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    • 1. 发明授权
    • Method and apparatus for visual indication of optical alignment of
photoelectric switch
    • 用于光电开关光学对准的视觉指示的方法和装置
    • US4940889A
    • 1990-07-10
    • US394130
    • 1989-08-15
    • Shoichi OnoAtsuhito Kobayashi
    • Shoichi OnoAtsuhito Kobayashi
    • G01B11/27G01V8/12G08B13/183
    • G01B11/272G01V8/12G08B13/183
    • An alignment system for photoelectric switch includes a variable frequency oscillator producing a frequency which varies according to a light reception signal from a light receiving element in the photoelectric switch. A light emitting device is energized by the output of the variable frequency oscillator to give a visual indication of alignment. A threshold compares the amplitude of the light reception signal with a preset voltage. When the light reception signal exceeds the preset voltage, a logic element provide steady illumination of the light emitting device as an indication that alignment is completed. A lower threshold is then applied to the threshold to keep the light emitting device steadily illuminated until misalignment or propagation conditions reduce the amount of light received.
    • 用于光电开关的对准系统包括产生根据来自光电开关中的光接收元件的光接收信号而变化的频率的可变频率振荡器。 发光装置由可变频率振荡器的输出端激励,以给出对准的视觉指示。 阈值将光接收信号的幅度与预设电压进行比较。 当光接收信号超过预设电压时,逻辑元件提供发光装置的稳定照明,作为对准完成的指示。 然后将较低的阈值施加到阈值以保持发光装置稳定地照亮,直到未对准或传播条件减少接收的光量。
    • 2. 发明授权
    • Light reception signal circuit for photoelectric switch
    • 用于光电开关的光接收信号电路
    • US5008532A
    • 1991-04-16
    • US394213
    • 1989-08-15
    • Shoichi OnoAtsuhito Kobayashi
    • Shoichi OnoAtsuhito Kobayashi
    • H03K17/78G01V8/12
    • G01V8/12
    • The light reception signal circuit for photoelectric switch includes a photoelectric conversion circuit for receiving light from a light emitting part controlled for periodic emission. The photoelectric conversion circuit generates an electrical signal corresponding to the quantity of the received light. A programmable attenuator receives the output electrical signal, and attenuates it in even step in response to a digital control signal. A first comparator compares the output voltage with a predetermined upper bound threshold. The first comparator generates a clock signal when the output voltage exceeds the upper bound threshold. A peak holding circuit for receives an output voltage of the programmable attenuator, and holds the peak value of the output voltage on a time constant that is much longer than an emission period of the light emitting part. A second comparator compares the output voltage of the peak holding circuit with a predetermined lower bound threshold and generates an outgoing signal when the output voltage decreases below the lower bound threshold. A counter counts the clock pulses thereby generating a digital control signal for increasing the attenuation of the programmable attenuator. The counter is reset outgoing signal of the second comparator. A third comparator compares the output voltage of the programmable attenuator with a predetermined decision level to produce the detection output of the photoelectric switch.
    • 6. 发明授权
    • Plasma processing apparatus
    • 等离子体处理装置
    • US06270618B1
    • 2001-08-07
    • US09205800
    • 1998-12-04
    • Akira NakanoSung Chul KimKoichi FukudaYasuhiko KasamaTadahiro OhmiShoichi Ono
    • Akira NakanoSung Chul KimKoichi FukudaYasuhiko KasamaTadahiro OhmiShoichi Ono
    • C23F102
    • H01J37/32174C23C16/4405H01J37/32082
    • A plasma processing apparatus is provided which does not require replacement of a band eliminator according to a frequency used, which is capable of performing chamber cleaning without replacing a resonance circuit, and which is capable of performing plasma cleaning of the inside of the chamber without using a bellows. The plasma processing apparatus includes a resonance circuit (band eliminator) for causing series resonance with a microwave circuit formed of at least a susceptor electrode and a processing chamber in order to trap plasma between a plasma excitation electrode and the susceptor electrode when the surface of a workpiece placed on the susceptor electrode is processed by plasma generated between the plasma excitation electrode and the susceptor electrode, which are provided inside the processing chamber; and for causing parallel resonance with the microwave circuit in order to diffuse plasma inside the processing chamber when performing plasma cleaning.
    • 提供一种等离子体处理装置,其不需要根据所使用的频率来更换带除器,其能够执行腔室清洁而不更换谐振电路,并且能够在不使用腔室内进行等离子体清洁室内 一个波纹管。 等离子体处理装置包括用于与由至少一个基座电极和一个处理室形成的微波电路进行串联谐振的谐振电路(去波器),以便在等离子体激发电极和基座电极之间捕获等离子体时 放置在基座电极上的工件通过设置在处理室内部的等离子体激发电极和基座电极之间产生的等离子体进行处理; 并且用于与微波电路并联谐振,以便在进行等离子体清洗时在等离子体清洗中扩散处理室内的等离子体。
    • 10. 发明授权
    • Ion pump for producing an ultrahigh degree of vacuum
    • 用于产生超高真空度的离子泵
    • US4389165A
    • 1983-06-21
    • US190913
    • 1980-09-26
    • Shoichi OnoKuniyoshi Yokoo
    • Shoichi OnoKuniyoshi Yokoo
    • H01J41/12H01J41/20F04B37/02
    • H01J41/20
    • An ion pump for producing an ultrahigh degree of vacuum comprising a space formed between a first perforated flat plate-shaped electrode and a second flat plate-shaped electrode and having a high frequency electric source connected between the first and second electrodes, said space being operative to induce multipactor effect between said first and second electrodes, and an ionization space adjacent to one of said first and second electrodes and formed between a first perforated getter electrode and a second getter electrode applied with a negative potential, said ionization space being operative to cause the moving electrons produced by the multipactor effect to collide with gas molecules and ionize the latter.
    • 一种用于产生超高真空度的离子泵,包括形成在第一穿孔平板状电极和第二平板状电极之间并且具有连接在第一和第二电极之间的高频电源的空间,所述空间是可操作的 以在所述第一和第二电极之间诱导多反应器效应,以及与所述第一和第二电极之一相邻的电离空间,并形成在施加有负电位的第一穿孔吸气剂电极和第二吸气剂电极之间,所述电离空间可操作地引起 由多反应器产生的运动电子效应与气体分子碰撞并使其离子化。