光接收元件 所述P偏振光束成为表示所述光束强度的第二电信号。 传感器还包括用于计算公式V11 =(V1-DC1)/ DC1(其中DC1是第一电信号的直流分量)以产生输出V11的第一计算电路,用于计算等式 V22 =(V2-DC2)/ DC2(其中DC2是第二电信号的直流分量)以产生输出V22,以及用于计算等式V3 = 1 [(α/ V11) - ( β/ V22)](其中α和β是常数),以产生用于测量施加电压或电场的输出V3。
    • 6. 发明申请
    • Ceramic heaters
    • 陶瓷加热器
    • US20050173410A1
    • 2005-08-11
    • US10998392
    • 2004-11-29
    • Hisakazu OkajimaMitsuru Ohta
    • Hisakazu OkajimaMitsuru Ohta
    • H05B3/10H01L21/00H01L21/02H01L21/205H05B3/02H05B3/12H05B3/14H05B3/68H05B3/74
    • H05B3/143H01L21/67103
    • An object of the present invention is to provide a heater having a ceramic substrate with a through hole formed therein so that the uniformity of temperature on the heating face of the substrate can be improved and the use life of the ceramic substrate can be improved upon thermal cycles. A ceramic heater comprises a substrate made of a ceramic material and having a heating face where three or more zones 3C, 3F are allocated, heating resistances corresponding to the zones, respectively, and terminals 5C electrically connected to the heating resistances, respectively. Three or more holes 4 are formed in the substrate. Distances of the terminals 5C and the wall surfaces facing the holes 4 are 8 mm or more, respectively. The heating resistance 15 intersects a straight line 16 connecting the center of the terminal and the center 4a of the hole in a plan view.
    • 本发明的目的是提供一种加热器,其具有形成有通孔的陶瓷基板,从而可以提高基板的加热面上的温度均匀性,并且可以提高陶瓷基板的使用寿命 周期。 陶瓷加热器包括由陶瓷材料制成的基板,并且具有分别具有三个或更多个区域3C,3F的加热面,分别对应于这些区域的加热电阻和分别与加热电阻电连接的端子5C 。 在基板上形成三个以上的孔4。 端子5C和面向孔4的壁面的距离分别为8mm以上。 加热电阻15在平面图中与连接端子的中心和孔的中心4a的直线16相交。
    • 7. 发明申请
    • Heater
    • 加热器
    • US20070039944A1
    • 2007-02-22
    • US11498378
    • 2006-08-03
    • Hisakazu OkajimaYoshinobu Goto
    • Hisakazu OkajimaYoshinobu Goto
    • H05B3/68
    • H05B3/143H01L21/67103
    • A heater comprises a heating member formed in a plate shape that includes a substrate-heating surface on which a substrate is mounted and a heating member rear surface which is on the opposite side of the substrate-heating surface, has a resistance heating element embedded therein; and an auxiliary member that is placed on the side of the heating member rear surface of the heating member and has an opposing surface which opposes the heating member rear surface. A planar gas path that is a path for gas ejected on the substrate-heating surface is formed between the heating member rear surface and the opposing surface.
    • 加热器包括形成为板状的加热构件,该加热构件包括其上安装有基板的基板加热面和位于基板加热面相反侧的加热构件后表面,其内嵌有电阻加热元件 ; 以及辅助部件,其设置在加热部件的加热部件背面的一侧,并具有与加热部件背面相对的相对面。 作为在基板加热面上喷出的气体的路径的平面气体路径形成在加热部件背面与相对面之间。
    • 8. 发明授权
    • Ceramic heaters
    • 陶瓷加热器
    • US07173219B2
    • 2007-02-06
    • US10998392
    • 2004-11-29
    • Hisakazu OkajimaMitsuru Ohta
    • Hisakazu OkajimaMitsuru Ohta
    • H05B3/68C23C16/00
    • H05B3/143H01L21/67103
    • An object of the present invention is to provide a heater having a ceramic substrate with a through hole formed therein so that the uniformity of temperature on the heating face of the substrate can be improved and the use life of the ceramic substrate can be improved upon thermal cycles. A ceramic heater comprises a substrate made of a ceramic material and having a heating face where three or more zones 3C, 3F are allocated, heating resistances corresponding to the zones, respectively, and terminals 5C electrically connected to the heating resistances, respectively. Three or more holes 4 are formed in the substrate. Distances of the terminals 5C and the wall surfaces facing the holes 4 are 8 mm or more, respectively. The heating resistance 15 intersects a straight line 16 connecting the center of the terminal and the center 4a of the hole in a plan view.
    • 本发明的目的是提供一种加热器,其具有形成有通孔的陶瓷基板,从而可以提高基板的加热面上的温度均匀性,并且可以提高陶瓷基板的使用寿命 周期。 陶瓷加热器包括由陶瓷材料制成的基板,并且具有分别具有三个或更多个区域3C,3F的加热面,分别对应于这些区域的加热电阻和分别与加热电阻电连接的端子5C 。 在基板上形成三个以上的孔4。 端子5C和面向孔4的壁面的距离分别为8mm以上。 加热电阻15在平面图中与连接端子的中心和孔的中心4a的直线16相交。
    • 9. 发明授权
    • Optical magnetic field sensor capable of precise measurement without
temperature induced errors
    • 光学磁场传感器能够精确测量,无温度引起的误差
    • US5382901A
    • 1995-01-17
    • US12843
    • 1993-02-02
    • Hisakazu OkajimaMasaki Noda
    • Hisakazu OkajimaMasaki Noda
    • G01R15/24G01R33/032G01R31/00G01R33/02G02B5/30
    • G01R33/0322G01R15/246
    • An optical magnetic field sensor is provided that can precisely measure a magnetic field strength without measuremental errors caused by temperature change. The sensor includes a light source, a polarizer, a Faraday's element, an analyzer, a first light beam-receiving element, a first calculation circuit, a second light beam-receiving element, a second calculation circuit, and a third calculation circuit, wherein the light beam emitted from the light source is passed through the polarizer, the Faraday's element and the analyzer in sequence, an S polarized light beam after passed through the analyzer is passed through the first light beam-receiving element, an output signal therefrom is calculated in the first calculation circuit, a P polarized light beam after passed through the analyzer is passed through the second light beam-receiving element, an output signal therefrom is calculated in the second calculation circuit, the third calculation circuit is supplied with the outputs V.sub.11 and V.sub.22 from the first and second calculation circuits respectively to obtain an output V.sub.3 based on specific equations, and a magnetic field strength is obtained from the output V.sub.3 of the third calculation circuit.
    • 提供了一种能够精确地测量磁场强度而没有由温度变化引起的测量误差的光学磁场传感器。 传感器包括光源,偏振器,法拉第元件,分析器,第一光束接收元件,第一计算电路,第二光束接收元件,第二计算电路和第三计算电路,其中 从光源发射的光束依次通过偏振器,法拉第元件和分析器,通过分析器的S偏振光束通过第一光束接收元件,计算其输出信号 在第一计算电路中,通过分析仪的P偏振光束通过第二光束接收元件,在第二计算电路中计算其输出信号,向第三计算电路提供输出V11和 V22分别从第一和第二计算电路获得基于特定方程的输出V3,并获得磁场强度 d从第三个计算电路的输出V3。
    • 10. 发明授权
    • Optical magnetic-field sensor having spherical lenses for light
collimation
    • 具有用于光准直的球面透镜的光学磁场传感器
    • US5355084A
    • 1994-10-11
    • US745191
    • 1991-08-15
    • Hisakazu OkajimaYuji Asai
    • Hisakazu OkajimaYuji Asai
    • G01R31/00G01R15/24G01R33/032G02B6/32G01R3/00G01R33/022G02F1/09
    • G01R33/0322Y10T29/49007
    • An optical magnetic-field sensor includes a base fixed relative to distal ends of optical fibers inserted in the sensor, optical parts and an optical element for transmitting optical signals between the distal ends of the optical fibers. The optical signals are collimated between the optical parts and the distal ends of the optical fibers. The optical magnetic-field sensor further includes spherical lenses optically aligned with the distal ends of the optical fibers for collimating the optical signals, and synthetic resin members filled in clearances between the distal ends of the optical fibers and the spherical lenses, respectively. With the above arrangement, it is possible to effect the alignment of optical axes of the optical fibers and the spherical lenses easily with high accuracy in a short period of time.
    • 光学磁场传感器包括相对于插入在传感器中的光纤的远端固定的基座,光学部件和用于在光纤的远端之间传输光学信号的光学元件。 光信号在光学部件和光纤的远端之间准直。 光磁场传感器还包括与用于准直光信号的光纤的远端光学对准的球面透镜,以及分别填充在光纤的远端和球面透镜之间的间隙的合成树脂构件。 通过上述配置,可以在短时间内以高精度容易地实现光纤和球面透镜的光轴的对准。